I-Advanced SiC Cantilever Paddle yoLungiselelo lweWafer

Inkcazo emfutshane:

I-Advanced SiC Cantilever Paddle yoLungiselelo lweWafer eyasungulwa yi-vet-china isebenzisa izixhobo ze-SiC zobuchwepheshe obuphezulu ukuphucula ukusebenza kakuhle kunye nokuchaneka kokulungiswa kwewafer. I-cantilever paddle ye-Vet-china inokumelana okuhle kakhulu nobushushu kunye nokumelana nokugqwala, iqinisekisa ukusebenza okuzinzileyo kokuphathwa kwewafer kwiindawo zokuvelisa ezinzima, okwenza ukuba ibe lukhetho olufanelekileyo lokuphucula isivuno semveliso.


Iinkcukacha zeMveliso

Iithegi zeMveliso

I-AdvancedIsikhephe seSiC CantileverUkulungiswa kweWafer okwenziwe yi-vet-china kubonelela ngesisombululo esigqibeleleyo sokwenza i-semiconductor. Le paddle ye-cantilever yenziwe ngezinto ze-SiC (silicon carbide), kwaye ubunzima bayo obuphezulu kunye nokumelana nobushushu kwenza ukuba ikwazi ukugcina ukusebenza kakuhle kwiindawo ezinobushushu obuphezulu kunye neendawo ezirhabaxa. Uyilo lweCantilever Paddle luvumela i-wafer ukuba ixhaswe ngokuthembekileyo ngexesha lokucubungula, okunciphisa umngcipheko wokuqhekeka kunye nomonakalo.

Isikhephe seSiC Cantileverlicandelo elikhethekileyo elisetyenziswa kwizixhobo zokwenza i-semiconductor ezifana ne-oxidation furnace, i-diffusion furnace, kunye ne-annealing furnace, eyona nto isetyenziswa kakhulu kukulayisha nokukhupha i-wafer, ukuxhasa nokuthutha ii-wafers ngexesha leenkqubo zobushushu obuphezulu.

Izakhiwo ezifanayoyeI-SiCci-antiliverpi-addle: isakhiwo se-cantilever, esiqinileyo kwelinye icala kwaye sikhululekile kwelinye, sidla ngokuba noyilo oluthe tyaba nolufana nesikhephe.

I-VET Energy isebenzisa izixhobo ze-silicon carbide ezicocekileyo kakhulu ukuqinisekisa umgangatho.

Iimpawu ezibonakalayo zeSilicon Carbide ephinde yasetyenziswa

Ipropati

Ixabiso eliqhelekileyo

Ubushushu bokusebenza (°C)

1600°C (eneoksijini), 1700°C (indawo enciphisa umoya)

Umxholo weSiC

> 99.96%

Umxholo wasimahla we-Si

< 0.1%

Unizi lolwapho kuyiwa khona

2.60-2.70 g/cm3

Ukuvuleka okubonakalayo

< 16%

Amandla oxinzelelo

> 600I-MPa

Amandla okugoba abandayo

80-90 MPa (20°C)

Amandla okugoba ashushu

90-100 MPa (1400°C)

Ukwandiswa kobushushu @1500°C

4.70 10-6/°C

Ukuqhuba kobushushu @1200°C

23W/m•K

Imodulus ethambileyo

240 GPa

Ukumelana noxinzelelo olushushu

Kuhle kakhulu

Iingenelo ze-VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing zezi:

-Uzinzo lobushushu oluphezulu: lusetyenziswa kwiindawo ezingaphaya kwe-1600°C;

-I-coefficient yokwandiswa kobushushu obuphantsi: igcina uzinzo olunobukhulu, inciphisa umngcipheko we-wafer warpage;

-Ubunyulu obuphezulu: umngcipheko ophantsi wokungcoliswa kwesinyithi;

-Ukungangeni kweekhemikhali: ayimelani nokugqwala, ifanelekile kwiindawo ezahlukeneyo zegesi;

-Ukuqina okuphezulu kunye nobunzima: Ayigugi, ubomi benkonzo ende;

-Ukuqhuba kakuhle kobushushu: kunceda ekufudumaleni kwe-wafer efanayo.

I-Cantilever Paddle10
I-Cantilever Paddle16
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