Te MatatauHoe Cantilever SiCmō te Tukatuka Wafer i hangaia e vet-china he otinga tino pai mō te hanga semiconductor. He mea hanga tēnei hoe cantilever ki te rauemi SiC (silicon carbide), ā, nā tōna pakeke me te ātete wera nui ka taea te pupuri i te mahi tino pai i roto i ngā taiao pāmahana teitei me te waikura. Mā te hoahoa o te Hoe Cantilever ka taea te tautoko pono i te wafer i te wā tukatuka, ka whakaiti i te tūponotanga o te pakaru me te kino.
Hoe Cantilever SiCHe wāhanga motuhake e whakamahia ana i roto i ngā taputapu hanga haurua-haurua pēnei i te oumu whakahāngai, te oumu horapa, me te oumu whakamahana, ko te whakamahinga matua ko te uta me te tango i ngā papa, te tautoko me te kawe i ngā papa i roto i ngā tukanga pāmahana teitei.
Ngā hanganga noaoSiCcārai-reipāra: Ko te hanganga cantilever, he mea mau ki tētahi pito, he mea wātea ki tētahi pito, he papatahi te hoahoa, he rite ki te hoe.
Ka whakamahia e VET Energy ngā rauemi silicon carbide kua whakahoutia te āhua parakore hei whakapūmau i te kounga.
| Ngā āhuatanga ā-tinana o te Silicon Carbide kua Whakakāhia anō | |
| Taonga | Uara Noa |
| Te pāmahana mahi (°C) | 1600°C (me te hāora), 1700°C (taiao whakaiti) |
| Ihirangi SiC | > 99.96% |
| Ngā ihirangi Si kore utu | < 0.1% |
| Kīanga papatipu | 2.60-2.70 karamu/cm3 |
| Te āhua o te pūngao | < 16% |
| Te kaha o te pēhanga | > 600MPa |
| Kaha piko makariri | 80-90 MPa (20°C) |
| Kaha piko wera | 90-100 MPa (1400°C) |
| Te whakawhanuitanga wera @1500°C | 4.70 10-6/°C |
| Te kawe wera @1200°C | 23W/m•K |
| Te tauwehenga rapa | 240 GPa |
| Ātete ru wera | Tino pai |
Ko ngā painga o te hoe Cantilever SiC Matatau a VET Energy mō te Tukatuka Wafer ko:
-Te pumau o te pāmahana: ka taea te whakamahi i ngā taiao neke atu i te 1600°C;
-He iti te tauwehenga whānui wera: ka mau tonu te pumau o ngā āhuatanga, ka whakaiti i te mōrearea o te piko o te anga;
-Te parakore teitei: he iti ake te mōrearea o te poke o te konganuku;
-Te koretake o te matū: te ātete ki te waikura, he pai mō ngā momo taiao hau;
-Te kaha me te pakeke: Ātete ki te kakahu, roa te ora mahi;
-He kawe wera pai: ka āwhina i te whakamahana ōrite o te papa.
