isifudumezi sokwaleka se-silicon carbide ceramic

Inkcazo emfutshane:

Njengomvelisi kunye nomthengisi weSilicon Carbide Ceramic Coating yobungcali eTshayina, iSilicon Carbide Ceramic Coating yeVet-China isetyenziswa kakhulu kwiindawo eziphambili zezixhobo zokwenza i-semiconductor, ingakumbi xa kubandakanyeka iinkqubo zeCVD kunye nePECVD. I-Vet-China igxile ekuveliseni nasekunikezeni iSilicon Carbide Ceramic Coating esebenza kakuhle, kwaye izibophelele ekuboneleleni ngezisombululo zobuchwepheshe obuphambili kunye nemveliso kushishino lwe-semiconductor. Wamkelekile imibuzo yakho.


Iinkcukacha zeMveliso

Iithegi zeMveliso

Ugqirha wezilwanyana-eTshayinaI-Silicon Carbide CeramicI-Coating yi-coating ekhuselayo esebenza kakhulu eyenziwe ngokuqina kakhulu kwaye ayigugii-silicon carbide (i-SiC)izinto, ezibonelela ngokumelana nokugqwala kweekhemikhali okugqwesileyo kunye nokuzinza kumaqondo obushushu aphezulu. Ezi mpawu zibalulekile kwimveliso ye-semiconductor, ngoko keUkwaleka kweCeramic yeSilicon Carbideisetyenziswa kakhulu kwiindawo eziphambili zezixhobo zokwenza i-semiconductor.

Indima ethile yeVet-ChinaI-Silicon Carbide CeramicUkwaleka kwimveliso ye-semiconductor kulandelayo:

Ukuphucula ukuqina kwezixhobo:I-Silicon Carbide Ceramic Coating I-Silicon Carbide Ceramic Coating ibonelela ngokhuseleko olugqwesileyo kumphezulu wezixhobo zokwenza i-semiconductor ngobunzima bayo obuphezulu kakhulu kunye nokumelana nokuguguleka. Ingakumbi kwiindawo zenkqubo ezinobushushu obuphezulu kunye neemeko ezirhabaxa kakhulu, ezifana ne-chemical vapor deposition (CVD) kunye ne-plasma etching, i-coating inokuthintela ngempumelelo umphezulu wezixhobo ekubeni wonakaliswe kukuguguleka kweekhemikhali okanye ukuguguleka komzimba, ngaloo ndlela yandisa kakhulu ubomi benkonzo yezixhobo kwaye inciphise ixesha lokungasebenzi elibangelwa kukutshintshwa nokulungiswa rhoqo.

Phucula ubunyulu benkqubo:Kwinkqubo yokwenziwa kwe-semiconductor, ungcoliseko oluncinci lunokubangela iziphene kwimveliso. Ukungangeni kweekhemikhali kweSilicon Carbide Ceramic Coating kuyivumela ukuba ihlale izinzile phantsi kweemeko ezinzima, ithintela izinto ukuba zingakhuphi amasuntswana okanye ukungcola, ngaloo ndlela iqinisekisa ubunyulu benkqubo. Oku kubaluleke kakhulu kumanyathelo okwenziwa afuna ukuchaneka okuphezulu kunye nococeko oluphezulu, njenge-PECVD kunye nokufakelwa kwe-ion.

Lungiselela ulawulo lobushushu:Kwinkqubo ye-semiconductor yobushushu obuphezulu, efana ne-fast thermal processing (RTP) kunye neenkqubo ze-oxidation, i-high thermal conductivity ye-Silicon Carbide Ceramic Coating ivumela ukusasazwa kobushushu obufanayo ngaphakathi kwezixhobo. Oku kunceda ukunciphisa uxinzelelo lobushushu kunye nokuguqulwa kwezinto okubangelwa kukuguquguquka kobushushu, ngaloo ndlela kuphucula ukuchaneka kunye nokuhambelana kokwenziwa kwemveliso.

Xhasa iimeko zenkqubo ezintsonkothileyo:Kwiinkqubo ezifuna ulawulo oluntsonkothileyo lomoya, ezifana nokugrumba kwe-ICP kunye neenkqubo zokugrumba ze-PSS, ukuzinza kunye nokumelana nokuxinana kwe-Silicon Carbide Ceramic Coating kuqinisekisa ukuba izixhobo zigcina ukusebenza okuzinzileyo ekusebenzeni ixesha elide, kunciphisa umngcipheko wokonakala kwezinto okanye umonakalo wezixhobo ngenxa yotshintsho lokusingqongileyo.

i-silicon carbide ceramic coating
Isifudumezi segrafiti (4)

I-CVD SiC薄膜基本物理性能

Iimpawu ezisisiseko zomzimba ze-CVD SiCugqubuthelo

性质 / Ipropati

典型数值 / Ixabiso eliqhelekileyo

晶体结构 / Ulwakhiwo lwekristale

Isigaba se-FCC β多晶,主要為(111)取向

密度 / Ubuninzi

3.21 g/cm³

硬度 / Ubulukhuni

2500 维氏硬度 (500g umthwalo)

晶粒大小 / Ubukhulu beenkozo

2 ~ 10μm

纯度 / Ucoceko lweekhemikhali

99.99995%

热容 / Umthamo wobushushu

640 J·kg-1·K-1

升华温度 / Ubushushu bokunyibilikisa

2700℃

抗弯强度 / Amandla okugobeka

I-415 MPa RT 4-point

杨氏模量 / Imodulus yoLutsha

I-430 Gpa 4pt bend, 1300℃

导热系数 / I-ThermalUkuqhuba

300W·m-1·K-1

热膨胀系数 / Ukwandiswa kobushushu (CTE)

4.5×10-6K-1

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