Mabhenefiti ekutsigira chikepe chesilicon carbide zvichienzaniswa nekutsigira chikepe chequartz

Mabasa makuru echikepe chesilicon carbiderutsigiro nerutsigiro rwechikepe chequartz zvakafanana.Chikepe chesilicon carbideRutsigiro rune mashandiro akanaka kwazvo asi mutengo wakakwira. Runoita hukama hwakasiyana nerutsigiro rwechikepe che quartz mumidziyo yekugadzirisa mabhatiri ine mamiriro ekushanda akaomarara (senge michina yeLPCVD nemidziyo yekuparadzira boron). Mumidziyo yekugadzirisa mabhatiri ine mamiriro ekushanda akajairika, nekuda kwehukama hwemitengo, rutsigiro rwechikepe che silicon carbide ne quartz runova mapoka anogara pamwe chete uye anokwikwidzana.

① Hukama hwekutsiva mumidziyo yeLPCVD neboron diffusion

Midziyo yeLPCVD inoshandiswa pakugadzira bhatiri rema tunneling oxidation uye kugadzira polysilicon layer.

Mumhepo ine kumanikidzwa kwakaderera, pamwe chete nekupisa kwakakodzera, makemikari ekuita uye kuumbwa kwefirimu rekuisa zvinhu zvinowanikwa kugadzirira tunneling oxide layer nepolysilicon film. Munzira yekugadzirira tunneling oxidation nepolysilicon layer, rutsigiro rwechikepe rune tembiricha yepamusoro uye silicon film ichaiswa pamusoro. Quartz expansion coefficient yekupisa yakasiyana zvikuru neyesilicon. Kana ikashandiswa mukuita kwataurwa pamusoro apa, zvinodikanwa kuti ugare uchibvisa silicon yakachengetwa pamusoro kudzivirira rutsigiro rwe quartz boat kuti isaputsike nekuda kwekuwedzera kwekupisa uye kudzikira nekuda kwekuwedzera kwekupisa kwakasiyana kubva kusilicon. Nekuda kwekuwedzera kakawanda uye simba rakaderera rekupisa, quartz boat holder ine hupenyu hupfupi uye inowanzotsiviwa mu tunnel oxidation nepolysilicon layer kugadzirira, izvo zvinowedzera zvakanyanya mutengo wekugadzira bhatiri. Quartz expansion coefficient yekabhidhi yesiliconiri pedyo nesilicon. Iyo yakabatanidzwachikepe chesilicon carbideChibatiso hachidi kusvuurwa mugomba remugero uye kugadzirwa kwepolysilicon layer. Chine simba rekupisa kwakanyanya uye hupenyu hurefu. Ndiyo imwe nzira yakanaka yekubata chikepe chequartz.

Midziyo yekuwedzera yeBoron inonyanya kushandiswa pakuita doping yezvinhu zveboron pa substrate yesilicon wafer yemhando yeN yebhatiri kugadzirira P-type emitter kuti igadzire PN junction. Nheyo inoshanda ndeyekuita kuti makemikari aite uye mamorekuru ekuisa firimu mumhepo inopisa zvakanyanya. Mushure mekunge firimu yagadzirwa, inogona kuparadzirwa nekupisa kwakanyanya kuti iite doping pamusoro pesilicon wafer. Nekuda kwekupisa kwakanyanya kwekushanda kwemidziyo yekuwedzera yeboron, chibati chechikepe chequartz chine simba shoma rekupisa kwakanyanya uye hupenyu hupfupi hwebasa mumidziyo yekuwedzera yeboron. Iyo yakabatanidzwachikepe chesilicon carbideChibatiso chine simba guru rekupisa uye chinhu chakanaka chinotsiva chibatiso chechikepe chequartz mukuwedzera kweboron.

② Hukama hwekutsiva mimwe michina yekugadzira zvinhu

Zvitsigiro zveSiC boat zvine kugona kwakasimba kwekugadzira uye mashandiro akanaka kwazvo. Mitengo yazvo inowanzo kuve yakakwira kupfuura yezvitsigiro zvequartz boat. Mumamiriro ekushanda emidziyo yekugadzirisa maseru, musiyano wehupenyu hwebasa pakati pezvitsigiro zveSiC boat nezvitsigiro zvequartz boat mudiki. Vatengi vepasi vanoenzanisa uye vanosarudza pakati pemutengo nekushanda zvichienderana nemaitiro avo nezvinodiwa. Zvitsigiro zveSiC boat nezvitsigiro zvequartz boat zvave kushanda pamwe chete uye zvinokwikwidzana. Zvisinei, purofiti yakawanda yezvitsigiro zveSiC boat yakakwira pari zvino. Nekudzikira kwemutengo wekugadzira zvitsigiro zveSiC boat, kana mutengo wekutengesa wezvitsigiro zveSiC boat ukadzikira, zvichavewo nemakwikwi makuru kune zvitsigiro zvequartz boat.

Chiyero chekushandiswa

Nzira ye tekinoroji yemasero inonyanya kushandiswa tekinoroji yePERC uye tekinoroji yeTOPCon. Mugove wemusika wetekinoroji yePERC i88%, uye mugove wemusika wetekinoroji yeTOPCon i8.3%. Mugove wemusika wezvose zviri zviviri i96.30%.

Sezvakaratidzwa mumufananidzo uri pazasi:

Muhunyanzvi hwePERC, zvinotsigira zvikepe zvinodiwa pakupararira kwephosphorus nekunamirwa kwemvura. Muhunyanzvi hweTOPCon, zvinotsigira zvikepe zvinodiwa pakupararira kweboron, LPCVD, kupararira kwephosphorus kumashure nekunamirwa kwemvura. Parizvino, zvinotsigira zvikepe zvesilicon carbide zvinonyanya kushandiswa mukushanda kweLPCVD yehunyanzvi hweTOPCon, uye kushandiswa kwazvo mukushanda kweboron kwakasimbiswa zvakanyanya.

Mufananidzo wekushandiswa kwezvitsigiro zvechikepe mukugadzirisa masero

Cherechedza: Mushure mekupetwa kwePERC neTOPCon tekinoroji yekumberi nekumashure, kuchine malink akadai sekudhinda skrini, sintering uye kuyedza nekuronga, izvo zvisingasanganisire kushandiswa kwezvitsigiro zvechikepe uye hazvina kunyorwa mumufananidzo uri pamusoro.