Iithagethi zokutshizaZisetyenziswa kakhulu kumashishini e-elektroniki kunye nolwazi, njengeesekethe ezidibeneyo, ukugcinwa kolwazi, iziboniso zekristale yolwelo, iinkumbulo ze-laser, izixhobo zolawulo lwe-elektroniki, njl. Zingasetyenziswa nakwicandelo lokufaka iglasi, kunye nezixhobo ezingagugiyo, ukumelana nokugqwala kumaqondo obushushu aphezulu, iimveliso zokuhombisa eziphezulu kunye namanye amashishini.
Ukutshiza yenye yeendlela eziphambili zokulungiselela izinto ezibhityileyo zefilimu.Isebenzisa ii-ion eziveliswa yimithombo yee-ion ukukhawulezisa nokuhlanganisana kwi-vacuum ukwenza imisebe yee-ion yamandla akhawulezayo, iqhumise umphezulu oqinileyo, kwaye itshintshiselane ngamandla e-kinetic phakathi kwee-ion kunye nee-athomu zomphezulu oqinileyo. Ii-athomu ezikumphezulu oqinileyo ziyashiya i-solid kwaye zibekwe kumphezulu we-substrate. I-bombarded solid yimpahla eluhlaza yokufaka iifilimu ezincinci ngokutshiza, okubizwa ngokuba yi-sputtering target. Iindidi ezahlukeneyo zezinto zefilimu ezincinci ezitshizekileyo zisetyenziswe kakhulu kwiisekethe ezidibeneyo ze-semiconductor, imidiya yokurekhoda, ii-flat-panel displays kunye neengubo zomphezulu zomsebenzi.
Phakathi kwazo zonke iishishini zezicelo, imboni ye-semiconductor ineemfuno ezingqongqo zomgangatho weefilimu zokutshiza ezijolise kuzo. Iithagethi zokutshiza zesinyithi ezicocekileyo kakhulu zisetyenziswa kakhulu kwimveliso ye-wafer nakwiinkqubo zokupakisha eziphambili. Ukuthatha umzekelo wokuvelisa iitship, sinokubona ukuba ukusuka kwi-silicon wafer ukuya kwi-chip, kufuneka idlule kwiinkqubo ezisi-7 eziphambili zemveliso, ezizezi: ukusasazeka (Inkqubo yobushushu), i-Photo-lithography (I-Photo-lithography), i-Etch (Etch), i-Ion Implantation (IonImplant), i-Thin Film Growth (Dielectric Deposition), i-Chemical Mechanical Polishing (CMP), i-Metalization (Metalization). Iinkqubo zihambelana nganye nganye. Ithagethi yokutshiza isetyenziswa kwinkqubo "yokwenziwa kwesinyithi". Ithagethi igqunywa ngamasuntswana anamandla aphezulu ngezixhobo zokubeka ifilimu encinci kwaye emva koko umaleko wesinyithi onemisebenzi ethile uyenziwa kwi-silicon wafer, njengomaleko oqhubayo, umaleko wesithintelo. Linda. Ekubeni iinkqubo ze-semiconductors zonke zahlukile, kufuneka iimeko ezithile ngamanye amaxesha ukuqinisekisa ukuba inkqubo ikhona ngokuchanekileyo ngoko ke sifuna iintlobo ezithile zezinto ezingezizo kwizigaba ezithile zemveliso ukuqinisekisa iziphumo.
Ixesha lokuposa: Jan-17-2022