Gusiga irangi ku mubiri ni iki?

Karubide ya silikonini ikintu gikomeye kirimo silikoni na karuboni, kandi kiboneka mu bidukikije nk'amabuye y'agaciro adasanzwe ya moissanite. Uduce twa silikoni twa karuboni dushobora guhuzwa hamwe binyuze mu gusya kugira ngo tugire ibumba rikomeye cyane, rikoreshwa cyane mu bikorwa bisaba kuramba cyane, cyane cyane mu migendere ya semiconductor.

Imiterere y'umubiri wa SiC

Gusiga SiC ni iki?

SiC coating ni coating ikomeye kandi idashira ya silikoni, ifite ingese nyinshi n'ubushyuhe kandi ikora neza cyane. Iyi coating ya SiC ifite isuku nyinshi ikoreshwa cyane cyane mu nganda za semiconductor na elegitoroniki kugira ngo irinde ibikoresho bya wafer, bases n'ibintu bishyushya ibidukikije byangiza kandi bitera ingaruka mbi. SiC coating ikwiriye kandi ku bikoresho bya vacuum cleaner no gushyushya ingero mu bidukikije bya vacuum cleaner byinshi, reactive na ogisijeni.

Ubuso bwo gutwikira bwa SiC bufite isuku cyane

Uburyo bwo gusiga SiC ni ubuhe?

Urupapuro rworoshye rwa silicon carbide rushyirwa ku buso bw'ubutaka hakoreshejweCVD (Gukuraho umwuka uhumanya ikirere)Gushyiramo ubushyuhe akenshi bikorwa ku bushyuhe bwa 1200-1300°C kandi uburyo bwo kwagura ubushyuhe bw'ibikoresho bya substrate bugomba kuba bujyanye n'igitambaro cya SiC kugira ngo bigabanye ubushyuhe.

IMITERERE YA FILM YA CVD SIC CRISTAL

IMITERERE YA FURUSTI YO GUTEKA CVD SIC

Imiterere ifatika y'ipamba rya SiC igaragarira ahanini mu kurwanya ubushyuhe bwinshi, gukomera kwayo, kurwanya ingese ndetse no gutwara ubushyuhe.

Ibipimo bisanzwe by'umubiri ubusanzwe ni ibi bikurikira:

Ubukomere: Ubusanzwe irangi rya SiC rifite ubukana bwa Vickers buri hagati ya 2000-2500 HV, ibyo bikaba bitanga ubukana bwinshi cyane bwo kwangirika no kudakora neza mu nganda.

Ubucucike: Ubusanzwe irangi rya SiC rigira ubucucike bwa 3.1-3.2 g/cm³. Ubucucike bwinshi butuma irangi rikomera kandi rigakomeza.

Ubushobozi bwo gutwara ubushyuhe: Irangi rya SiC rifite ubushobozi bwo gutwara ubushyuhe bwinshi, akenshi riri hagati ya 120-200 W/mK (kuri 20°C). Ibi biyiha ubushobozi bwo gutwara ubushyuhe bwiza mu bidukikije birimo ubushyuhe bwinshi kandi bigatuma ikwiriye cyane ibikoresho byo gutunganya ubushyuhe mu nganda zikora ibikoresho bya semiconductor.

Aho gushonga: karubide ya silikoni ifite aho ishongesha ingano ya dogere selisiyusi 2730 kandi ifite ubushyuhe buhamye cyane mu bushyuhe bukabije.

Igipimo cy'ubwiyongere bw'ubushyuhe: Ingufu za SiC zifite igipimo cyo kwaguka k'ubushyuhe (CTE) kiri hagati ya 4.0-4.5 µm/mK (muri 25-1000℃). Ibi bivuze ko ubushobozi bwazo bwo guhagarara neza mu bushyuhe bukabije.

Ubudahangarwa bw'inkongi: Irangi rya SiC rirwanya cyane ingese mu bidukikije birimo aside ikomeye, alkali na ogisijeni, cyane cyane iyo hakoreshejwe aside ikomeye (nka HF cyangwa HCl), ubudahangarwa bwazo bwa ngese buruta kure ubw’ibikoresho bisanzwe by’icyuma.

Uburyo bwo gusiga SiC

Gusiga SiC bikunze gukoreshwa mu kunoza ubudahangarwa bw'ingufu, ubudahangarwa bw'ubushyuhe bwinshi, no kudahangarwa n'isuri ya plasma y'ubutaka. Ibintu bisanzwe bikoreshwa birimo ibi bikurikira:

Ubwoko bw'ubutaka	Impamvu yo gusaba	Ikoreshwa risanzwe
Grafiti	- Imiterere yoroheje, ubushobozi bwiza bwo gutwara ubushyuhe - Ariko byoroshye kwangirika na plasma, bisaba uburinzi bwa SiC	Ibice by'icyumba cy'imyanda, ubwato bwa grafiti, amasahani yo gushushanya plasma, n'ibindi.
Quartz (Quartz/SiO₂)	- Ubuziranenge bwinshi ariko bworoshye kwangirika - Gusiga irangi byongera ubudahangarwa bw'isuri mu maraso	Ibice by'icyumba bya CVD/PECVD
Ibumba (nk'alumina Al₂O₃)	- Ingufu nyinshi kandi ihamye - Gusiga irangi binoza uburyo bwo kurwanya ingese ku buso	Imitako y'icyumba, ibikoresho byo mu cyumba, nibindi.
Ibyuma (nk'ibinyabutabire, titaniyumu, n'ibindi)	- Ingufu nziza zo gutwara ubushyuhe ariko irwanya ingese nabi - Gusiga irangi binoza ubusugire bw'ubuso	Ibice byihariye by'imikorere
Umubiri wa silikoni ukozwe mu cyuma (SiC bulk)	- Ku bidukikije bifite ibisabwa byinshi ku mikorere igoye - Gusiga irangi birushaho kunoza ubuziranenge no kurwanya ingese	Ibice by'icyumba bya CVD/ALD byo mu rwego rwo hejuru

Ibikoresho bya SiC bikunze gukoreshwa mu bice bikurikira bya semiconductor

Ibikoresho byo gusiga SiC bikoreshwa cyane mu gutunganya semiconductor, cyane cyane mu bushyuhe bwinshi, ingese nyinshi n'ibidukikije bikomeye bya plasma. Ibi bikurikira ni inzira nyinshi z'ingenzi zo gukoresha cyangwa imirima n'ibisobanuro bigufi:

Uburyo bwo gusaba/aho gusaba gukorerwa	Ibisobanuro bigufi	Imikorere yo gutwikira karubide ya silikoni
Gukata plasma (Gukata plasma)	Koresha imyuka ishingiye kuri fluorine cyangwa chlorine kugira ngo wimure imiterere	Irinde isuri ya plasma kandi wirinde kwanduza uduce duto n'icyuma
Gushyira umwuka mu kirere (CVD / PECVD)	Gushyiramo okiside, nitride n'izindi firime nto	Irinde imyuka itera kwangirika no kongera ubuzima bw'ibice byayo
Icyumba cyo gusohora umwuka ushyushye (PVD)	Gutera uduce tw'ingufu nyinshi mu gihe cyo gusiga	Kunoza uburyo bwo kurwanya isuri no kurwanya ubushyuhe bw'icyumba cy'ubutabazi
Uburyo bwa MOCVD (nk'ikura rya SiC epitaxial)	Uburyo bwo gukora ibintu mu gihe kirekire mu gihe cy'ubushyuhe bwinshi n'ikirere cya hydrogen kirimo kwangirika cyane	Gukomeza guhagarara neza kw'ibikoresho no kwirinda kwanduza kristu zikura
Uburyo bwo kuvura ubushyuhe (LPCVD, gukwirakwiza, gufunga, nibindi)	Akenshi bikorwa ku bushyuhe bwinshi n'ikirere gishyushye	Rinda ubwato bwa grafiti n'amasahani kugira ngo bitangiza ogisijeni cyangwa ingese
Umuyoboro w'inyama z'inka (Umuyoboro w'inyama z'inka)	Igikoresho cya grafiti cyo kohereza cyangwa gushyigikira wafer	Gabanya gushonga kw'udukoko kandi wirinde kwanduzanya n'ibintu bihura nabyo
Ibice by'icyumba cya ALD	Gugenzura inshuro nyinshi kandi neza uburyo bwo gushyira mu byiciro bya atome	Igipfundikizo gikomeza icyumba gisukuye kandi kirwanya ingese cyane ku bintu byabanje

Kuki wahitamo VET Energy?

VET Energy ni ikigo gikomeye mu gukora, guhanga udushya no kuyobora ibicuruzwa bya SiC mu Bushinwa, ibikoresho by'ingenzi bya SiC birimoicyuma gitwara wafer gifite irangi rya SiC, SiC itwikiriweicyuma gifunga amaguru, Impeta ya grafiti itwikiriwe na SiC, Ibice by'igice cy'ukwezi bifite irangi rya SiC, Ibigize karubone-karubone bitwikiriwe na SiC, Ubwato bwa wafer butwikiriwe na SiC, Igishyushya gitwikiriwe na SiC, nibindi. VET Energy yiyemeje guha inganda za semiconductor ibisubizo byuzuye by'ikoranabuhanga n'ibicuruzwa, kandi ishyigikira serivisi zo guhindura ibintu. Twishimiye cyane kuba umufatanyabikorwa wawe w'igihe kirekire mu Bushinwa.