Ngā whāinga pupuhie whakamahia ana i roto i ngā ahumahi hikohiko me ngā ahumahi mōhiohio, pērā i ngā ara iahiko whakauru, te rokiroki mōhiohio, ngā whakaaturanga karaihe wai, ngā mahara taiaho, ngā taputapu whakahaere hiko, me ētahi atu. Ka taea hoki te whakamahi i roto i te mara o te paninga karāhe, tae atu ki ngā rauemi ātete-kakahu, te ātete ki te waikura pāmahana teitei, ngā hua whakapaipai kounga teitei me ētahi atu ahumahi.
Ko te whakapūkara tētahi o ngā tikanga matua mō te whakarite rauemi kiriata angiangi.Ka whakamahia ngā iona i hangaia e ngā pūtake iona hei whakatere me te whakakotahi i roto i te korehau hei hanga i ngā hihi iona pūngao tere-teitei, hei pupuhi i te mata totoka, hei whakawhiti i te pūngao nekeneke i waenga i ngā iona me ngā ngota mata totoka. Ka wehe atu ngā iona i runga i te mata totoka i te totoka ka whakatakotoria ki runga i te mata o te papa. Ko te totoka i pupuhihia te rauemi mata mō te whakatakoto i ngā kiriata angiangi mā te pupuhi, e kiia nei ko te whāinga pupuhi. He maha ngā momo rauemi kiriata angiangi i pupuhihia kua whakamahia whānuitia i roto i ngā ara iahiko whakauru haurua-ira, ngā pāpāho tuhi, ngā whakaaturanga papatahi me ngā paninga mata mahi.
I roto i ngā ahumahi tono katoa, ko te ahumahi haurua-irahiko te mea tino kaha ki ngā whakaritenga kounga mō ngā kiriata pupuhi ūnga. Ko ngā whāinga pupuhi whakarewa parakore teitei te nuinga e whakamahia ana i roto i te hanga wafer me ngā tukanga takai matatau. Hei tauira, mai i te hanga maramara silicon ki te maramara, me haere i roto i ngā tukanga whakaputa matua e whitu, arā, te horapa (Tukanga Wera), te Whakaahua-lithography (Whakaahua-lithography), te Etch (Etch), te Whakatō Ion (IonImplant), te Tipu Kiriata Angiangi (Te Whakatakotoranga Dielectric), te Whakakanapa Matū Mekanika (CMP), te Whakarewa (Whakarewa). Ka hono ngā tukanga takitahi. Ka whakamahia te whāinga pupuhi i roto i te tukanga "whakarewa". Ka pupuhihia te ūnga ki ngā matūriki kaha-teitei e ngā taputapu whakatakoto kiriata angiangi, kātahi ka hangaia he paparanga whakarewa me ngā mahi motuhake ki runga i te wafer silicon, pērā i te paparanga kawe, te paparanga ārai. Taria. Nā te mea he rerekē ngā tukanga o ngā haurua-irahiko katoa, me whai wā ētahi āhuatanga hei manatoko kei te tika te pūnaha, nō reira me tono mātou i ētahi momo rauemi rūpahu i ētahi wāhanga o te whakaputa hei whakaū i ngā pānga.
Wā tuku: Hanuere-17-2022