Ibyiza byo gushyigikira ubwato bwa silicon carbide ugereranije n'ubufatanye bw'ubwato bwa quartz

Imirimo y'ingenzi yaubwato bwa karubide ya silikoniInkunga n'inkunga y'ubwato bwa quartz ni bimwe.Ubwato bwa karubide ya silikoniInkunga ifite imikorere myiza ariko ihendutse. Igize ubundi buryo bwo kuyishyigikira mu bikoresho bitunganya bateri bifite imiterere igoye yo gukora (nk'ibikoresho bya LPCVD n'ibikoresho bikwirakwiza boron). Mu bikoresho bitunganya bateri bifite imiterere isanzwe yo gukora, bitewe n'isano ishingiye ku biciro, inkunga ya silikoni na quartz mu bwato iba ibyiciro bihorana kandi bihanganye.

① Isano yo gusimbuza LPCVD n'ibikoresho byo gukwirakwiza boron

Ibikoresho bya LPCVD bikoreshwa mu gutunganya imiterere y'uturemangingo twa bateri no gutegura urwego rwa polysilicone. Ihame ry'imikorere:

Mu kirere gifite umuvuduko muto, hamwe n'ubushyuhe bukwiye, uburyo bwo gukora chemical reaction na deposition film birakorwa kugira ngo hategurwe urwego rwa oxide tunneling na polysilicon. Mu gikorwa cyo gutegura urwego rwa oxide tunneling na polysilicon, inkunga y'ubwato ifite ubushyuhe bwinshi kandi silicon film izashyirwa ku buso. Coefficient yo kwagura ubushyuhe ya quartz itandukanye cyane n'iya silicon. Iyo ikoreshejwe muri iki gikorwa cyavuzwe haruguru, ni ngombwa gukaranga no gukuraho silicon buri gihe kugira ngo wirinde ko quartz boat support yavunika bitewe no kwagura no guhindagurika bitewe n'uburyo butandukanye bwo kwagura ubushyuhe na silicon. Kubera ko quartz ikunze gukaranga kandi ifite imbaraga nke z'ubushyuhe bwinshi, quartz boat stopper imara igihe gito kandi ikunze gusimburwa mu gikorwa cyo gutegura urwego rwa oxide tunnel na polysilicon, ibyo byongera cyane ikiguzi cyo gukora cy'akaremangingo ka bateri. Coefficient yo kwagura yakarubide ya silikoniigera hafi y'iya silikoni. Ihuriwehoubwato bwa karubide ya silikoniIgikoresho cyo gufatiraho ibintu ntigisaba gusya mu buryo bwo gutwika no gutegura urwego rwa polysilicone. Gifite imbaraga nyinshi mu bushyuhe bwinshi kandi kiramba. Ni ikindi gikoresho cyiza cyo gufatiraho ubwato bwa quartz.

Ibikoresho byo kwagura boron bikoreshwa cyane cyane mu gikorwa cyo gushyira ibintu bya boron kuri substrate ya silikoni ya N yo mu bwoko bwa bateri kugira ngo hategurwe P-type emitter kugira ngo habeho ihuriro rya PN. Ihame ry'imikorere ni ugukora reaction ya chemical no gushyiraho filime ya molekile mu kirere gishyushye cyane. Iyo filime imaze gukorwa, ishobora gukwirakwizwa n'ubushyuhe bwinshi kugira ngo ikore imikorere ya doping y'ubuso bwa silikoni ya wafer. Bitewe n'ubushyuhe bwinshi bw'ibikoresho byo kwagura boron, icyuma gifata ubwato cya quartz gifite imbaraga nke z'ubushyuhe bwinshi kandi ntikimara igihe kinini mu bikoresho byo kwagura boron.ubwato bwa karubide ya silikoniIgikoresho gifite imbaraga nyinshi mu bushyuhe bwinshi kandi ni ikindi kintu cyiza cyasimbura icyo gikoresho cy’ubwato cya quartz mu kwagura boron.

② Isano yo gusimbuza ibindi bikoresho byo gutunganya

Inkunga z'ubwato za SiC zifite ubushobozi buke bwo gukora kandi zikora neza cyane. Igiciro cyazo muri rusange kiri hejuru y'icy'inkunga z'ubwato za quartz. Muri rusange, ibikoresho bitunganya uturemangingo, itandukaniro mu buzima bwo gukora hagati y'inkunga z'ubwato za SiC n'inkunga z'ubwato za quartz ni rito. Abakiriya bo hasi bagereranya kandi bagahitamo hagati y'igiciro n'imikorere hashingiwe ku mikorere n'ibyo bakeneye. Inkunga z'ubwato za SiC n'inkunga z'ubwato za quartz zabaye hamwe kandi zipiganwa. Ariko, inyungu mbumbe y'inkunga z'ubwato za SiC iri hejuru muri iki gihe. Kubera igabanuka ry'ikiguzi cy'umusaruro w'inkunga z'ubwato za SiC, niba igiciro cyo kugurisha inkunga z'ubwato za SiC kigabanuka cyane, bizatuma habaho ipiganwa rikomeye ku nkunga z'ubwato za quartz.

Igipimo cy'ikoreshwa

Inzira y'ikoranabuhanga rya selile ahanini ni ikoranabuhanga rya PERC n'ikoranabuhanga rya TOPCon. Isoko ry'ikoranabuhanga rya PERC ni 88%, naho isoko ry'ikoranabuhanga rya TOPCon ni 8.3%. Isoko ry'ibi byombi ni 96.30%.

Nkuko bigaragara ku ishusho iri hepfo:

Mu ikoranabuhanga rya PERC, inkunga z'ubwato zirakenewe mu mikorere yo gukwirakwiza fosifore imbere no kuyitera. Mu ikoranabuhanga rya TOPCon, inkunga z'ubwato zirakenewe mu mikorere yo gukwirakwiza boroni imbere, LPCVD, gukwirakwiza fosifore inyuma no kuyitera. Kuri ubu, inkunga z'ubwato za silicon carbide zikoreshwa cyane cyane mu mikorere ya LPCVD y'ikoranabuhanga rya TOPCon, kandi ikoreshwa ryazo mu mikorere yo gukwirakwiza boroni ryamaze kwemezwa.

Igishushanyo cy'ikoreshwa ry'inkunga z'ubwato mu gutunganya uturemangingo

Icyitonderwa: Nyuma yo gusiga irangi imbere n'inyuma rya ikoranabuhanga rya PERC na TOPCon, haracyariho amasano nko gucapa ecran, gupima no gutondeka, bitarimo gukoresha ibikoresho by'ubwato kandi ntibigaragara ku ishusho iri hejuru.