Sputtering targets inoshandiswa mu semiconductor integrated circuits

Sputtering zvinangwaanonyanya kushandiswa mumagetsi uye ruzivo maindasitiri, akadai Integrated matunhu, mashoko kuchengetedza, liquid crystal anoratidza, Laser ndangariro, zvemagetsi control namano, etc. Anogonawo kushandiswa mumunda girazi coating, uyewo mune kusakara-resistant zvinhu, high-tembiricha ngura kuramba , yakakwirira-kuguma kushongedza zvigadzirwa uye mamwe maindasitiri.

Sputtering ndiyo imwe yenzira huru yekugadzirira zvinyoro zvemufirimu zvinhu.Inoshandisa ions inogadzirwa neayoni masosi kuti ikurumidze uye iunganidze muvacuum kuti iumbe matanda eiyoni simba anomhanya, kubhomba nzvimbo yakasimba, uye kuchinjanisa simba rekinetic pakati peiyoni nemaatomu akasimba epamusoro. Maatomu ari panzvimbo yakasimba anosiya akasimba uye anoiswa pamusoro pe substrate. Iyo yakabhomba yakasimba ndiyo mbishi yekuisa mafirimu matete nekupuruzira, iyo inonzi sputtering target. Mhando dzakasiyana-siyana dzakapfava dzakatetepa firimu zvinhu zvakashandiswa zvakanyanya mu semiconductor yakabatanidzwa maseketi, kurekodha midhiya, flat-panel kuratidza uye workpiece pamusoro coatings.

Pakati pemaindasitiri ese ekushandisa, iyo semiconductor indasitiri ine yakanyanya kuomesesa yemhando yezvinodiwa zvechinangwa sputtering films.High-purity metal sputtering targets inonyanya kushandiswa mukugadzira wafer uye advanced packaging process. Tichitora chip kugadzira semuenzaniso, tinogona kuona kuti kubva pasilicon wafer kune chip, inoda kuenda kuburikidza ne7 mikuru nzira dzekugadzira, dzinoti diffusion (Thermal process), Photo-lithography (Photo-lithography), Etch (Etch), Ion Implantation (IonImplant), Thin Firimu Kukura (Dielectric Deposition), Kugadziriswa kweMechanical Mechanical (CMP inowirirana) Mechanical Mechanical imwe). Iyo sputtering target inoshandiswa mukuita "metallization". Icho chinonangwa chinoputirwa ne-high-energy particles neyakaonda firimu deposition equipment uyezve simbi layer ine mabasa chaiwo inoumbwa pasilicon wafer, senge conductive layer, barrier layer. Mirira.Sezvo maitiro emasemiconductors ese akasiyana saka dzimwe nguva panodiwa mamiriro ekuona kuti sisitimu iripo nemazvo saka tinoda mamwe marudzi ezvigadzirwa zvemadummy pane mamwe matanho ekugadzirwa kuti tisimbise mhedzisiro.