Intego zo gusukamo amazi zikoreshwa mu miyoboro ya semiconductor integrated

Intego zo gusohoraBikoreshwa cyane cyane mu nganda z'ikoranabuhanga n'amakuru, nko mu nganda zikora ibikoresho bya elegitoroniki, mu kubika amakuru, mu kwerekana kristale y'amazi, mu kwibuka hakoreshejwe laser, mu bikoresho bigenzura ikoranabuhanga, nibindi. Bishobora kandi gukoreshwa mu bijyanye no gusiga irahuri, ndetse no mu bikoresho bidashira, mu bushyuhe bwinshi, mu bikoresho byo mu rwego rwo hejuru byo gushushanya no mu zindi nganda.

Gutera amacandwe ni bumwe mu buryo bw'ingenzi bwo gutegura ibikoresho bya firime nto.Ikoresha iyoni zikomoka ku masoko ya iyoni kugira ngo yihutishe kandi ihuze mu cyuma gifunze kugira ngo ikore imirasire ya iyoni ifite ingufu nyinshi, ikwirakwize ubuso bukomeye, kandi ihererekanye ingufu za kinetiki hagati ya iyoni na atome z’ubuso bukomeye. Atome ziri ku buso bukomeye ziva ku kintu gikomeye zigashyirwa ku buso bw’ubutaka. Ikintu gikomeye gishyirwa ku butaka ni ibikoresho fatizo byo gushyiramo filime nto binyuze mu gukurura, ari byo byitwa sputtering target. Ubwoko butandukanye bw'ibikoresho bya sputtered thin film byakoreshejwe cyane mu miyoboro ya semiconductor integrated circuits, recording media, flat-panel displays na workpiece surface coating.

Mu nganda zose zikoresha, inganda za semiconductor zifite ibisabwa bikomeye ku buziranenge bwa filime zo gusukamo ibyuma. Intego zo gusukamo ibyuma byo mu bwoko bwa "high-pure metal sputtering" zikoreshwa cyane cyane mu gukora wafer no mu buryo bugezweho bwo gupakira. Dufashe urugero rwo gukora chips, dushobora kubona ko kuva kuri silicon wafer kugeza kuri chips, igomba kunyura mu nzira 7 z'ingenzi zo gukora, ari zo gukwirakwiza (Ubushyuhe), Photo-lithography (Photo-lithography), Etch (Etch), Ion Implantation (IonImplant), Thin Film Growth (Dielectric Deposition), Chemical Mechanical Polishing (CMP), Metalization (Metalization). Inzira zihura imwe imwe. Intego yo gusukamo ibyuma ikoreshwa mu nzira ya "metallization". Intego iterwamo uduce twinshi tw'ingufu nyinshi n'ibikoresho byo gushyiramo filime nto hanyuma urwego rw'icyuma rufite imikorere yihariye rukorwa kuri silicon wafer, nk'urwego ruyobora amashanyarazi, urwego rw'inzitizi. Tegereza. Kubera ko inzira za semiconductors zose ziratandukanye, hari igihe hakenerwa ibintu bimwe na bimwe kugira ngo harebwe niba sisitemu ihari neza bityo turasaba ubwoko bumwe bw'ibikoresho byo mu bwoko bwa "dummy" mu byiciro bimwe na bimwe byo gukora kugira ngo twemeze ingaruka.