ʻO ka HolomuaHoe Cantilever SiCno ka hana ʻana i ka wafer i hana ʻia e vet-china e hāʻawi i kahi hopena maikaʻi loa no ka hana ʻana i ka semiconductor. Hana ʻia kēia hoe cantilever me ka mea SiC (silicon carbide), a ʻo kona paʻakikī kiʻekiʻe a me ke kūpaʻa wela e hiki ai iā ia ke mālama i ka hana maikaʻi loa i nā wahi wela kiʻekiʻe a me nā wahi ʻino. ʻO ka hoʻolālā o ka Cantilever Paddle e hiki ai i ka wafer ke kākoʻo pono ʻia i ka wā o ka hana ʻana, e hōʻemi ana i ka pilikia o ka ʻokiʻoki a me ka hōʻino.
Hoe Cantilever SiChe ʻāpana kūikawā i hoʻohana ʻia i nā lako hana semiconductor e like me ka umu oxidation, ka umu diffusion, a me ka umu annealing, ʻo ka hoʻohana nui ʻana no ka hoʻouka ʻana a me ka wehe ʻana i ka wafer, kākoʻo a lawe i nā wafers i ka wā o nā kaʻina hana wela kiʻekiʻe.
Nā ʻano hana maʻamauoSiCcantileverpʻAddle: ʻO kahi ʻano cantilever, i paʻa ma kekahi ʻaoʻao a manuahi ma kekahi ʻaoʻao, he hoʻolālā pālahalaha a like me ka hoe ka maʻamau.
Hoʻohana ʻo VET Energy i nā mea silicon carbide i hoʻomaʻemaʻe hou ʻia i ka maʻemaʻe kiʻekiʻe e hōʻoiaʻiʻo i ka maikaʻi.
| Nā waiwai kino o ka Silicon Carbide i hoʻopili hou ʻia | |
| Waiwai | Waiwai Maʻamau |
| Mahana hana (°C) | 1600°C (me ka oxygen), 1700°C (ka hoʻemi ʻana i ke kaiapuni) |
| ʻIke SiC | > 99.96% |
| ʻIke manuahi ʻo Si | < 0.1% |
| Ka nui o ka nui | 2.60-2.70 g/cm3 |
| Ka porosity i ʻike ʻia | < 16% |
| Ikaika hoʻopili | > 600MPa |
| Ikaika kūlou anu | 80-90 MPa (20°C) |
| Ikaika kūlou wela | 90-100 MPa (1400°C) |
| Hoʻonui wela @1500°C | 4.70 10-6/°C |
| Ka hoʻokele wela ma 1200°C | 23W/m•K |
| Modulus elastic | 240 GPa |
| Ke kū'ē ʻana i ka haʻalulu wela | Maikaʻi loa |
ʻO nā pono o ka VET Energy's Advanced SiC Cantilever Paddle no ka Wafer Processing:
-Kūpaʻa wela kiʻekiʻe: hiki ke hoʻohana ʻia ma nā wahi ma luna o 1600°C;
-Ka helu hoʻonui wela haʻahaʻa: mālama i ke kūpaʻa dimensional, e hōʻemi ana i ka pilikia o ka warpage wafer;
-Maʻemaʻe kiʻekiʻe: emi ka pilikia o ka haumia metala;
-Kemika inertness: kūpaʻa i ka palaho, kūpono no nā ʻano kinoea like ʻole;
-Ka ikaika a me ka paʻakikī kiʻekiʻe: Kūpaʻa i ke kapa komo, ola lōʻihi;
-ʻO ka hoʻokele wela maikaʻi: kōkua i ka hoʻomehana wafer like.
