Karāpire HirakaHe matū mārō te silicon me te waro, ā, e kitea ana i te taiao hei kohuke moissanite tino onge. Ka taea te hono i ngā matūriki silicon carbide mā te sintering hei hanga uku tino mārō, e whakamahia whānuitia ana i roto i ngā tono e hiahia ana kia roa te mau, inā koa i roto i te tukanga semiconductor.
Hanganga ā-tinana o te SiC
He aha te paninga SiC?
He paninga silicon carbide matotoru, ātete-mau te paninga SiC, he ātete nui ki te waikura me te wera, ā, he pai hoki te kawe wera. Ko tēnei paninga SiC tino parakore e whakamahia ana i roto i ngā ahumahi semiconductor me te hikohiko hei tiaki i ngā kaikawe wafer, ngā turanga me ngā huānga whakamahana mai i ngā taiao waikura me te tauhohe. He pai hoki te paninga SiC mō ngā oumu korehau me te whakamahana tauira i roto i ngā taiao korehau, tauhohe me te hāora teitei.
Mata paninga SiC parakore teitei
He aha te tukanga paninga SiC?
Ka whakatakotoria he paparanga angiangi o te silicon carbide ki runga i te mata o te papa mā te whakamahi iCVD (Te Whakatakotoranga Kohu Matū)Ko te whakatakotoranga ka mahia i ngā pāmahana 1200-1300°C, ā, me hototahi te whanonga whakawhānui wera o te rauemi papa ki te paninga SiC hei whakaiti i te ahotea wera.
HANGANGA KIRIATA PANIHANGA SIC CVD
Ko ngā āhuatanga ā-tinana o te paninga SiC e whakaatahia ana i roto i tōna ātete ki te pāmahana teitei, te pakeke, te ātete ki te waikura me te kawe wera.
Ko ngā tawhā ā-tinana noa e whai ake nei:
Te pakeketangaKo te pakeketanga Vickers o te paninga SiC kei waenganui i te 2000-2500 HV, ka tino kaha te ātete ki te kakahu me te pānga i roto i ngā mahi ahumahi.
KiatoKo te matotoru o ngā paninga SiC he 3.1-3.2 karamu/cm³. Nā te matotoru nui o te paninga ka whai wāhi ki te kaha ā-pūkaha me te roa o te paninga.
Te kawe weraHe nui te kawe wera o ngā paninga SiC, i te nuinga o te wā kei waenganui i te 120-200 W/mK (i te 20°C). Mā tēnei ka pai te kawe wera i roto i ngā taiao pāmahana teitei, ā, he tino pai mō ngā taputapu maimoatanga wera i roto i te umanga haurua-ira.
Te pūwāhi rewaKo te ira rewa o te silicon carbide e tata ana ki te 2730°C, ā, he tino pai te pumau o te pāmahana i ngā pāmahana tino kino.
Tauwehenga o te Whakawhanuitanga WeraHe iti te tauwehenga raina o te whakawhānui wera (CTE) o ngā paninga SiC, i te nuinga o te wā kei roto i te awhe 4.0-4.5 µm/mK (i roto i te 25-1000℃). Ko te tikanga he tino pai tōna pumau ā-ahu i ngā rerekētanga pāmahana nui.
Ātete ki te waikuraHe tino ātete ngā paninga SiC ki te waikura i roto i ngā taiao waikawa kaha, kawakore me te waikura, inā koa ka whakamahia ngā waikawa kaha (pēnei i te HF, te HCl rānei), he nui ake te ātete o tō rātou waikura i ērā o ngā rauemi whakarewa tuku iho.
Papa tono paninga SiC
He maha ngā wā ka whakamahia te paninga SiC hei whakapai ake i te ātete ki te waikura, te ātete ki te pāmahana teitei, me te ātete ki te horo o te papa. Ko ngā whakamahinga noa o ngā papa ko ēnei e whai ake nei:
| Momo papa raro | Take tono | Te whakamahinga noa |
| Karāpiti | - Hanganga māmā, kawe wera pai - Engari ka waikura ngāwari i te plasma, me tiaki i te paninga SiC | Ngā wāhanga rūma korehau, ngā poti karāhe, ngā paepae whakairo plasma, me ētahi atu. |
| Kuata (Kuata/SiO₂) | - He tino parakore engari he ngāwari te waikura - Ka whakarei ake te paninga i te ātete ki te horo o te toto | Ngā wāhanga rūma CVD/PECVD |
| Ngā uku (pērā i te alumina Al₂O₃) | - He kaha teitei, he hanganga pumau hoki - Ka whakapai ake te paninga i te ātete ki te waikura o te mata | Te arai o ngā rūma, ngā taputapu, me ētahi atu. |
| Ngā konganuku (pērā i te molybdenum, te titanium, me ētahi atu) | - He pai te kawe wera engari he iti te ātete ki te waikura - Ka whakapai ake te paninga i te pumau o te mata | Ngā wāhanga tauhohenga tukanga motuhake |
| Tinana kua whakakāhia ki te waro hiko (papatipu SiC) | - Mō ngā taiao he nui ngā whakaritenga mō ngā āhuatanga mahi uaua - Ka whakapai ake te paninga i te parakore me te ātete ki te waikura | Ngā wāhanga rūma CVD/ALD kounga teitei |
Ko ngā hua pania SiC e whakamahia whānuitia ana i roto i ngā wāhanga semiconductor e whai ake nei:
He whānuitia te whakamahinga o ngā hua paninga SiC i roto i te tukatuka haurua-ā-ira, te nuinga i roto i ngā taiao pāmahana teitei, te waikura teitei me te plasma kaha. Anei ētahi tukanga tono matua, mara rānei me ngā whakamārama poto:
| Te tukanga tono/mara | Whakaahuatanga poto | Mahi paninga Silicon Carbide |
| Te whakairo plasma (Te whakairo) | Whakamahia ngā hau kei roto i te wheori, i te hau māota rānei hei whakawhiti tauira. | Ātete ki te horo o te toto me te ārai i te poke o te matūriki me te konganuku |
| Te whakatakotoranga kohu matū (CVD/PECVD) | Te whakatakotoranga o te waikura, te nitride me ētahi atu kiriata angiangi | Ātete ki ngā hau waikura, ā, ka roa ake te ora o ngā wāhanga |
| Rūma whakapūmau kohu ā-tinana (PVD) | Te pupuhitanga o ngā matūriki pūngao-tiketike i te wā o te tukanga paninga | Whakapai ake i te ātete ki te horo me te ātete wera o te rūma tauhohenga |
| Te tukanga MOCVD (pēnei i te tipu epitaxial SiC) | Tauhohenga roa i raro i te pāmahana teitei me te hau waikura hauwai teitei | Kia mau tonu te pumau o ngā taputapu, ā, kia kore ai e poke ngā tioata e tipu haere ana |
| Te tukanga maimoatanga wera (LPCVD, te horapa, te whakamahana, me ētahi atu) | I te nuinga o te wā ka mahia i te pāmahana teitei me te korehau/hauātea | Āraia ngā poti me ngā paepae karāhe mai i te waikura, te waikura rānei |
| Kawe/pūwero anga (Te whakahaerenga o te anga) | Pūtake karāwhita mō te whakawhiti, te tautoko rānei i te anga wafer | Whakaitihia te maturuturunga o ngā matūriki me te karo i te poke i te whakapā atu |
| Ngā wāhanga o te rūma ALD | Whakahaerehia te whakatakotoranga paparanga ngota i ngā wā maha, ā, i runga i te tika hoki | Mā te paninga ka noho ma te ruma, ā, he ātete nui ki te waikura ki ngā matū kino. |
He aha i whiriwhiri ai i a VET Energy?
He kaihanga matua a VET Energy, he auaha, he kaiārahi hoki mō ngā hua paninga SiC i Haina, ko ngā hua paninga SiC matua ko...kawe anga me te paninga SiC, pania ki te SiCte pūwero epitaxial, Mowhiti karāhe pania ki te SiC, Ngā wāhanga marama-haurua me te paninga SiC, Hiko waro-waro kua pania ki te SiC, Waka angiangi pania SiC, Whakamahana pania SiC, me ētahi atu. E whakapau kaha ana a VET Energy ki te whakarato i ngā otinga hangarau me ngā hua tino pai ki te umanga haurua-waenga, ā, e tautoko ana hoki i ngā ratonga whakaritenga. E tino tumanako ana mātou ki te noho hei hoa mahi roa māu i Haina.
Mena he pātai āu, he hiahia rānei ki ētahi atu kōrero, tēnā kaua e mangere, whakapā mai ki a mātou.
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Wā tuku: Oketopa-18-2024