N’chifukwa chiyani makoma a m’mbali amapindika akamauma?

Kusagwirizana kwa bombardment ya ion

Youmakudulanthawi zambiri ndi njira yomwe imaphatikiza zotsatira zakuthupi ndi zamankhwala, momwe kuphulika kwa ayoni ndi njira yofunika kwambiri yopangira zinthu zakuthupi.njira yocheka, ngodya ya zochitika ndi kugawa mphamvu kwa ma ayoni kungakhale kosiyana.

Ngati ngodya ya incident ya ma ion ndi yosiyana m'malo osiyanasiyana pa mbali ya khoma, zotsatira za ions pa mbali ya khoma zidzakhalanso zosiyana. M'madera omwe ali ndi ma ion angles akuluakulu, zotsatira za ions pa mbali ya khoma zimakhala zolimba, zomwe zimapangitsa kuti mbali ya khoma m'derali iwonongeke kwambiri, zomwe zimapangitsa kuti mbali ya khoma ipinde. Kuphatikiza apo, kugawa kosalingana kwa mphamvu ya ma ion kumabweretsanso zotsatira zofanana. Ma ion omwe ali ndi mphamvu zambiri amatha kuchotsa zinthu bwino, zomwe zimapangitsa kuti pakhale kusasinthasintha.kudulamadigiri a mbali ya khoma m'malo osiyanasiyana, zomwe zimapangitsa kuti mbali ya khoma ipinde.

Mphamvu ya photoresist

Photoresist imagwira ntchito ngati chigoba pouma, kuteteza madera omwe safunika kudulidwa. Komabe, photoresist imakhudzidwanso ndi plasma bombardment ndi zochita za mankhwala panthawi yodulidwa, ndipo magwiridwe ake amatha kusintha.

Ngati makulidwe a photoresist ndi osafanana, kuchuluka kwa momwe amagwiritsidwira ntchito panthawi yocheka sikufanana, kapena kugwirizana pakati pa photoresist ndi substrate kuli kosiyana m'malo osiyanasiyana, kungayambitse chitetezo chosafanana cha makoma a m'mbali panthawi yocheka. Mwachitsanzo, madera omwe ali ndi photoresist yopyapyala kapena ofooka angapangitse kuti zinthu zapansi zikhale zosavuta kujambula, zomwe zimapangitsa kuti makoma a m'mbali apinde pamalo awa.

Kusiyana kwa zinthu za substrate

Zipangizo zojambulidwa zokha zitha kukhala ndi makhalidwe osiyanasiyana, monga momwe ma kristalo amayendera komanso kuchuluka kwa doping m'madera osiyanasiyana. Kusiyana kumeneku kudzakhudza kuchuluka kwa etching ndi kusankha etching.
Mwachitsanzo, mu silicon yopangidwa ndi kristalo, kapangidwe ka maatomu a silicon m'malo osiyanasiyana a kristalo ndi kosiyana, ndipo reactivity yawo ndi kuchuluka kwa etching ndi mpweya wopangidwa ndi etching zidzakhalanso zosiyana. Panthawi yopangidwa ndi etching, kusiyana kwa etching komwe kumachitika chifukwa cha kusiyana kwa zinthu zakuthupi kudzapangitsa kuti etching ya makoma a m'mbali ikhale yosagwirizana, zomwe pamapeto pake zimapangitsa kuti makoma a m'mbali agwedezeke.

Zinthu zokhudzana ndi zida

Kagwiridwe ka ntchito ndi momwe zida zomangira zimakhudziranso zotsatira za kumeta. Mwachitsanzo, mavuto monga kugawa kwa plasma kosagwirizana m'chipinda chochitira zinthu komanso kuwonongeka kwa ma electrode kosagwirizana kungayambitse kugawa kosagwirizana kwa magawo monga kuchuluka kwa ma ion ndi mphamvu pamwamba pa wafer panthawi yometa.

Kuphatikiza apo, kuwongolera kutentha kosagwirizana kwa zida ndi kusinthasintha pang'ono kwa mpweya kungakhudzenso kufanana kwa kupyola, zomwe zimapangitsa kuti khoma la m'mbali lipindike.