Silicon Carbideyog ib qho khoom sib xyaw ua ke uas muaj silicon thiab carbon, thiab pom muaj nyob rau hauv xwm raws li cov ntxhia moissanite tsawg heev. Cov khoom me me silicon carbide tuaj yeem sib txuas ua ke los ntawm kev sintering los ua cov khoom siv ceramics nyuaj heev, uas siv dav hauv cov ntawv thov uas xav tau kev ua haujlwm ntev, tshwj xeeb tshaj yog hauv cov txheej txheem semiconductor.
Cov qauv ntawm SiC
SiC Txheej yog dab tsi?
Txheej SiC yog ib txheej silicon carbide uas tuab thiab tsis yooj yim hnav nrog kev tiv taus xeb thiab kub thiab kev ua tau zoo heev. Cov txheej SiC no yog siv rau hauv kev lag luam semiconductor thiab electronics los tiv thaiv cov wafer carriers, bases thiab cov cua sov los ntawm cov chaw ua haujlwm corrosive thiab reactive. Txheej SiC kuj tseem siv tau rau cov cub tawg thiab cov qauv cua sov hauv cov chaw ua haujlwm nqus tsev, reactive thiab oxygen.
Cov txheej txheem SiC purity siab
Cov txheej txheem SiC txheej txheem yog dab tsi?
Ib txheej nyias nyias ntawm silicon carbide raug tso rau ntawm qhov chaw ntawm lub substrate sivCVD (Kev Tso Pa Tshuaj Lom Zem). Feem ntau qhov kev tso tawm yog ua tiav ntawm qhov kub ntawm 1200-1300 ° C thiab tus cwj pwm nthuav dav thermal ntawm cov khoom siv substrate yuav tsum sib xws nrog SiC txheej kom txo qis kev ntxhov siab thermal.
CVD SIC Txheej Zaj Duab Xis Crystal Qauv
Cov khoom siv lub cev ntawm SiC txheej yog feem ntau pom hauv nws qhov kub thiab txias tsis kam, qhov nyuaj, kev tiv thaiv corrosion thiab thermal conductivity.
Cov yam ntxwv ntawm lub cev feem ntau yog raws li nram no:
Qhov nyuajFeem ntau, cov txheej SiC muaj Vickers Hardness nyob rau hauv thaj tsam ntawm 2000-2500 HV, uas ua rau lawv muaj kev tiv thaiv kev hnav thiab kev cuam tshuam siab heev hauv kev siv hauv kev lag luam.
Qhov CeevFeem ntau, cov txheej SiC muaj qhov ceev ntawm 3.1-3.2 g/cm³. Qhov ceev siab ua rau lub zog kho tshuab thiab kev ua haujlwm ntev ntawm cov txheej.
Kev ua kom sov tau zooCov txheej SiC muaj cov thermal conductivity siab, feem ntau yog nyob rau hauv qhov ntau ntawm 120-200 W / mK (ntawm 20 ° C). Qhov no ua rau nws muaj cov thermal conductivity zoo hauv qhov chaw kub siab thiab ua rau nws tsim nyog rau cov khoom siv kho cua sov hauv kev lag luam semiconductor.
Qhov kub yaj: silicon carbide muaj qhov melting point ntawm kwv yees li 2730 ° C thiab muaj kev ruaj khov thermal zoo heev ntawm qhov kub thiab txias heev.
Coefficient ntawm Thermal ExpansionCov txheej SiC muaj cov coefficient linear qis ntawm thermal expansion (CTE), feem ntau nyob rau hauv qhov ntau ntawm 4.0-4.5 µm/mK (hauv 25-1000 ℃). Qhov no txhais tau tias nws qhov kev ruaj khov ntawm qhov ntev zoo heev dhau qhov sib txawv ntawm qhov kub thiab txias loj.
Kev tiv thaiv xebCov txheej SiC tiv taus xeb heev hauv cov kua qaub muaj zog, alkali thiab oxidizing ib puag ncig, tshwj xeeb tshaj yog thaum siv cov kua qaub muaj zog (xws li HF lossis HCl), lawv qhov kev tiv thaiv xeb ntau dua li cov khoom siv hlau ib txwm muaj.
SiC txheej txheej siv substrate
Cov txheej SiC feem ntau siv los txhim kho qhov kev tiv thaiv corrosion, kev tiv thaiv kub siab, thiab kev tiv thaiv plasma erosion ntawm lub substrate. Cov substrates siv feem ntau suav nrog cov hauv qab no:
| Hom khoom siv | Vim li cas thiaj thov | Kev siv ib txwm muaj |
| Cov xim av | - Lub teeb qauv, zoo thermal conductivity - Tab sis yooj yim corroded los ntawm plasma, xav tau SiC txheej tiv thaiv | Cov khoom siv hauv chav nqus tsev, cov nkoj graphite, cov tais plasma etching, thiab lwm yam. |
| Quartz (Quartz/SiO₂) | - Kev ntshiab siab tab sis yooj yim corroded - Txheej ua rau cov plasma erosion tsis kam | Cov khoom seem ntawm CVD/PECVD chamber |
| Cov khoom siv ua los ntawm av nplaum (xws li alumina Al₂O₃) | - Lub zog siab thiab ruaj khov - Txheej txhim kho qhov corrosion tsis kam ntawm qhov chaw | Cov khoom siv hauv chav, cov khoom siv, thiab lwm yam. |
| Cov hlau (xws li molybdenum, titanium, thiab lwm yam) | - Kev ua kom sov zoo tab sis tsis zoo rau kev xeb - Txheej txhim kho qhov ruaj khov ntawm qhov chaw | Cov khoom tshwj xeeb ntawm cov txheej txheem tshuaj tiv thaiv |
| Silicon carbide sintered lub cev (SiC bulk) | - Rau cov chaw uas muaj cov kev xav tau siab rau cov xwm txheej ua haujlwm nyuaj - Txheej ntxiv txhim kho qhov huv thiab kev tiv thaiv corrosion | Cov khoom siv CVD/ALD chamber zoo tshaj plaws |
Cov khoom siv SiC coated feem ntau siv rau hauv cov cheeb tsam semiconductor hauv qab no
Cov khoom siv txheej SiC yog siv dav hauv kev ua cov khoom siv semiconductor, feem ntau yog nyob rau hauv qhov kub siab, corrosion siab thiab muaj zog plasma ib puag ncig. Cov hauv qab no yog ntau cov txheej txheem thov loj lossis cov teb thiab cov lus piav qhia luv luv:
| Cov txheej txheem thov/teb | Kev piav qhia luv luv | Kev ua haujlwm ntawm Silicon Carbide Txheej |
| Plasma etching (Etching) | Siv cov pa roj fluorine lossis chlorine rau kev hloov pauv qauv | Tiv thaiv kev tawg ntawm cov ntshav thiab tiv thaiv kom tsis txhob muaj cov khoom me me thiab cov hlau sib kis |
| Kev tso pa tshuaj lom neeg (CVD/PECVD) | Kev tso cov oxide, nitride thiab lwm cov yeeb yaj kiab nyias | Tiv thaiv cov pa roj ua ntej corrosive thiab ua kom lub neej ntawm cov khoom siv ntev dua |
| Chav ua kom lub cev vapor deposition (PVD) | Kev tawg ntawm cov khoom me me uas muaj zog heev thaum lub sijhawm txheej txheem | Txhim kho qhov kev tiv thaiv kev yaig thiab kev tiv thaiv cua sov ntawm lub chamber tshuaj tiv thaiv |
| Cov txheej txheem MOCVD (xws li SiC epitaxial kev loj hlob) | Cov tshuaj tiv thaiv mus sij hawm ntev nyob rau hauv qhov kub thiab txias siab thiab huab cua hydrogen corrosive siab | Tswj cov khoom siv kom ruaj khov thiab tiv thaiv kom tsis txhob muaj kuab paug ntawm cov siv lead ua uas loj hlob tuaj |
| Cov txheej txheem kho cua sov (LPCVD, diffusion, annealing, thiab lwm yam) | Feem ntau ua nyob rau qhov kub thiab txias thiab qhov chaw nqus tsev/cua | Tiv thaiv cov nkoj graphite thiab cov tais los ntawm kev oxidation lossis corrosion |
| Tus neeg nqa khoom wafer/chuck (kev tuav wafer) | Graphite puag rau wafer hloov lossis kev txhawb nqa | Txo cov khoom me me uas poob tawm thiab tsis txhob muaj kev sib cuag nrog cov khoom sib kis |
| Cov khoom ntawm ALD chamber | Tswj cov txheej atomic deposition ntau zaus thiab raug | Cov txheej txheej ua rau lub chamber huv thiab muaj kev tiv thaiv corrosion siab rau cov precursors |
Vim li cas ho xaiv VET Energy?
VET Energy yog lub chaw tsim khoom, tus tsim kho tshiab thiab tus thawj coj ntawm SiC txheej khoom hauv Suav teb, cov khoom SiC txheej tseem ceeb suav nrogCov khoom siv wafer nrog SiC txheej, SiC txheejepitaxial susceptor, SiC coated graphite nplhaib, Cov khoom ib nrab hli nrog SiC txheej, SiC coated carbon-carbon composite, SiC coated wafer nkoj, SiC txheej cua sov, thiab lwm yam. VET Energy cog lus tias yuav muab cov thev naus laus zis thiab cov khoom lag luam zoo tshaj plaws rau kev lag luam semiconductor, thiab txhawb nqa cov kev pabcuam kho kom haum. Peb tos ntsoov yuav ua koj tus khub mus sij hawm ntev hauv Suav teb.
Yog tias koj muaj lus nug lossis xav tau cov ntaub ntawv ntxiv, thov tsis txhob yig tiv tauj peb.
Whatsapp & Wechat: +86-18069021720
Email: steven@china-vet.com
Lub sijhawm tshaj tawm: Lub Kaum Hli-18-2024