Babban SiC Cantilever Paddle don Sarrafa Wafer

Takaitaccen Bayani:

Tsarin Cantilever na Advanced SiC Cantilever Paddle don Sarrafa Wafer wanda vet-china ta ƙaddamar ya yi amfani da kayan SiC masu fasaha don inganta inganci da daidaiton sarrafa wafer. Tsarin Cantilever na Vet-china yana da kyakkyawan juriya ga zafi da juriyar tsatsa, yana tabbatar da ingantaccen aikin sarrafa wafer a cikin mawuyacin yanayin masana'antu, wanda hakan ya sa ya zama zaɓi mafi kyau don inganta yawan amfanin ƙasa.


Cikakken Bayani game da Samfurin

Alamun Samfura

BabbanSiC Cantilever Paddledon Wafer Processing wanda veter-china ta ƙirƙira yana ba da kyakkyawan mafita ga masana'antar semiconductor. Wannan cantilever paddle an yi shi ne da kayan SiC (silicon carbide), kuma ƙarfinsa da juriyarsa ga zafi suna ba shi damar kiyaye kyakkyawan aiki a cikin yanayin zafi mai zafi da gurɓataccen yanayi. Tsarin Cantilever Paddle yana ba da damar tallafawa wafer ɗin da aminci yayin sarrafawa, yana rage haɗarin tarwatsewa da lalacewa.

SiC Cantilever Paddlewani ɓangare ne na musamman da ake amfani da shi a cikin kayan aikin kera semiconductor kamar tanderun oxidation, tanderun watsawa, da tanderun annealing, babban amfani shine don lodawa da sauke wafer, tallafawa da jigilar wafers yayin ayyukan zafi mai yawa.

Tsarin gama garinaSiCcmaganin hanapaddle: Tsarin cantilever, wanda aka gyara a gefe ɗaya kuma kyauta a ɗayan, yawanci yana da ƙira mai faɗi da kama da faifan ruwa.

Makamashin VET yana amfani da kayan silicon carbide masu tsabta waɗanda aka sake yin amfani da su don tabbatar da inganci.

Halayen zahiri na Recrystallized Silicon Carbide

Kadara

Darajar da Aka Saba

Zafin aiki (°C)

1600°C (tare da iskar oxygen), 1700°C (yanayin ragewa)

Abubuwan SiC

> 99.96%

Abubuwan Si kyauta

<0.1%

Yawan yawa

2.60-2.70 g/cm3

A bayyane yake cewa akwai ramuka

<16%

Ƙarfin matsi

> 600MPa

Ƙarfin lanƙwasawa cikin sanyi

80-90 MPa (20°C)

Ƙarfin lanƙwasawa mai zafi

90-100 MPa (1400°C)

Faɗaɗawar zafi @1500°C

4.70 10-6/°C

Maida wutar lantarki a zafin jiki @1200°C

23W/m•K

Modulus mai laushi

240 GPA

Juriyar girgizar zafi

Mai kyau ƙwarai

Fa'idodin VET Energy's Advanced SiC Cantilever Paddle don Sarrafa Wafer sune:

-Tsawon zafin jiki mai yawa: ana iya amfani da shi a yanayin da ke sama da 1600°C;

-Ƙarancin ma'aunin faɗaɗa zafi: yana kiyaye daidaiton girma, yana rage haɗarin warpage na wafer;

- Tsarkakakken tsarki: ƙarancin haɗarin gurɓatar ƙarfe;

- Rashin kuzarin sinadarai: mai jure tsatsa, ya dace da yanayin iskar gas daban-daban;

- Babban ƙarfi da tauri: Tsaftace lalacewa, tsawon rai na sabis;

- Kyakkyawan watsawar zafi: yana taimakawa wajen dumama wafer iri ɗaya.

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