Sic coating ke eng?

Silicon Carbideke motsoako o thata o nang le silicon le carbon, 'me o fumanoa ka tlhaho e le mineral moissanite e sa tloaelehang haholo. Likaroloana tsa silicon carbide li ka kopanngoa hammoho ka sintering ho etsa li-ceramics tse thata haholo, tse sebelisoang haholo lits'ebetsong tse hlokang nako e telele, haholo-holo mokolokong oa semiconductor.

Sebopeho sa 'mele sa SiC

Ho roala ha SiC ke silicon carbide e teteaneng, e sa senyeheng e nang le kutu e phahameng le e hanyetsanang le mocheso le mokhoa o babatsehang oa ho futhumatsa mocheso. Seaparo sena sa SiC se hloekileng haholo se sebelisoa indastering ea semiconductor le ea elektronike ho sireletsa lipalangoang tsa li-wafer, metheo le lisebelisoa tsa ho futhumatsa ho tloha libakeng tse senyang le tse sebetsang. Ho roala ha SiC ho boetse ho loketse libopi tsa vacuum le ho futhumatsa sampole sebakeng se phahameng sa vacuum, reactive le oksijene.

Bohloeki bo phahameng ba SiC ea ho roala holim'a metsi

Mokhoa oa ho roala SiC ke ofe?

Karolo e tšesaane ea silicon carbide e behiloe holim'a substrate e sebelisoaCVD (Kemiso ea Mouoane oa lik'hemik'hale). Hangata deposition e etsoa ka mocheso oa 1200-1300 ° C 'me boitšoaro ba ho atolosa mocheso oa thepa ea substrate e lokela ho lumellana le ho roala ha SiC ho fokotsa khatello ea mocheso.

TŠEBELETSO EA KHRESTE EA CVD SIC FILM

CVD SIC Coating FILM CRYSTAL SEBOPEHO

Thepa ea 'mele ea ho roala ha SiC e bonahala haholo-holo ka ho hanyetsa mocheso o phahameng, ho thatafala, ho hanyetsa kutu le conductivity ea mocheso.

Li-parameter tse tloaelehileng hangata li tjena:

Ho thatafala: Ho roala ha SiC hangata ho na le Vickers Hardness ka har'a 2000-2500 HV, e ba fang moaparo o phahameng haholo le ho hanyetsa ts'ebetso lits'ebetsong tsa indasteri.

Botenya: Liaparo tsa SiC hangata li na le boima ba 3.1-3.2 g/cm³. Boima bo phahameng bo tlatsetsa ho matla a mechine le ho tšoarella ha ho roala.

Thermal conductivity: Liaparo tsa SiC li na le conductivity e phahameng ea mocheso, hangata ka har'a 120-200 W / mK (ho 20 ° C). Sena se fana ka conductivity e ntle ea mocheso libakeng tse phahameng tsa mocheso 'me se etsa hore e tšoanelehe ka ho khetheha bakeng sa lisebelisoa tsa phekolo ea mocheso indastering ea semiconductor.

Sebaka se qhibilihang: silicon carbide e na le ntlha ea ho qhibiliha hoo e ka bang 2730 ° C 'me e na le botsitso bo babatsehang ba mocheso mochesong o feteletseng.

Coefficient ea Katoloso ea Thermal: Liaparo tsa SiC li na le coefficient e tlase ea mola oa katoloso ea mocheso (CTE), hangata ka har'a 4.0-4.5 µm/mK (ka 25-1000 ℃). Sena se bolela hore botsitso ba eona bo boholo bo botle ho feta phapang e kholo ea mocheso.

Khanyetso ea kutu: Li-coatings tsa SiC li hanyetsa ka mokhoa o feteletseng ho bola sebakeng se matla sa acid, alkali le oxidizing, haholo-holo ha ho sebelisoa li-acids tse matla (tse kang HF kapa HCl), ho hanyetsa ha tsona ho feta hole tsa lisebelisoa tse tloaelehileng tsa tšepe.

SiC coating application substrate

Ho roala ha SiC hangata ho sebelisoa ho ntlafatsa ho hanyetsa ha kutu, ho hanyetsa mocheso o phahameng, le ho hanyetsa khoholeho ea plasma ea substrate. Li-substrates tse tloaelehileng tsa kopo li kenyelletsa tse latelang:

Mofuta oa substrate	Lebaka la kopo	Tšebeliso e tloaelehileng
Graphite	- Sebopeho sa leseli, conductivity e ntle ea mocheso - Empa e silafatsoa habonolo ke plasma, e hloka tšireletso ea SiC	Likarolo tsa kamore ea vacuum, liketsoana tsa graphite, literei tsa plasma etching, joalo-joalo.
Quartz (Quartz/SiO₂)	- Bohloeki bo phahameng empa bo senyeha habonolo - Ho roala ho matlafatsa khanyetso ea khoholeho ea plasma	Likarolo tsa kamore ea CVD/PECVD
Ceramics (joalo ka alumina Al₂O₃)	- Matla a phahameng le sebopeho se tsitsitseng - Ho roala ho ntlafatsa ho hanyetsa ha kutu	Liaparo tsa kamore, lisebelisoa, joalo-joalo.
Litšepe (tse kang molybdenum, titanium, joalo-joalo)	- Ts'ebetso e ntle ea mocheso empa e hanyetsa ho bola - Ho roala ho ntlafatsa botsitso ba holim'a metsi	Likarolo tse khethehileng tsa karabelo ea ts'ebetso
Silicon carbide sintered body (SiC bulk)	- Bakeng sa libaka tse nang le litlhoko tse phahameng bakeng sa maemo a thata a ho sebetsa - Ho roala ho ntlafatsa bohloeki le ho hanyetsa ho bola	Likarolo tse phahameng tsa kamore ea CVD / ALD

Lihlahisoa tse koahetsoeng ke SiC hangata li sebelisoa libakeng tse latelang tsa semiconductor

Lihlahisoa tsa ho roala SiC li sebelisoa haholo ts'ebetsong ea semiconductor, haholo-holo mocheso o phahameng, ho bola ho hoholo le tikoloho e matla ea plasma. Tse latelang ke mekhoa e mengata e meholo ea kopo kapa masimo le litlhaloso tse khutšoane:

Mokhoa oa kopo/sebaka	Tlhaloso e khuts'oane	Mosebetsi oa ho roala Silicon Carbide
Etching ea plasma (Etching)	Sebelisa likhase tse thehiloeng ho fluorine kapa chlorine bakeng sa phetisetso ea mohlala	Hanela khoholeho ea plasma le ho thibela tšilafalo ea likaroloana le tšepe
Kemiso ea mouoane oa lik'hemik'hale (CVD/PECVD)	Ho kenngoa ha oxide, nitride le lifilimi tse ling tse tšesaane	Hanela likhase tse senyang 'me u eketse bophelo ba likaroloana
Kamore ea ho beha mouoane oa 'mele (PVD).	Ho phatloha ha matla a phahameng a matla nakong ea ho roala	Ntlafatsa ho hanyetsa khoholeho ea mobu le ho hanyetsa mocheso oa kamore ea karabelo
Mokhoa oa MOCVD (joalo ka kholo ea SiC epitaxial)	Karabelo ea nako e telele tlas'a mocheso o phahameng le sepakapaka se senyang sa hydrogen	Boloka botsitso ba lisebelisoa le ho thibela tšilafalo ea likristale tse ntseng li hola
Mokhoa oa ho phekola mocheso (LPCVD, diffusion, annealing, joalo-joalo)	Hangata e etsoa ka mocheso o phahameng le vacuum / sepakapaka	Sireletsa likepe tsa graphite le literei ho tsoa ho oxidation kapa corrosion
Mopalami oa liphaephe / chuck (ho sebetsana le Wafer)	Setsi sa graphite bakeng sa phetiso ea liphaephe kapa tšehetso	Fokotsa ho senyeha ha likaroloana 'me u qobe tšoaetso ea ho kopana
Likarolo tsa kamore ea ALD	Laola ho beoa ha lera la athomo khafetsa le ka nepo	Ho roala ho boloka kamore e hloekile ebile e na le khanyetso e phahameng ea kutu ho li-precursors

Hobaneng u khetha Matla a VET?

VET Energy ke moetsi ea ka sehloohong, moqapi le moetapele oa lihlahisoa tsa ho roala SiC Chaena, lihlahisoa tse ka sehloohong tsa SiC li kenyelletsasepalangoang se nang le seaparo sa SiC, SiC e koahetsoeepitaxial susceptor, Lesale la graphite le koahetsoeng ke SiC, Likarolo tsa halofo ea khoeli tse nang le seaparo sa SiC, SiC e entsoeng ka carbon-carbon composite, Seketsoana se koahetsoeng ke SiC, SiC e koahetsoeng ka heater, jj. VET Energy e ikemiseditse ho fa indasteri ya semiconductor thekenoloji ya ho qetela le ditharollo tsa dihlahiswa, le ho tshehetsa ditshebeletso tsa ho itlhophisa. Re labalabela ka tieo ho ba molekane oa hau oa nako e telele Chaena.