E Tsoetseng PeleSekepe sa SiC Cantileverbakeng sa Ts'ebetso ea Wafer e entsoeng ke vet-china e fana ka tharollo e ntle bakeng sa tlhahiso ea semiconductor. Sekotwana sena sa cantilever se entsoe ka thepa ea SiC (silicon carbide), 'me ho thatafala ha sona ho phahameng le ho hanyetsa mocheso ho se nolofalletsa ho boloka ts'ebetso e ntle haholo maemong a mocheso o phahameng le a senyang. Moralo oa Cantilever Paddle o lumella wafer ho tšehetsoa ka mokhoa o tšepahalang nakong ea ts'ebetso, e leng se fokotsang kotsi ea ho taboha le ho senyeha.
Sekepe sa SiC Cantileverke karolo e ikhethang e sebelisoang lisebelisoa tsa tlhahiso ea semiconductor tse kang onto ea oxidation, onto ea diffusion, le onto ea annealing, tšebeliso e kholo ke ho kenya le ho theola li-wafer, ho tšehetsa le ho tsamaisa li-wafer nakong ea lits'ebetso tsa mocheso o phahameng.
Meaho e tloaelehilengeaSiCcantileverpaddle: Sebopeho sa cantilever, se tsitsitseng pheletsong e 'ngoe 'me se lokolohile pheletsong e 'ngoe, hangata se na le moralo o bataletseng le o kang oa seketsoana.
VET Energy e sebelisa thepa ea silicon carbide e hloekisitsoeng e hloekileng haholo ho netefatsa boleng.
| Thepa ea 'mele ea Silicon Carbide e Nchafalitsoeng | |
| Thepa | Boleng bo Tloaelehileng |
| Mocheso o sebetsang (°C) | 1600°C (ka oksijene), 1700°C (tikoloho e fokotsang) |
| Dikahare tsa SiC | > 99.96% |
| Dikahare tsa mahala tsa Si | < 0.1% |
| Bongata ba bongata | 2.60-2.70 g/cm3 |
| Ho bonahala eka ho na le masoba | < 16% |
| Matla a khatello | > 600MPa |
| Matla a ho koba a batang | 80-90 MPa (20°C) |
| Matla a ho koba a chesang | 90-100 MPa (1400°C) |
| Katoloso ea mocheso @1500°C | 4.70 10-6/°C |
| Ho tsamaisa mocheso ka mocheso @1200°C | 23Bophahamo/m•K |
| Modulus e tenyetsehang | 240 GPa |
| Khanyetso ea ho tšoha ha mocheso | E ntle haholo |
Melemo ea Sekepe sa VET Energy se Tsoetseng Pele sa SiC Cantilever bakeng sa ho Sebetsa ka Wafer ke:
-Botsitso ba mocheso o phahameng: bo ka sebediswa dibakeng tse ka hodimo ho 1600°C;
-Koefficient e tlase ea katoloso ea mocheso: e boloka botsitso ba litekanyo, e fokotsa kotsi ea wafer warpage;
-Bohloeki bo phahameng: kotsi e tlase ea tšilafalo ea tšepe;
-Ho se sebetse hantle ha lik'hemik'hale: ha e senyehe, e loketse libaka tse fapaneng tsa khase;
-Matla le ho tiea ho hoholo: E hanela ho roala, e phela nako e telele;
-Ho tsamaisa mocheso hantle: ho thusa ho futhumatsa ka wafer ka mokhoa o ts'oanang.
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