Kedu ihe bụ mkpuchi sic?

Silicon Carbidebụ ngwakọta siri ike nwere silicon na carbon, a na-ahụkwa ya na okike dị ka moissanite ịnweta mineral dị oke ụkọ. Enwere ike ijikọ mkpụrụ osisi siliki carbide ọnụ site na ijikọ iji mepụta seramiki siri ike, nke a na-ejikarị na ngwa chọrọ ogologo oge dị elu, ọkachasị na usoro semiconductor.

Ọdịdị anụ ahụ nke SiC

Kedu ihe bụ mkpuchi SiC?

Ihe mkpuchi SiC bụ mkpuchi mkpuchi silicon carbide siri ike, nke nwere nnukwu corrosion na nguzogide okpomọkụ yana ezigbo ikuku ọkụ. A na-eji mkpuchi SiC a dị elu dị ọcha na semiconductor na ụlọ ọrụ eletrọnịkị iji chebe ndị na-ebu wafer, ntọala na ihe ndị na-ekpo ọkụ site na gburugburu ndị na-emebi emebi na nke na-emeghachi omume. Ihe mkpuchi SiC dịkwa mma maka ọkụ ọkụ na ikpo ọkụ nlele na oghere dị elu, reactive na ikuku oxygen.

Elu mkpuchi SiC dị ọcha

Kedu ihe bụ usoro mkpuchi SiC?

A na-edobe oyi akwa silicon carbide n'elu nke mkpụrụ ahụ na-ejiCVD (Ntube uzuoku kemịkalụ). A na-emekarị nkwụnye ego na okpomọkụ nke 1200-1300 Celsius C na omume mgbasawanye okpomọkụ nke ihe ntinye kwesịrị ikwekọ na mkpuchi SiC iji belata nrụgide okpomọkụ.

CVD SIC FIM CRYSTAL StRUCTURE

CVD SIC mkpuchi ihe nkiri CRYSTAL StRUCTURE

Njirimara anụ ahụ nke mkpuchi SiC na-egosipụtakarị na nguzogide okpomọkụ ya dị elu, ike siri ike, nguzogide corrosion na ọkụ ọkụ.

Paragraf anụ ahụ a na-ahụkarị na-abụkarị ndị a:

Isi ike: Ihe mkpuchi SiC na-enwekarị ike ike Vickers na oke nke 2000-2500 HV, nke na-enye ha oke oke iyi na nguzogide mmetụta na ngwa mmepụta ihe.

Njupụta: Ihe mkpuchi SiC na-enwekarị njupụta nke 3.1-3.2 g/cm³. Nnukwu njupụta na-enye aka na ike ọrụ na ịdịte aka nke mkpuchi.

Thermal conductivity: Ihe mkpuchi SiC nwere ihe nrụpụta okpomọkụ dị elu, nke na-adịkarị na 120-200 W / mK (na 20 ° C). Nke a na-enye ya ezigbo conductivity thermal na gburugburu okpomọkụ dị elu ma mee ka ọ dị mma maka ngwa ọgwụgwọ okpomọkụ na ụlọ ọrụ semiconductor.

Ebe mgbaze: silicon carbide nwere ebe mgbaze nke ihe dịka 2730 Celsius ma nwee nkwụsi ike nke okpomọkụ na oke okpomọkụ.

Ọnụọgụ nke Thermal Mgbasawanye: SiC mkpuchi nwere ọnụ ala linear ọnụọgụ nke thermal mgbasa (CTE), a na nso nke 4.0-4.5 µm / mK (na 25-1000 ℃). Nke a pụtara na nkwụsi ike nke akụkụ ya dị mma karịa nnukwu ọdịiche okpomọkụ.

Nguzogide corrosion: Ihe mkpuchi SiC na-eguzogide nke ukwuu na corrosion na acid siri ike, alkali na oxidizing gburugburu, karịsịa mgbe ị na-eji acids siri ike (dị ka HF ma ọ bụ HCl), nkwụsị nke corrosion ha karịrị nnọọ nke ihe ígwè.

Ngwa mkpuchi SiC

A na-ejikarị mkpuchi SiC eme ihe iji melite nguzogide corrosion, oke okpomọkụ na-eguzogide ọgwụ na plasma nke mkpụrụ. Ngwa a na-ahụkarị gụnyere ndị a:

Ụdị mkpụrụ	Ihe kpatara ngwa	Ojiji a na-ahụkarị
Graphite	- Light Ọdịdị, ezi thermal conductivity - Ma ọ dị mfe imebi site na plasma, chọrọ mkpuchi mkpuchi SiC	Akụkụ oghere oghere, ụgbọ mmiri graphite, trays etching plasma, wdg.
Quartz (Quartz/SiO₂)	- Akwa ịdị ọcha ma dị mfe corroded - mkpuchi na-eme ka mgbochi mbuze plasma dịkwuo elu	Akụkụ ụlọ CVD/PECVD
Ceramics (dị ka alumina Al₂O₃)	- Ike dị elu na usoro kwụsiri ike - mkpuchi mma n'elu corrosion iguzogide	Ihe mkpuchi ụlọ, ihe ndozi, wdg.
Ọla (dị ka molybdenum, titanium, wdg.)	- Ezi conductivity thermal mana adịghị mma nguzogide corrosion - mkpuchi na-eme ka nkwụsi ike dị elu	Usoro mmeghachi omume pụrụ iche
Silicon carbide sintered ahụ (SiC nnukwu)	- Maka gburugburu ebe nwere oke chọrọ maka ọnọdụ ọrụ mgbagwoju anya - mkpuchi ọzọ na-eme ka ịdị ọcha na nguzogide corrosion dịkwuo mma	Ihe mejupụtara ụlọ CVD/ALD dị elu

A na-ejikarị ngwaahịa mkpuchi SiC eme ihe na mpaghara semiconductor ndị a

A na-eji ngwaahịa mkpuchi SiC eme ihe n'ọtụtụ ebe na nhazi semiconductor, tumadi na oke okpomọkụ, nnukwu corrosion na gburugburu plasma siri ike. Ndị a bụ ọtụtụ usoro ngwa ma ọ bụ ubi na nkọwa dị nkenke:

Usoro / ubi	Nkọwa nkenke	Silicon Carbide mkpuchi ọrụ
Plasma etching (ntụgharị)	Jiri fluorine ma ọ bụ gas sitere na chlorine maka ịnyefe ụkpụrụ	Na-eguzogide mbuze plasma ma gbochie mmetọ ahụ na metal
Mkpokọta uzuoku kemịkalụ (CVD/PECVD)	Ntinye nke oxide, nitride na ihe nkiri ndị ọzọ dị mkpa	Na-eguzogide ikuku ndị na-emebi emebi ma na-abawanye ndụ akụrụngwa
Ụlọ ihe na-ekpo ọkụ nke anụ ahụ (PVD).	Ngwunye urughuru ike dị elu n'oge usoro mkpuchi	Meziwanye ihe mgbochi mbuze na nguzogide okpomọkụ nke ụlọ mmeghachi omume
Usoro MOCVD (dị ka SiC epitaxial growth)	Mmeghachi omume ogologo oge n'okpuru oke okpomọkụ na ikuku hydrogen corrosive dị elu	Jikwaa nkwụsi ike akụrụngwa ma gbochie mmetọ nke kristal na-eto eto
Usoro ọgwụgwọ okpomọkụ (LPCVD, mgbasa, annealing, wdg)	A na-emekarị ya na oke okpomọkụ yana oghere / ikuku	Chebe ụgbọ mmiri graphite na trays pụọ na oxidation ma ọ bụ corrosion
Onye na-ebu wafer (njikwa wafer)	Ntọala eserese maka mbufe wafer ma ọ bụ nkwado	Belata mkpofu ahụ ma zere mmetọ kọntaktị
Ihe mejupụtara ụlọ ALD	Jikwaa mgbanye oyi akwa atomic ugboro ugboro na nke ọma	Ihe mkpuchi ahụ na-eme ka ọnụ ụlọ ahụ dị ọcha ma nwee nnukwu nguzogide corrosion na ndị na-ebu ụzọ

Kedu ihe kpatara ịhọrọ VET Energy?

VET Energy bụ onye na-emepụta ihe, onye na-emepụta ihe na onye ndu nke ngwaahịa mkpuchi SiC na China, ngwaahịa mkpuchi SiC bụ isi gụnyere.onye na-ebu wafer nwere mkpuchi SiC, SiC kpuchieepitaxial susceptor, mgbanaka graphite mkpuchi siC, Akụkụ ọkara ọnwa nwere mkpuchi SiC, Ihe mejupụtara carbon-carbon nke SiC nwere mkpuchi, Ụgbọ mmiri wafer nke SiC nwere mkpuchi, SiC mkpuchi mkpuchi, wdg. VET Energy na-agba mbọ inye ụlọ ọrụ semiconductor na teknụzụ kachasị elu na ngwọta ngwaahịa, ma na-akwado ọrụ nhazi. Anyị na-atụsi anya ike ịbụ onye gị na ya na-akpakọrịta ogologo oge na China.