Silicon Carbidemusanganiswa wakaoma une silicon uye kabhoni, uye unowanikwa mune zvakasikwa seyakanyanya kushomeka mineral moissanite. Silicon carbide particles inogona kusunganidzwa pamwe chete nekunyunguduka kuti iumbe maceramics akaomarara, ayo anoshandiswa zvakanyanya mumashandisirwo anoda kusimba kwepamusoro, kunyanya mumasemiconductor procession.
Chimiro chemuviri cheSiC
Chii chinonzi SiC Coating?
SiC coating ndeye dense, inopfeka-inodzivirira silicon carbide coating ine yakakwira corrosion uye kupisa kupisa uye yakanakisa yekupisa conductivity. Iyi yakakwirira-kuchena SiC coating inonyanya kushandiswa mune semiconductor uye zvemagetsi maindasitiri kuchengetedza wafer vatakuri, mabhesi uye ekudziya zvinhu kubva kune zvinoora uye reactive nharaunda. SiC coating inokodzerawo vacuum furnaces uye sampuli yekudziya mune yakakwira vacuum, inoshanda uye nharaunda oksijeni.
High kuchena SiC coating pamusoro
Chii chinonzi SiC coating process?
Iyo yakatetepa yesilicon carbide inoiswa pamusoro peiyo substrate uchishandisaCVD (Chemical Vapor Deposition). Deposition inowanzoitwa patembiricha ye1200-1300 ° C uye hunhu hwekuwedzera hwekupisa kweiyo substrate zvinhu hunofanirwa kuenderana neSiC coating kuti kuderedze kushushikana kwekupisa.
CVD SIC Coating FILM CRYSTAL STRUCTURE
Iwo emuviri zvimiro zveSiC coating zvinonyanya kuratidzwa mukupisa kwayo kwekushisa, kuoma, corrosion resistance uye thermal conductivity.
Maumbirwo emuviri maparameter anowanzo seanotevera:
Kuoma: SiC coating inowanzove neVickers Hardness muhuwandu hwe2000-2500 HV, iyo inovapa yakanyanyisa kupfeka uye kupikisa kupikisa mumashandisirwo emabhizimisi.
Density: SiC coatings kazhinji ine density ye3.1-3.2 g/cm³. Iyo yakakwirira density inobatsira kusimba remagetsi uye kusimba kwekupfeka.
Thermal conductivity: SiC coatings ine high thermal conductivity, kazhinji muhuwandu hwe120-200 W / mK (pa20 ° C). Izvi zvinopa iyo yakanaka yekupisa conductivity munzvimbo dzekushisa kwepamusoro uye inoita kuti inyatsokodzera michina yekurapa kupisa muindasitiri yesemiconductor.
Melting point: silicon carbide ine nzvimbo yekunyunguduka inosvika 2730 ° C uye ine yakanakisa kugadzikana kwekupisa pakupisa kwakanyanya.
Coefficient of Thermal Expansion: SiC coatings ine yakaderera mutsara coefficient of thermal kuwedzera (CTE), kazhinji muhuwandu hwe4.0-4.5 µm/mK (mu25-1000 ℃). Izvi zvinoreva kuti kugadzikana kwayo kwedimensional kwakanakisa pamusoro pekusiyana kukuru kwekushisa.
Corrosion resistance: SiC coatings inopesana zvakanyanya nekuora muasidhi yakasimba, alkali uye oxidizing nharaunda, kunyanya kana uchishandisa maasidhi akasimba (akadai seHF kana HCl), kushorwa kwavo kwekuora kunopfuura kupfuura kwezvakajairwa simbi zvinhu.
SiC coating application substrate
SiC coating inowanzo shandiswa kunatsiridza corrosion resistance, high temperature resistance, uye plasma erosion resistance ye substrate. Yakajairika application substrates inosanganisira zvinotevera:
| Substrate mhando | Chikonzero chekushandisa | Kushandiswa kwakajairika |
| Graphite | - Chiedza chimiro, yakanaka yekupisa conductivity - Asi yakasvibiswa nyore nyore neplasma, inoda SiC coating kuchengetedzwa | Vacuum chamber parts, graphite boats, plasma etching trays, etc. |
| Quartz (Quartz/SiO₂) | - Kuchena kwepamusoro asi kusvibiswa zviri nyore -Kupfekedza kunowedzera plasma erosion resistance | CVD/PECVD kamuri zvikamu |
| Ceramics (senge alumina Al₂O₃) | - Simba repamusoro uye chimiro chakagadzikana -Kupfekedza kunonatsiridza kusaora kwepasi | Chamber lining, zvigadziriso, nezvimwe. |
| Metals (senge molybdenum, titanium, nezvimwewo) | - Yakanaka yekupisa conductivity asi yakashata corrosion kuramba - Coating inovandudza kugadzikana kwepamusoro | Special process reaction components |
| Silicon carbide sintered muviri (SiC yakawanda) | - Kune nharaunda dzine zvinodiwa zvakakwirira zvemamiriro ekushanda akaoma -Kupfekedza kunowedzera kunatsiridza kuchena uye kusagadzikana nekuora | High-end CVD/ALD chamber components |
SiC yakavharwa zvigadzirwa zvinowanzo shandiswa munzvimbo dzinotevera semiconductor
SiC coating products anoshandiswa zvakanyanya mu semiconductor processing, kunyanya mukupisa kwakanyanya, high corrosion uye yakasimba plasma nharaunda. Aya anotevera akati wandei makuru ekushandisa maitiro kana minda uye tsananguro pfupi:
| Maitiro ekushandisa/munda | Tsanangudzo pfupi | Silicon Carbide Coating basa |
| Plasma etching (Etching) | Shandisa fluorine kana chlorine-based magasi ekufambisa maitiro | Ramba kukukurwa kweplasma uye kudzivirira kusvibiswa kwesimbi nesimbi |
| Chemical vapor deposition (CVD/PECVD) | Deposition of oxide, nitride uye mamwe mafirimu matete | Ramba corrosive precursor magasi uye wedzera hupenyu hwechikamu |
| Physical vapor deposition (PVD) kamuri | High-energy particle bombardment panguva yekuputira | Kuvandudza kudzivirira kwekukurwa uye kupisa kupisa kwekamuri yekupindura |
| MOCVD maitiro (akadai seSiC epitaxial kukura) | Yenguva refu yekuita pasi pekushisa kwepamusoro uye yakakwirira hydrogen corrosive atmosphere | Chengetedza kugadzikana kwemidziyo uye kudzivirira kusvibiswa kwemakristasi ari kukura |
| Heat treatment process (LPCVD, diffusion, annealing, etc.) | Kazhinji inoitwa pakupisa kwepamusoro uye vacuum/atmosphere | Chengetedza zvikepe zvegraphite nematireyi kubva kune oxidation kana corrosion |
| Wafer mutakuri / chuck (Wafer kubata) | Graphite base yekuchinjisa wafer kana rutsigiro | Deredza kuparara kwechikamu uye kudzivirira kusangana nekusvibiswa |
| ALD kamuri zvikamu | Dzokorora uye nemazvo kudzora atomic layer deposition | Iyo yekuputira inochengetedza kamuri yakachena uye ine yakakwirira corrosion resistance kune precursors |
Sei uchisarudza VET Energy?
VET Energy inotungamira kugadzira, innovator uye mutungamiri weSiC coating zvigadzirwa muChina, iyo huru SiC yekupfeka zvigadzirwa zvinosanganisira.wafer mutakuri ane SiC coating, SiC yakavharwaepitaxial susceptor, SiC yakavharwa graphite mhete, Zvikamu zvehafu-mwedzi neSiC coating, SiC yakavharwa kabhoni-kabhoni inoumbwa, SiC yakavharwa chikepe chewafer, SiC yakavharwa heater, etc. VET Energy yakazvipira kupa iyo semiconductor indasitiri neiyo yekupedzisira tekinoroji uye zvigadzirwa mhinduro, uye inotsigira customization masevhisi. Isu tinotarisira nemoyo wose kuve shamwari yako yenguva refu muChina.
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Nguva yekutumira: Oct-18-2024