Sei madziro emativi achikotama panguva yekuoma kwekucheka?

Kusafanana kwebhomba reion

Yakaomakutemakazhinji inzira inosanganisa mhedzisiro yemuviri neyemakemikari, umo ion bombardment inzira yakakosha yekunyora physical. Munguva yemaitiro ekucheka, kona yechiitiko uye kugoverwa kwesimba kwemaion zvinogona kunge zvisina kuenzana.

Kana kona yechiitiko chemaion yakasiyana panzvimbo dzakasiyana padivi, mhedzisiro yekucheka kwemaion padivi ichave yakasiyanawo. Munzvimbo dzine makona makuru ekukuvara kwemaion, mhedzisiro yekucheka kwemaion padivi yakasimba, izvo zvichaita kuti divi riri munzvimbo iyi rikwekwe zvakanyanya, zvichiita kuti divi rikwenye. Pamusoro pezvo, kugoverwa kusina kuenzana kwesimba remaion kuchaburitsawo mhedzisiro yakafanana. Maion ane simba rakawanda anogona kubvisa zvinhu zvinobudirira, zvichikonzera kusagadzikanakutemamadhigirii erutivi rwemusana panzvimbo dzakasiyana, izvo zvinoita kuti rutivi rwemusana rukotame.

Simba re photoresist

Photoresist inoita basa remask mukucheka kwakaoma, ichidzivirira nzvimbo dzisingadi kuchekwa. Zvisinei, photoresist inokanganiswawo neplasma bombardment uye makemikari panguva yekucheka, uye mashandiro ayo anogona kuchinja.

Kana ukobvu hwe photoresist husina kuenzana, mwero wekushandiswa panguva yekuchekwa usingawirirane, kana kuti kubatana pakati pe photoresist ne substrate kwakasiyana munzvimbo dzakasiyana, zvinogona kutungamira kukudzivirirwa kusina kuenzana kwemativi panguva yekuchekwa. Semuenzaniso, nzvimbo dzine photoresist yakatetepa kana kunamira kusina kusimba zvinogona kuita kuti zvinhu zviri pasi zvive nyore kuchekwa, zvichiita kuti mativi akotama panzvimbo idzi.

Kusiyana kwehunhu hwezvinhu zve substrate

Chinhu chakachekwa chepasi chinogona kunge chine hunhu hwakasiyana, senge magadzirirwo akasiyana ekristaro uye huwandu hwedoping munzvimbo dzakasiyana. Kusiyana uku kuchakanganisa mwero wekuchekwa uye kusarudza kwekuchekwa.
Semuenzaniso, mu crystalline silicon, kurongeka kwemaatomu e silicon munzvimbo dzakasiyana dze crystal kwakasiyana, uye reactivity yavo uye etching rate ne etching gas zvichasiyanawo. Munguva ye etching process, etching rates dzakasiyana dzinokonzerwa nekusiyana kwehunhu hwezvinhu zvichaita kuti etching depth ye side walls panzvimbo dzakasiyana isawirirane, zvichizopedzisira zvaita kuti side wall ikotama.

Zvinhu zvine chekuita nemidziyo

Kushanda uye mamiriro emidziyo yekupinza zvinewo zvazvinoita pamhedzisiro yekupinza. Semuenzaniso, matambudziko akadai sekupararira kweplasma mukamuri yemhinduro uye kusakara kwema electrode asina kufanana zvinogona kutungamira mukupararira kusina kufanana kwema parameter akadai sehuwandu hweion nesimba pamusoro pewafer panguva yekupinza.

Pamusoro pezvo, kudzora tembiricha isina kuenzana uye kuchinja kudiki kwekuyerera kwegasi zvinogonawo kukanganisa kufanana kwekuchekwa, zvichikonzera kukotama kwemadziro emativi.