ZapamwambaSiC Cantilever PaddleKapangidwe ka Wafer Processing kopangidwa ndi vet-china kumapereka yankho labwino kwambiri popanga semiconductor. Kapepala ka cantilever aka kamapangidwa ndi SiC (silicon carbide), ndipo kuuma kwake kwakukulu komanso kukana kutentha kumathandiza kuti kagwire ntchito bwino kwambiri m'malo otentha kwambiri komanso owononga. Kapangidwe ka Cantilever Paddle kamalola kuti wafer ikhale yodalirika panthawi yokonza, kuchepetsa chiopsezo cha kusweka ndi kuwonongeka.
SiC Cantilever Paddlendi gawo lapadera lomwe limagwiritsidwa ntchito popanga zida zopangira ma semiconductor monga ng'anjo ya okosijeni, ng'anjo yofalitsira, ndi ng'anjo yothira mafuta, ntchito yayikulu ndikutsegula ndi kutsitsa ma wafer, kuthandizira ndikunyamula ma wafer panthawi yotentha kwambiri.
Nyumba zofananayaSiCcantileverponjezerani: Kapangidwe ka chogwirira, kokhazikika kumapeto kwina ndi kopanda china, nthawi zambiri kamakhala ndi kapangidwe kosalala komanso kofanana ndi ka chikwanje.
VET Energy imagwiritsa ntchito zinthu za silicon carbide zoyera kwambiri kuti zitsimikizire kuti zinthuzo ndi zabwino.
| Kapangidwe ka thupi ka Silicon Carbide Yobwezeretsedwanso | |
| Katundu | Mtengo Wamba |
| Kutentha kogwira ntchito (°C) | 1600°C (ndi mpweya), 1700°C (malo ochepetsera kutentha) |
| Zomwe zili mu SiC | > 99.96% |
| Zaulere za Si | < 0.1% |
| Kuchuluka kwa zinthu zambiri | 2.60-2.70 g/cm3 |
| Kuoneka ngati porosity | < 16% |
| Mphamvu yopondereza | > 600MPa |
| Mphamvu yopinda yozizira | 80-90 MPa (20°C) |
| Mphamvu yopinda yotentha | 90-100 MPa (1400°C) |
| Kukulitsa kutentha @1500°C | 4.70 10-6/°C |
| Kutentha kwa mpweya @1200°C | 23W/m•K |
| Modulus yotanuka | 240 GPa |
| Kukana kutentha kwa kutentha | Zabwino kwambiri |
Ubwino wa VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing ndi:
-Kukhazikika kwa kutentha kwambiri: kugwiritsidwa ntchito pamalo opitilira 1600°C;
-Kuchuluka kwa kutentha kochepa: kumasunga kukhazikika kwa mawonekedwe, kuchepetsa chiopsezo cha wafer warpage;
-Kuyera kwambiri: chiopsezo chotsika cha kuipitsidwa ndi chitsulo;
-Kusagwira ntchito kwa mankhwala: kukana dzimbiri, koyenera malo osiyanasiyana a mpweya;
-Kulimba kwambiri ndi kuuma: Kugwira ntchito nthawi yayitali, kupirira kuvala;
-Kutentha bwino: kumathandiza kutentha kwa wafer mofanana.
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