Kungani izindonga eziseceleni zigoba ngesikhathi sokusika okomile?

Ukungalingani kwe-ion bombardment

Komileukuqophangokuvamile inqubo ehlanganisa imiphumela yomzimba neyamakhemikhali, lapho ukuqhuma kwe-ion kuyindlela ebalulekile yokuqopha ngokomzimba. Ngesikhathiinqubo yokuqopha, i-engeli yesigameko kanye nokusatshalaliswa kwamandla kwama-ion kungase kungalingani.

Uma i-engeli yesigameko se-ion ihlukile ezindaweni ezahlukene odongeni oluseceleni, umphumela wokuchoma wama-ion odongeni oluseceleni nawo uzohluka. Ezindaweni ezinezingqimba ezinkulu zesigameko se-ion, umphumela wokuchoma wama-ion odongeni oluseceleni unamandla kakhulu, okuzokwenza ukuthi udonga oluseceleni kule ndawo luchomeke kakhulu, okubangela ukuthi udonga oluseceleni lugobe. Ngaphezu kwalokho, ukusatshalaliswa okungalingani kwamandla e-ion nakho kuzokhiqiza imiphumela efanayo. Ama-ion anamandla aphezulu angasusa izinto ngempumelelo, okuholela ekungahambelani kahleukuqophaamazinga odonga oluseceleni ezindaweni ezahlukene, okubangela ukuthi udonga oluseceleni lugobe.

Ithonya le-photoresist

I-Photoresist idlala indima yemaski ekuqopheni okomile, ivikela izindawo ezingadingi ukuqopheni. Kodwa-ke, i-photoresist nayo ithintwa ukuqhunyiswa kwe-plasma kanye nokusabela kwamakhemikhali ngesikhathi senqubo yokuqopheni, futhi ukusebenza kwayo kungashintsha.

Uma ubukhulu be-photoresist bungalingani, izinga lokusetshenziswa ngesikhathi senqubo yokuqopha lingaguquguquki, noma ukunamathelana phakathi kwe-photoresist ne-substrate kuhlukile ezindaweni ezahlukene, kungaholela ekuvikelweni okungalingani kwezindonga eziseceleni ngesikhathi senqubo yokuqopha. Isibonelo, izindawo ezine-photoresist encane noma ukunamathela okubuthakathaka zingenza izinto ezingaphansi ziqopheke kalula, okubangela ukuthi izindonga eziseceleni zigobe kulezi zindawo.

Umehluko ezimpahleni zezinto ze-substrate

Izinto eziqoshwe phansi ngokwazo zingase zibe nezakhiwo ezahlukene, njengokuqondiswa kwekristalu okuhlukile kanye nokugxila kwe-doping ezifundeni ezahlukene. Lokhu kwehluka kuzothinta izinga lokuqoshwa kanye nokukhetha kokuqoshwa.
Isibonelo, ku-silicon ekristalu, ukuhlelwa kwama-athomu e-silicon ngezindlela ezahlukene zekristalu kuhlukile, futhi ukusebenza kwawo kanye nesilinganiso sokusika ngegesi yokusika nakho kuzohluka. Ngesikhathi senqubo yokusika, amazinga ahlukene okusika abangelwa umehluko wezakhiwo zezinto azokwenza ukujula kokusika kwezindonga eziseceleni kungavumelani, ekugcineni kuholele ekugobeni kwezindonga eziseceleni.

Izici ezihlobene nemishini

Ukusebenza kanye nesimo semishini yokuqopha nakho kunomthelela obalulekile emiphumeleni yokuqopha. Isibonelo, izinkinga ezifana nokusatshalaliswa kwe-plasma okungalingani ekamelweni lokusabela kanye nokuguguleka kwe-electrode okungalingani kungaholela ekusatshalalisweni okungalingani kwamapharamitha njengobuningi be-ion namandla ebusweni be-wafer ngesikhathi sokuqopha.

Ngaphezu kwalokho, ukulawulwa kokushisa okungalingani kwemishini kanye nokushintshashintsha okuncane kokugeleza kwegesi nakho kungathinta ukufana kokuqopha, okuholela ekugobeni kodonga oluseceleni.