Taageerada Wafer-ka Garaafiga ee PECVD

Sharaxaad Gaaban:

Taageerada Wafer-ka ee VET Energy oo loogu talagalay saxnaanta iyo waxqabadka, waa agabka ugu habboon ee loo isticmaalo habaynta wafer-ka horumarsan, halkaas oo xasilloonida kulaylka sare iyo waxqabadka joogtada ah ay muhiim yihiin. Hadday tahay inaad la shaqeyneyso wafer-ka semiconductor-ka ama substrate-yada kale ee jilicsan, taageeradan graphite ee tayada sare leh waxay kor u qaadi doontaa isku halaynta habkaaga iyo tayada badeecada, taasoo ka dhigaysa qayb lama huraan u ah wax soo saarka casriga ah.

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Faahfaahinta Badeecada

Calaamadaha Alaabta

Tamarta VET Taageerada wafer-ka ee habka PECVD waa mid muhiim ah oo loo isticmaalo habka PECVD (oo lagu xoojiyay kaydinta uumiga kiimikada ee plasma). Badeecadani waxay ka samaysan tahay walxo graphite ah oo saafi ah, oo leh iska caabin heerkul sare oo aad u fiican, iska caabin daxaleed, xasillooni cabbir iyo astaamo kale, waxayna bixin kartaa madal taageero oo deggan oo loogu talagalay habka PECVD, si loo hubiyo isku mid ahaanshaha iyo fidsanaanta kaydinta filimka.

Naqshadda "taageerada garaafka" ee taageerada wafer-ka garaafka ee VET Energy ma aha oo kaliya inay si wax ku ool ah u taageeri karto wafer-ka, laakiin sidoo kale waxay bixin kartaa xasillooni kuleyl ah heerkulka sare iyo jawiga PECVD ee cadaadiska sare leh si loo hubiyo xasilloonida habka.

Taageerada wafer-ka graphite ee habka VET Energy ee PECVD waxay leedahay sifooyinka soo socda:

▪Daahirnimo sare:Nadiifin aad u yar, iska ilaali wasakheynta filimka, si loo hubiyo tayada filimka.

▪Cufnaanta sare:cufnaanta sare, xoogga farsamada sare, waxay u adkeysan kartaa heerkulka sare iyo jawiga PECVD ee cadaadiska sare leh.

▪Xasillooni cabbir wanaagsan:Isbeddello cabbir yar yar oo heerkul sare ah si loo hubiyo xasilloonida habka.

▪Gudbinta kulaylka oo aad u fiican:si wax ku ool ah u wareeji kulaylka si looga hortago kulaylka xad-dhaafka ah ee wafer-ka.

▪Iska caabin xoog leh oo daxalka ah:Awood u leh inuu iska caabiyo nabaad-guurka gaasaska kala duwan ee wax guba iyo balaasmaha.

▪Adeeg gaar ah:Miisaska taageerada garaafka ee cabbirro iyo qaabab kala duwan ayaa loo habeyn karaa iyadoo loo eegayo baahiyaha macaamiisha.

Walxaha garaafiga ee laga soo qaatay SGL:

Halbeegga caadiga ah: R6510
Tusmada	Heerka tijaabada	Qiimaha	Cutubka
Cabbirka celceliska hadhuudhka	ISO 13320	10	μm
Cufnaanta badan	DIN IEC 60413/204	1.83	g/cm³
Daloolada furan	DIN66133	10	%
Cabbirka daloolka dhexe	DIN66133	1.8	μm
Joogto ah	DIN 51935	0.06	cm²/s
Adkaanshaha Rockwell HR5/100	DIN IEC60413/303	90	HR
Iska caabin koronto oo gaar ah	DIN IEC 60413/402	13	μΩm
Xoogga dabacsanaanta	DIN IEC 60413/501	60	MPA
Xoogga cadaadiska	DIN 51910	130	MPA
Modulus-ka Young	DIN 51915	11.5 × 10³	MPA
Ballaarinta kulaylka (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Gudbinta kulaylka (20℃)	DIN 51908	105	Wm^-1K^-1

Waxaa si gaar ah loogu talagalay soo saarista unugyada qorraxda ee waxtarka sare leh, iyadoo taageerta habaynta wafer-ka cabbirka weyn ee G12. Naqshadeynta side-qaadaha ee la hagaajiyay ayaa si weyn u kordhisa wax-soo-saarka, taasoo suurtogalinaysa heerarka wax-soo-saarka oo sarreeya iyo kharashyada wax-soo-saarka oo hooseeya.

Shay	Nooca	Lambarka side-ka wafer-ka
Doonta Grephite ee PEVCD - Taxanaha 156	Doonta grephite ee 156-13	144
	Doonta grephite ee 156-19	216
	Doonta grephite ee 156-21	240
	Doonta garaafitka 156-23	308
Doonta Grephite ee PEVCD - Taxanaha 125	Doon grephite ah oo 125-15 ah	196
	Doonta grephite ee 125-19	252
	Doon 125-21 grphite ah	280