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Advanced SiC Cantilever Paddle rau Wafer Processing

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  • Advanced SiC Cantilever Paddle rau Wafer Processing
  • Advanced SiC Cantilever Paddle rau Wafer Processing
  • Advanced SiC Cantilever Paddle rau Wafer Processing

Kev Piav Qhia Luv:

Lub Advanced SiC Cantilever Paddle rau Wafer Processing uas vet-china tau tsim tawm siv cov khoom siv SiC thev naus laus zis siab los txhim kho kev ua haujlwm zoo thiab qhov tseeb ntawm kev ua wafer. Vet-china's cantilever paddle muaj qhov tiv taus cua sov zoo heev thiab tiv taus corrosion, ua kom ntseeg tau tias kev tuav wafer ruaj khov hauv qhov chaw tsim khoom hnyav, ua rau nws yog qhov kev xaiv zoo tshaj plaws rau kev txhim kho cov txiaj ntsig ntau lawm.


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Cov Lus Qhia Txog Khoom

Cov Cim Npe Khoom

Qhov Siab Tshaj PlawsSiC Cantilever Paddlerau Wafer Processing tsim los ntawm vet-china muab kev daws teeb meem zoo heev rau kev tsim khoom semiconductor. Lub cantilever paddle no yog ua los ntawm SiC (silicon carbide) cov khoom siv, thiab nws qhov kev tawv thiab kev tiv thaiv cua sov ua rau nws tswj tau qhov kev ua tau zoo hauv qhov kub thiab txias siab. Kev tsim ntawm Cantilever Paddle tso cai rau lub wafer kom tau txais kev txhawb nqa zoo thaum lub sijhawm ua tiav, txo qhov kev pheej hmoo ntawm kev tawg thiab kev puas tsuaj.

SiC Cantilever Paddleyog ib qho khoom siv tshwj xeeb siv rau hauv cov khoom siv semiconductor xws li oxidation furnace, diffusion furnace, thiab annealing furnace, qhov kev siv tseem ceeb yog rau wafer loading thiab unloading, txhawb nqa thiab thauj wafers thaum lub sijhawm kub siab.

Cov qauv sib xwsntawmSiCctiv thaiv kab mobpntxiv: ib lub qauv cantilever, ruaj khov rau ntawm ib kawg thiab dawb rau ntawm qhov tod, feem ntau muaj tus qauv tiaj tus thiab zoo li tus paddle.

VET Zog siv cov khoom siv siab purity recrystallized silicon carbide los lav qhov zoo.

Cov khoom siv lub cev ntawm Recrystallized Silicon Carbide

Vaj tse

Tus nqi ib txwm muaj

Kub ua haujlwm (°C)

1600 ° C (nrog oxygen), 1700 ° C (txo qhov chaw ib puag ncig)

Cov ntsiab lus SiC

> 99.96%

Cov ntsiab lus Si pub dawb

< 0.1%

Qhov ceev ntawm cov khoom loj

2.60-2.70 g/cm33

Pom tseeb porosity

< 16%

Lub zog nias

> 600MPa

Lub zog khoov txias

80-90 MPa (20°C)

Lub zog khoov kub

90-100 MPa (1400 ° C)

Kev nthuav dav ntawm thermal @ 1500 ° C

4.70 10-6/°C

Kev ua kom sov tau @1200 ° C

23W/m•K

Cov qauv elastic

240 GPa

Kev tiv thaiv thermal poob siab

Zoo kawg nkaus

Qhov zoo ntawm VET Energy's Advanced SiC Cantilever Paddle rau Wafer Processing yog:

-Kev ruaj khov kub: siv tau rau hauv cov chaw ib puag ncig siab dua 1600 ° C;

-Cov coefficient ntawm kev nthuav dav thermal tsawg: tswj kev ruaj khov ntawm qhov ntev, txo qhov kev pheej hmoo ntawm wafer warpage;

-Kev huv siab: txo qis kev pheej hmoo ntawm kev ua qias tuaj ntawm hlau;

-Kev tsis muaj tshuaj lom neeg: tiv taus corrosion, tsim rau ntau yam roj ib puag ncig;

-Muaj zog thiab tawv: Hnav-resistant, lub neej ntev kev pab cuam;

-Kev ua kom sov zoo: pab ua kom cov wafer sov sib xws.

Cantilever Paddle10
Cantilever Paddle16
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