Ngā mahi matua opoti waro siliconHe rite tonu te tautoko me te tautoko poti kuata.Waka waro hikoHe tino pai te mahi a te tautoko engari he nui te utu. He hononga rerekē tēnei ki te tautoko poti kuata i roto i ngā taputapu tukatuka pākahiko me ngā āhuatanga mahi uaua (pēnei i ngā taputapu LPCVD me ngā taputapu tohatoha boron). I roto i ngā taputapu tukatuka pākahiko me ngā āhuatanga mahi noa, nā runga i ngā whanaungatanga utu, ka noho tahi te silicon carbide me te tautoko poti kuata hei kāwai whakataetae.
① Te whanaungatanga whakakapinga i roto i te LPCVD me ngā taputapu horapa boron
E whakamahia ana ngā taputapu LPCVD mō te whakapūngao pūtau pākahiko me te tukanga whakarite paparanga polysilicon kua pania. Te mātāpono mahi:
I raro i te hau pēhanga iti, me te pāmahana tika, ka tutuki te hanganga o te tauhohenga matū me te kiriata whakatakotoranga hei whakarite i te paparanga waikura whakatōtō me te kiriata polysilicon. I roto i te tukanga whakarite i te whakahāngaitanga whakatōtō me te paparanga polysilicon kua pania, he teitei te pāmahana mahi o te tautoko poti, ā, ka whakatakotoria he kiriata silicon ki runga i te mata. He rerekē te tauwehenga whānui wera o te quartz mai i te silicon. Ina whakamahia i roto i te tukanga o runga ake nei, me whakapūkara me te tango i te silicon kua pania ki runga i te mata kia kore ai e pakaru te tautoko poti quartz nā te whānui me te whakaheke wera nā te rerekētanga o te tauwehenga whānui wera mai i te silicon. Nā te whakapūkara pinepine me te iti o te kaha pāmahana teitei, he poto te ora o te pupuri poti quartz, ā, he maha ngā wā ka whakakapia i roto i te tukanga whakarite i te whakahāngaitanga me te paparanga polysilicon kua pania, ka nui ake te utu whakaputa o te pūtau pākahiko. Ko te tauwehenga whānui okarāhe siliconhe tata ki tērā o te silicon. Ko te mea kua whakauruhiapoti waro siliconKāore e hiahiatia he pīkara mō te kaipupuri i roto i te tukanga whakarite waikura kauhanga me te paparanga polysilicon kua pania. He kaha teitei ki te pāmahana teitei, ā, he roa te ora mahi. He huarahi pai hei whakakapi i te kaipupuri poti quartz.
Ko te taputapu whakawhanui boron te mea e whakamahia nuitia ana mō te tukanga tāpiri i ngā huānga boron ki runga i te papa anga silicon momo-N o te pūtau pākahiko hei whakarite i te kaituku momo-P hei hanga i te hononga PN. Ko te kaupapa mahi he whakatutuki i te tauhohenga matū me te hanganga kiriata whakatakotoranga ngota i roto i te hau pāmahana teitei. I muri i te hanganga o te kiriata, ka taea te horapa mā te whakamahana pāmahana teitei hei whakatutuki i te mahi tāpiri o te mata anga silicon. Nā te pāmahana mahi teitei o te taputapu whakawhanui boron, he iti te kaha pāmahana teitei o te pupuri poti quartz, ā, he poto te roa o te mahi i roto i te taputapu whakawhanui boron. Ko te whakaurupoti waro siliconHe kaha teitei te pupuri i te pāmahana teitei, ā, he huarahi pai hei whakakapi i te pupuri poti kuata i roto i te tukanga whakawhanui boron.
② Te whanaungatanga whakakapinga i roto i ētahi atu taputapu tukatuka
He iti te kaha whakaputa o ngā tautoko poti SiC, ā, he tino pai te mahi. He nui ake te utu i ngā tautoko poti kuata. I roto i ngā āhuatanga mahi whānui o ngā taputapu tukatuka pūtau, he iti noa te rerekētanga o te roa o te mahi i waenga i ngā tautoko poti SiC me ngā tautoko poti kuata. Ko te nuinga o ngā kaihoko o raro e whakataurite ana, e whiriwhiri ana i waenga i te utu me te mahi i runga i ā rātou ake tukanga me ngā hiahia. Kua noho tahi, kua whakataetae hoki ngā tautoko poti SiC me ngā tautoko poti kuata. Heoi, he nui te hua moni o ngā tautoko poti SiC i tēnei wā. I te hekenga o te utu whakaputa o ngā tautoko poti SiC, ki te heke kaha te utu hoko o ngā tautoko poti SiC, ka nui ake te whakataetae ki ngā tautoko poti kuata.
ōwehenga whakamahinga
Ko te huarahi hangarau pūtau ko te hangarau PERC me te hangarau TOPCon. Ko te wahanga mākete o te hangarau PERC he 88%, ā, ko te wahanga mākete o te hangarau TOPCon he 8.3%. Ko te wahanga mākete katoa o ngā mea e rua he 96.30%.
E ai ki te pikitia i raro nei:
I roto i te hangarau PERC, e hiahiatia ana ngā tautoko poti mō ngā tukanga tohatoha me te whakamahana o mua o te phosphorus. I roto i te hangarau TOPCon, e hiahiatia ana ngā tautoko poti mō ngā tukanga tohatoha boron o mua, LPCVD, tohatoha phosphorus o muri me te whakamahana. I tēnei wā, ko ngā tautoko poti silicon carbide te nuinga o te wā e whakamahia ana i roto i te tukanga LPCVD o te hangarau TOPCon, ā, kua manatokohia te nuinga o tā rātou whakamahinga i roto i te tukanga tohatoha boron.
Pikitia Te whakamahinga o ngā tautoko poti i roto i te tukanga tukatuka pūtau
Kia mōhio: Whai muri i te paninga o mua me muri o ngā hangarau PERC me TOPCon, kei reira tonu ngā hononga pēnei i te tā mata, te whakahinuhinu me te whakamātautau me te whakarōpū, kāore e whakamahia ngā tautoko poti, ā, kāore i te rārangihia i te pikitia i runga ake nei.
Wā tuku: Oketopa-15-2024