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Igitambaro cya SiC Cantilever cyo mu rwego rwo hejuru cyo gutunganya Wafer

Igitambaro cya SiC Cantilever cyo mu rwego rwo hejuru cyo gutunganya Wafer Ishusho yagaragaye
  • Igitambaro cya SiC Cantilever cyo mu rwego rwo hejuru cyo gutunganya Wafer
  • Igitambaro cya SiC Cantilever cyo mu rwego rwo hejuru cyo gutunganya Wafer
  • Igitambaro cya SiC Cantilever cyo mu rwego rwo hejuru cyo gutunganya Wafer

Ibisobanuro bigufi:

Imashini yo gutunganya ifu ya SiC Cantilever Paddle yo gutunganya ifu yatangijwe na vet-china ikoresha ibikoresho bya SiC bigezweho kugira ngo inoze imikorere n'ubuhanga bwo gutunganya ifu ya wafer. Imashini yo gutunganya ifu ya Vet-china ifite ubushobozi bwo kurwanya ubushyuhe no kurwanya ingese, bigatuma ikora neza mu buryo buhoraho mu nganda zikora ibintu bikomeye, bigatuma iba amahitamo meza yo kunoza umusaruro.


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Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

IterambereIpadiri rya SiC CantileverUburyo bwo gutunganya Wafer bwakozwe na vet-china butanga igisubizo cyiza cyane mu gukora semiconductor. Iyi cantilever paddle ikozwe mu bikoresho bya SiC (silicon carbide), kandi ubukana bwayo bwinshi n'ubushyuhe bwayo bituma ikomeza gukora neza mu bushyuhe bwinshi n'ibidukikije byangiza. Imiterere ya Cantilever Paddle ituma wafer ishyigikirwa neza mu gihe cyo kuyitunganya, bigabanya ibyago byo gucikamo ibice no kwangirika.

Ipadiri rya SiC Cantileverni igice cyihariye gikoreshwa mu gukora ibikoresho bya semiconductor nka oxidation furnace, diffusion furnace, na annealing furnace, ikoreshwa cyane cyane mu gupakira no gupakurura wafer, gushyigikira no gutwara wafers mu gihe cy'ubushyuhe bwinshi.

Inyubako zisanzwebyaSiCcantileverpikigo: Inyubako y'icyuma gifata ubwato, ifatanye ku mpera imwe kandi idafite aho ihuriye ku yindi, ubusanzwe ifite imiterere irambuye kandi isa n'iy'agapira.

VET Energy ikoresha ibikoresho bya silicon carbide bisukuye cyane kugira ngo ikomeze kuba nziza.

Imiterere ifatika ya Silicon Carbide yongeye gukoreshwa

Umutungo

Agaciro Gasanzwe

Ubushyuhe bw'akazi (°C)

1600°C (harimo ogisijeni), 1700°C (ibidukikije bigabanya)

Ibikubiye muri SiC

> 99.96%

Ibirimo bya Si ku buntu

< 0.1%

Ubucucike bw'umubyimba

2.60-2.70 g/cm3

Ubuso bugaragara bw'umubyimba

< 16%

Imbaraga zo gukanda

> 600MPa

Imbaraga zo kunama zikonje

80-90 MPa (20°C)

Imbaraga zishyushye zo kunama

90-100 MPa (1400°C)

Kwaguka k'ubushyuhe kuri 1500°C

4.70 10-6/°C

Ubushobozi bwo gutwara ubushyuhe kuri 1200°C

23Ubuso/m•K

Moduli ya elastic

240 GPa

Ubudahangarwa bw'ingufu ziterwa n'ubushyuhe

Ni byiza cyane

Ibyiza bya VET Energy's Advanced SiC Cantilever Paddle yo gutunganya Wafer ni ibi bikurikira:

-Ubushyuhe bwinshi: bushobora gukoreshwa ahantu hari ubushyuhe buri hejuru ya 1600°C;

-Ubushyuhe buke bwo kwaguka: bugumana ubuziranenge buhamye, bigabanya ibyago byo kuzura kw'imashini;

-Ubuziranenge bwinshi: ibyago bike byo kwanduzwa n'icyuma biri hasi;

-Kudakora neza kwa shimi: birwanya ingese, bikwiranye n'ibidukikije bitandukanye bya gazi;

-Imbaraga nyinshi n'ubukomere: Irinda kwangirika, imara igihe kirekire;

-Ubushyuhe bwiza: bufasha mu gushyushya wafer imwe.

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