Te kore ōrite o te pupuhi katote
Marokewhakairohe tukanga e whakakotahi ana i ngā pānga ā-tinana me ngā pānga matū, ā, he tikanga whakairo ā-tinana nui te pupuhi katote. I roto i tetukanga whakairo, tērā pea kāore i te ōrite te koki taunga me te tohatoha pūngao o ngā katote.
Mena he rerekē te koki taunga o te katote i ngā tūranga rerekē o te pakitara taha, ka rerekē anō hoki te pānga whakairo o ngā katote i te pakitara taha. I ngā wāhi he nui ake ngā koki taunga o te katote, ka kaha ake te pānga whakairo o ngā katote i te pakitara taha, ka nui ake te whakairo o te pakitara taha i tēnei wāhi, ka piko ai te pakitara taha. Hei tāpiri, ko te tohatoha kore taurite o te kaha katote ka puta anō hoki ngā pānga rite. Ka taea e ngā katote he nui ake te kaha te tango i ngā rauemi, ka hua ake he koretake.whakairongā nekehanga o te pakitara taha i ngā tūranga rerekē, ka piko ai te pakitara taha.
Te awe o te photoresist
He rite te mahi a te photoresist ki te kopare i roto i te whakairo maroke, hei tiaki i ngā wāhi kāore e hiahiatia kia whakairohia. Heoi anō, ka pāngia hoki te photoresist e te pupuhi plasma me ngā tauhohenga matū i te wā o te tukanga whakairo, ā, ka rerekē pea tōna mahi.
Mena he koretake te matotoru o te ātete whakaahua, he koretake te tere o te paunga i te wā e whakairohia ana, he rerekē rānei te piri i waenga i te ātete whakaahua me te papa i ngā wāhi rerekē, ka hua ake pea he koretake te tiakitanga o ngā pakitara taha i te wā e whakairohia ana. Hei tauira, ko ngā wāhi he angiangi ake te ātete whakaahua, he ngoikore ake rānei te piri, ka ngāwari ake te whakairo i te rauemi o raro, ka piko ai ngā pakitara taha i ēnei wāhi.
Ngā rerekētanga o ngā āhuatanga rauemi papa
Tērā pea he rerekē ngā āhuatanga o te rauemi papa whakairo, pērā i te rerekētanga o ngā whakatakotoranga tioata me ngā kukū tāpiringa i ngā rohe rerekē. Ka pā ēnei rerekētanga ki te tere whakairo me te whiriwhiringa whakairo.
Hei tauira, i roto i te silicon tioata, he rerekē te whakatakotoranga o ngā ngota silicon i ngā whakatakotoranga tioata rerekē, ā, ka rerekē anō hoki tā rātou tauhohenga me te tere whakairo ki te hau whakairo. I te wā o te tukanga whakairo, ko ngā tere whakairo rerekē i puta mai i ngā rerekētanga o ngā āhuatanga o te rauemi ka kore e ōrite te hohonutanga o te whakairo o ngā pakitara taha i ngā wāhi rerekē, ā, ka mutu, ka piko te pakitara taha.
Ngā āhuatanga e pā ana ki ngā taputapu
He pānga nui anō hoki te mahi me te tūnga o ngā taputapu whakairo ki ngā hua whakairo. Hei tauira, ko ngā raruraru pēnei i te tohatoha koretake o te plasma i roto i te rūma tauhohenga me te kakahu koretake o te hikohiko ka arahi pea ki te tohatoha koretake o ngā tawhā pēnei i te kiato katote me te pūngao i runga i te mata o te papa i te wā e whakairohia ana.
Hei tāpiri, ko te kore taurite o te whakahaere pāmahana o ngā taputapu me te paku rerekētanga o te rere hau ka pā ki te ōritetanga o te whakairo, ka piko ai te pakitara taha.
Wā tuku: Hakihea-03-2024