Ubwino wa chithandizo cha bwato la silicon carbide poyerekeza ndi chithandizo cha bwato la quartz

Ntchito zazikulu zabwato la silicon carbidechithandizo ndi chithandizo cha bwato la quartz ndizofanana.Boti la silicon carbideChithandizo chili ndi magwiridwe antchito abwino kwambiri koma mtengo wake ndi wokwera. Chimapanga ubale wina ndi chithandizo cha boti la quartz mu zida zopangira mabatire zomwe zimakhala zovuta kugwira ntchito (monga zida za LPCVD ndi zida zofalitsira boron). Mu zida zopangira mabatire zomwe zimakhala ndi mikhalidwe yogwira ntchito wamba, chifukwa cha ubale wamitengo, chithandizo cha boti la silicon carbide ndi quartz chimakhala magulu ogwirizana komanso opikisana.

① Ubale wosinthira pakati pa LPCVD ndi zida zofalitsira boron

Zipangizo za LPCVD zimagwiritsidwa ntchito pokonza ma cell a batri ndi kukonza zigawo za polysilicon.

Pansi pa mpweya wochepa, kuphatikiza kutentha koyenera, kupanga kwa mankhwala ndi filimu yoyikamo kumachitika kuti akonze gawo lochepa kwambiri la tunneling oxide ndi filimu ya polysilicon. Mu njira yokonzekera tunneling oxidation ndi polysilicon layer doped, chothandizira bwato chimakhala ndi kutentha kwakukulu ndipo filimu ya silicon idzayikidwa pamwamba. Chowonjezera cha kutentha cha quartz ndi chosiyana kwambiri ndi cha silicon. Mukagwiritsidwa ntchito pamwambapa, ndikofunikira kutsuka ndi kuchotsa silicon yomwe ili pamwamba kuti chothandizira cha bwato la quartz chisasweke chifukwa cha kukula ndi kupindika kwa kutentha chifukwa cha kusiyana kwa kutentha kwa kutentha kuchokera ku silicon. Chifukwa cha kutsuka pafupipafupi komanso mphamvu yochepa ya kutentha, chogwirira bwato la quartz chimakhala ndi moyo waufupi ndipo nthawi zambiri chimasinthidwa mu njira yokonzekera kusungunuka ndi polysilicon layer doped tunnel, zomwe zimawonjezera kwambiri mtengo wopanga wa selo ya batri. Chowonjezera cha kukula kwakabide ya silikoniili pafupi ndi ya silicon. Yophatikizidwabwato la silicon carbideChogwirira sichifuna kutsukidwa mu njira yothira mafuta mu ngalande komanso kukonzekera polysilicon layer. Chili ndi mphamvu yotentha kwambiri komanso nthawi yayitali yogwira ntchito. Ndi njira ina yabwino m'malo mwa chogwirira bwato cha quartz.

Zipangizo zokulitsa Boron zimagwiritsidwa ntchito makamaka popangira zinthu za boron pa substrate ya N-type silicon wafer ya batri kuti akonzere P-type emitter kuti ipange PN junction. Mfundo yogwira ntchito ndikukwaniritsa zotsatira za mankhwala ndi kupanga filimu yoyika mamolekyu mumlengalenga wotentha kwambiri. Filimuyo ikapangidwa, imatha kufalikira ndi kutentha kwambiri kuti igwire ntchito yopangira doping pamwamba pa silicon wafer. Chifukwa cha kutentha kwakukulu kwa zida zokulitsa boron, chogwirira cha boti la quartz chimakhala ndi mphamvu yochepa yotentha komanso nthawi yochepa yogwirira ntchito mu zida zokulitsa boron. Chophatikizidwachobwato la silicon carbideChogwiriracho chili ndi mphamvu yotentha kwambiri ndipo ndi njira yabwino yosinthira chogwirira bwato cha quartz pakukulitsa boron.

② Kugwirizana kwa zinthu zina zogwirira ntchito

Zothandizira maboti a SiC zimakhala ndi mphamvu zochepa zopangira komanso magwiridwe antchito abwino kwambiri. Mitengo yawo nthawi zambiri imakhala yokwera kuposa ya zothandizira maboti a quartz. Kawirikawiri, pazikhalidwe zogwirira ntchito za zida zopangira ma cell, kusiyana kwa moyo wautumiki pakati pa zothandizira maboti a SiC ndi zothandizira maboti a quartz ndi kochepa. Makasitomala otsika amayerekeza ndikusankha pakati pa mtengo ndi magwiridwe antchito kutengera njira ndi zosowa zawo. Zothandizira maboti a SiC ndi zothandizira maboti a quartz zakhala zikugwirizana komanso zopikisana. Komabe, phindu lonse la zothandizira maboti a SiC ndi lalikulu pakadali pano. Chifukwa cha kuchepa kwa mtengo wopanga zothandizira maboti a SiC, ngati mtengo wogulitsa wothandizira maboti a SiC ukutsika, udzakhalanso mpikisano waukulu kwa zothandizira maboti a quartz.

Chiŵerengero cha kagwiritsidwe ntchito

Njira ya ukadaulo wa selo makamaka ndi ukadaulo wa PERC ndi ukadaulo wa TOPCon. Gawo la msika wa ukadaulo wa PERC ndi 88%, ndipo gawo la msika wa ukadaulo wa TOPCon ndi 8.3%. Gawo lonse la msika wa ziwirizi ndi 96.30%.

Monga momwe chithunzi chili pansipa chikusonyezera:

Mu ukadaulo wa PERC, zothandizira maboti ndizofunikira pakufalitsa phosphorous kutsogolo ndi njira zopezera phosphorous. Mu ukadaulo wa TOPCon, zothandizira maboti ndizofunikira pakufalitsa boron kutsogolo, LPCVD, kufalitsa phosphorous kumbuyo ndi njira zopezera phosphorous. Pakadali pano, zothandizira maboti a silicon carbide zimagwiritsidwa ntchito makamaka mu njira ya LPCVD ya ukadaulo wa TOPCon, ndipo kugwiritsa ntchito kwawo mu njira yofalitsa boron kwatsimikiziridwa makamaka.

Chithunzi Kugwiritsa ntchito zothandizira pa boti pokonza maselo

Chidziwitso: Pambuyo pa ukadaulo wa PERC ndi TOPCon, pali maulalo monga kusindikiza pazenera, kusinthitsa ndi kuyesa ndi kusanja, zomwe sizikuphatikizapo kugwiritsa ntchito zothandizira bwato ndipo sizilembedwa pachithunzichi pamwambapa.