I-Advanced SiC Cantilever Paddle yoLungiselelo lweWafer

I-Advanced SiC Cantilever Paddle yokucubungula i-Wafer Umfanekiso ocacileyo

Inkcazo emfutshane:

I-Advanced SiC Cantilever Paddle yoLungiselelo lweWafer eyasungulwa yi-vet-china isebenzisa izixhobo ze-SiC zobuchwepheshe obuphezulu ukuphucula ukusebenza kakuhle kunye nokuchaneka kokulungiswa kwewafer. I-cantilever paddle ye-Vet-china inokumelana okuhle kakhulu nobushushu kunye nokumelana nokugqwala, iqinisekisa ukusebenza okuzinzileyo kokuphathwa kwewafer kwiindawo zokuvelisa ezinzima, okwenza ukuba ibe lukhetho olufanelekileyo lokuphucula isivuno semveliso.

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I-AdvancedIsikhephe seSiC CantileverUkulungiswa kweWafer okwenziwe yi-vet-china kubonelela ngesisombululo esigqibeleleyo sokwenza i-semiconductor. Le paddle ye-cantilever yenziwe ngezinto ze-SiC (silicon carbide), kwaye ubunzima bayo obuphezulu kunye nokumelana nobushushu kwenza ukuba ikwazi ukugcina ukusebenza kakuhle kwiindawo ezinobushushu obuphezulu kunye neendawo ezirhabaxa. Uyilo lweCantilever Paddle luvumela i-wafer ukuba ixhaswe ngokuthembekileyo ngexesha lokucubungula, okunciphisa umngcipheko wokuqhekeka kunye nomonakalo.

Isikhephe seSiC Cantileverlicandelo elikhethekileyo elisetyenziswa kwizixhobo zokwenza i-semiconductor ezifana ne-oxidation furnace, i-diffusion furnace, kunye ne-annealing furnace, eyona nto isetyenziswa kakhulu kukulayisha nokukhupha i-wafer, ukuxhasa nokuthutha ii-wafers ngexesha leenkqubo zobushushu obuphezulu.

Izakhiwo ezifanayoyeI-SiCci-antiliverpi-addle: isakhiwo se-cantilever, esiqinileyo kwelinye icala kwaye sikhululekile kwelinye, sidla ngokuba noyilo oluthe tyaba nolufana nesikhephe.

I-VET Energy isebenzisa izixhobo ze-silicon carbide ezicocekileyo kakhulu ukuqinisekisa umgangatho.

Iimpawu ezibonakalayo zeSilicon Carbide ephinde yasetyenziswa
Ipropati	Ixabiso eliqhelekileyo
Ubushushu bokusebenza (°C)	1600°C (eneoksijini), 1700°C (indawo enciphisa umoya)
Umxholo weSiC	> 99.96%
Umxholo wasimahla we-Si	< 0.1%
Unizi lolwapho kuyiwa khona	2.60-2.70 g/cm³
Ukuvuleka okubonakalayo	< 16%
Amandla oxinzelelo	> 600I-MPa
Amandla okugoba abandayo	80-90 MPa (20°C)
Amandla okugoba ashushu	90-100 MPa (1400°C)
Ukwandiswa kobushushu @1500°C	4.70 10^-6/°C
Ukuqhuba kobushushu @1200°C	23W/m•K
Imodulus ethambileyo	240 GPa
Ukumelana noxinzelelo olushushu	Kuhle kakhulu