Cov hom phiaj sputtering siv rau hauv cov voj voog semiconductor

Cov hom phiaj sputteringfeem ntau yog siv rau hauv kev lag luam hluav taws xob thiab cov ntaub ntawv, xws li kev sib xyaw ua ke, kev khaws cia cov ntaub ntawv, cov zaub siv lead ua kua, cov cim xeeb laser, cov khoom siv tswj hluav taws xob, thiab lwm yam. Lawv kuj tseem siv tau rau hauv kev lag luam ntawm cov iav txheej, nrog rau cov ntaub ntawv hnav-resistant, kub-resistant corrosion, cov khoom dai kom zoo nkauj siab thiab lwm yam lag luam.

Sputtering yog ib qho ntawm cov txheej txheem tseem ceeb rau kev npaj cov ntaub ntawv nyias nyias.Nws siv cov ions uas tsim los ntawm cov chaw ion los ua kom nrawm thiab sib sau ua ke hauv lub tshuab nqus tsev kom tsim cov zog ceev ceev ion beams, bombard lub nto khoom, thiab pauv lub zog kinetic ntawm ions thiab cov khoom atoms nto khoom. Cov atoms ntawm qhov chaw khoom tawm hauv cov khoom thiab raug tso rau ntawm qhov chaw ntawm lub substrate. Cov khoom bombarded yog cov khoom siv raw rau kev tso cov zaj duab xis nyias los ntawm sputtering, uas hu ua sputtering target. Ntau hom sputtered zaj duab xis nyias cov ntaub ntawv tau siv dav hauv semiconductor integrated circuits, cov ntaub ntawv kaw suab, cov zaub tiaj tus thiab cov txheej txheem ua haujlwm nto.

Ntawm txhua yam kev lag luam thov, kev lag luam semiconductor muaj cov kev cai zoo tshaj plaws rau cov yeeb yaj kiab sputtering. Cov hlau sputtering uas muaj cov khoom siv siab yog siv rau hauv kev tsim wafer thiab cov txheej txheem ntim khoom siab heev. Piv txwv li, los ntawm kev tsim cov chips, peb tuaj yeem pom tias los ntawm silicon wafer mus rau ib lub chip, nws yuav tsum tau dhau los ntawm 7 cov txheej txheem tsim khoom loj, uas yog diffusion (Thermal Process), Photo-lithography (Photo-lithography), Etch (Etch), Ion Implantation (IonImplant), Thin Film Growth (Dielectric Deposition), Chemical Mechanical Polishing (CMP), Metalization (Metalization). Cov txheej txheem sib xws ib qho los ntawm ib qho. Lub hom phiaj sputtering yog siv rau hauv cov txheej txheem ntawm "metallization". Lub hom phiaj yog bombarded nrog cov khoom siv hluav taws xob siab los ntawm cov khoom siv nyias zaj duab xis thiab tom qab ntawd ib txheej hlau nrog cov haujlwm tshwj xeeb yog tsim rau ntawm silicon wafer, xws li txheej conductive, txheej thaiv. Tos. Vim tias cov txheej txheem ntawm tag nrho cov semiconductors yog sib txawv ces qee qhov xwm txheej qee zaum yog qhov xav tau los xyuas kom meej tias lub kaw lus muaj tseeb yog li peb xav tau qee yam khoom siv dummy ntawm qee theem ntawm kev tsim khoom kom paub meej cov teebmeem.