Fa'idodin tallafin jirgin ruwa na silicon carbide idan aka kwatanta da tallafin jirgin ruwa na quartz

Babban ayyukanjirgin ruwan silicon carbidetallafi da tallafin jirgin ruwa na quartz iri ɗaya ne.Jirgin ruwan silicon carbideTallafin yana da kyakkyawan aiki amma farashi mai yawa. Yana wakiltar wata alaƙa ta daban da tallafin jirgin ruwa na quartz a cikin kayan aikin sarrafa batir tare da yanayi mai wahala na aiki (kamar kayan aikin LPCVD da kayan aikin watsa boron). A cikin kayan aikin sarrafa batir tare da yanayin aiki na yau da kullun, saboda dangantakar farashi, tallafin jirgin ruwa na silicon carbide da tallafin jirgin ruwa na quartz suna zama tare kuma suna fafatawa a rukuni.

① Alaƙar maye gurbin kayan aikin LPCVD da na'urar watsa boron

Ana amfani da kayan aikin LPCVD don oxidation na tantanin halitta na batirin da kuma tsarin shirya Layer ɗin polysilicon mai doped. Ka'idar aiki:

A ƙarƙashin yanayin ƙasa mai matsin lamba, tare da yanayin zafi mai dacewa, ana samun amsawar sinadarai da ƙirƙirar fim ɗin ajiya don shirya layin oxide mai bakin ciki da fim ɗin polysilicon. A cikin tsarin shirya layin oxidation na rami da kuma tsarin polysilicon mai doped, tallafin jirgin ruwa yana da zafin aiki mai yawa kuma za a ajiye fim ɗin silicon a saman. Matsakaicin faɗaɗa zafi na quartz ya bambanta da na silicon. Lokacin da aka yi amfani da shi a cikin tsarin da ke sama, yana da mahimmanci a riƙa ɗaukar silicon da aka sanya a saman akai-akai don hana tallafin jirgin quartz ya karye saboda faɗaɗa zafi da matsewa saboda bambancin ƙimar faɗaɗa zafi daga silicon. Saboda yawan tsinken tsinkewa da ƙarancin ƙarfin zafin jiki mai yawa, mai riƙe jirgin quartz yana da ɗan gajeren lokaci kuma ana maye gurbinsa akai-akai a cikin tsarin shirya layin oxidation na rami da kuma tsarin shirya layin polysilicon mai doped, wanda ke ƙara yawan farashin samar da ƙwayar batirin. Matsakaicin faɗaɗawa nasilicon carbideyana kusa da na silicon.jirgin ruwan silicon carbideMai riƙewa ba ya buƙatar yin tsinkewa a cikin ramin iskar oxygen da kuma tsarin shirya Layer ɗin polysilicon mai doped. Yana da ƙarfin zafin jiki mai yawa da tsawon rai. Kyakkyawan madadin mai riƙe jirgin ruwa ne na quartz.

Ana amfani da kayan aikin faɗaɗa Boron musamman don aiwatar da abubuwan boron masu yin doping akan substrate na silicon wafer na nau'in N na ƙwayar batirin don shirya mai fitar da nau'in P don samar da mahaɗin PN. Ka'idar aiki ita ce a cimma amsawar sinadarai da samuwar fim ɗin adana ƙwayoyin halitta a cikin yanayi mai zafi. Bayan an samar da fim ɗin, ana iya yaɗuwa ta hanyar dumama mai zafi don cimma aikin doping na saman silicon wafer. Saboda yawan zafin aiki na kayan aikin faɗaɗa boron, mai riƙe jirgin ruwa na quartz yana da ƙarancin ƙarfin zafi mai yawa da ɗan gajeren lokacin sabis a cikin kayan aikin faɗaɗa boron.jirgin ruwan silicon carbideMai riƙewa yana da ƙarfin zafin jiki mai yawa kuma kyakkyawan madadin mai riƙe jirgin ruwa na quartz a cikin tsarin faɗaɗa boron.

② Alaƙar maye gurbin wasu kayan aikin sarrafawa

Tallafin jiragen ruwa na SiC suna da ƙarfin samarwa mai ƙarfi da kuma kyakkyawan aiki. Farashinsu gabaɗaya ya fi na tallafin jiragen ruwa na quartz. A yanayin aiki gabaɗaya na kayan aikin sarrafa tantanin halitta, bambancin rayuwar sabis tsakanin tallafin jiragen ruwa na SiC da tallafin jiragen ruwa na quartz ƙarami ne. Abokan ciniki na ƙasa galibi suna kwatantawa da zaɓar tsakanin farashi da aiki bisa ga tsarinsu da buƙatunsu. Tallafin jiragen ruwa na SiC da tallafin jiragen ruwa na quartz sun zama tare kuma suna gasa. Duk da haka, jimlar ribar tallafin jiragen ruwa na SiC yana da yawa a halin yanzu. Tare da raguwar farashin samarwa na tallafin jiragen ruwa na SiC, idan farashin siyarwa na tallafin jiragen ruwa na SiC ya ragu sosai, zai kuma haifar da gasa mafi girma ga tallafin jiragen ruwa na quartz.

Rabon amfani

Hanyar fasahar tantanin halitta galibi ita ce fasahar PERC da fasahar TOPCon. Kasuwar fasahar PERC kashi 88% ne, kuma kasuwar fasahar TOPCon kashi 8.3%. Jimlar kasuwar biyun ita ce kashi 96.30%.

Kamar yadda aka nuna a cikin hoton da ke ƙasa:

A cikin fasahar PERC, ana buƙatar tallafin jiragen ruwa don hanyoyin watsa phosphorus na gaba da kuma rage yawan iskar oxygen. A cikin fasahar TOPCon, ana buƙatar tallafin jiragen ruwa don yaduwar boron na gaba, LPCVD, yaduwar phosphorus na baya da kuma rage iskar oxygen. A halin yanzu, tallafin jiragen ruwa na silicon carbide galibi ana amfani da su ne a cikin tsarin LPCVD na fasahar TOPCon, kuma an tabbatar da amfaninsu a cikin tsarin watsa boron.

Hoto Amfani da tallafin jiragen ruwa a cikin tsarin sarrafa tantanin halitta

Lura: Bayan shafewa ta gaba da baya na fasahar PERC da TOPCon, har yanzu akwai hanyoyin haɗi kamar buga allo, yin sintering da gwaji da rarrabawa, waɗanda ba sa buƙatar amfani da tallafin jiragen ruwa kuma ba a lissafa su a cikin hoton da ke sama ba.