Silicon Carbideyog ib qho nyuaj compound uas muaj silicon thiab carbon, thiab muaj nyob rau hauv cov xwm li cov ntxhia tsis tshua muaj moissanite. Silicon carbide hais tuaj yeem sib koom ua ke los ntawm sintering los tsim cov ceramics nyuaj, uas yog siv dav hauv cov ntawv thov kom muaj zog, tshwj xeeb tshaj yog nyob rau hauv semiconductor procession.
Lub cev qauv ntawm SiC
SiC Txheej yog dab tsi?
SiC txheej yog tuab, hnav-resistant silicon carbide txheej nrog siab corrosion thiab kub tsis kam thiab zoo thermal conductivity. Qhov no high-purity SiC txheej yog feem ntau siv nyob rau hauv lub semiconductor thiab electronics industries los tiv thaiv wafer nqa, hauv paus thiab cua sov ntsiab los ntawm corrosive thiab reactive ib puag ncig. SiC txheej kuj tsim nyog rau lub tshuab nqus tsev vacuum thiab cov qauv cua sov hauv lub tshuab nqus tsev siab, reactive thiab oxygen ib puag ncig.
High purity SiC txheej nto
SiC txheej txheem yog dab tsi?
Ib txheej nyias ntawm silicon carbide yog tso rau ntawm qhov chaw ntawm lub substrate sivCVD (Chemical Vapor Deposition). Kev tso nyiaj feem ntau yog ua tiav ntawm qhov kub ntawm 1200-1300 ° C thiab thermal expansion tus cwj pwm ntawm cov khoom siv substrate yuav tsum tau sib xws nrog SiC txheej kom txo qis thermal stress.
CVD SIC txheej FILM CRYSTAL StrucTURE
Lub cev lub cev ntawm SiC txheej yog qhov tseem ceeb hauv nws qhov kub thiab txias, hardness, corrosion kuj thiab thermal conductivity.
Cov yam ntxwv ntawm lub cev feem ntau yog raws li hauv qab no:
Hardness: SiC txheej feem ntau muaj Vickers Hardness nyob rau hauv thaj tsam ntawm 2000-2500 HV, uas ua rau lawv tsis tshua muaj siab hnav thiab cuam tshuam rau kev siv hauv kev lag luam.
Qhov ntom: SiC txheej feem ntau muaj qhov ceev ntawm 3.1-3.2 g / cm³. Qhov siab ceev pab txhawb rau cov neeg kho tshuab lub zog thiab durability ntawm txheej.
Thermal conductivity: SiC coatings muaj cov thermal conductivity siab, feem ntau nyob rau hauv thaj tsam ntawm 120-200 W / mK (ntawm 20 ° C). Qhov no muab nws zoo thermal conductivity nyob rau hauv qhov kub thiab txias ib puag ncig thiab ua rau nws tshwj xeeb tshaj yog haum rau cov khoom siv kho cua sov hauv kev lag luam semiconductor.
Melting point: silicon carbide muaj qhov melting point ntawm kwv yees li 2730 ° C thiab muaj thermal stability zoo heev ntawm qhov kub thiab txias.
Coefficient ntawm Thermal Expansion: SiC coatings muaj ib tug tsawg linear coefficient ntawm thermal expansion (CTE), feem ntau nyob rau hauv qhov ntau ntawm 4.0-4.5 µm / mK (nyob rau hauv lub 25-1000 ℃). Qhov no txhais tau hais tias nws qhov seem stability yog qhov zoo tshaj qhov sib txawv ntawm qhov kub thiab txias.
Corrosion kuj: SiC coatings yog heev resistant rau corrosion nyob rau hauv muaj zog acid, alkali thiab oxidizing ib puag ncig, tshwj xeeb tshaj yog thaum siv cov acids muaj zog (xws li HF los yog HCl), lawv corrosion kuj deb tshaj li cov pa hlau cov ntaub ntawv.
SiC txheej thov substrate
SiC txheej feem ntau yog siv los txhim kho corrosion kuj, kub tsis kam, thiab plasma yaig tsis kam ntawm substrate. Common application substrates muaj xws li cov hauv qab no:
| Hom substrate | Kev thov vim li cas | Hom kev siv |
| Graphite | - Lub teeb qauv, zoo thermal conductivity - Tab sis yooj yim corroded los ntawm plasma, yuav tsum tau SiC txheej tiv thaiv | Nqus chamber qhov chaw, graphite nkoj, plasma etching tais, thiab lwm yam. |
| Quartz (Quartz / SiO₂) | - High purity tab sis yooj yim corroded - Txheej txhim kho plasma yaig kuj | CVD / PECVD chamber qhov chaw |
| Ceramics (xws li alumina Al₂O₃) | - Lub zog muaj zog thiab ruaj khov - Txheej txhim kho nto corrosion kuj | Chamber hauv ob sab phlu, fixtures, thiab lwm yam. |
| Cov hlau (xws li molybdenum, titanium, thiab lwm yam) | - Zoo thermal conductivity tab sis tsis zoo corrosion kuj - Txheej txhim kho qhov chaw ruaj khov | Cov txheej txheem tshwj xeeb cov tshuaj tiv thaiv |
| Silicon carbide sintered lub cev (SiC tej) | - Rau ib puag ncig uas xav tau siab rau kev ua haujlwm nyuaj - Txheej ntxiv txhim kho purity thiab corrosion kuj | High-end CVD / ALD chamber Cheebtsam |
SiC coated cov khoom yog feem ntau siv nyob rau hauv cov nram qab no semiconductor cheeb tsam
SiC txheej khoom yog dav siv nyob rau hauv semiconductor ua, feem ntau nyob rau hauv high kub, siab corrosion thiab muaj zog plasma ib puag ncig. Cov hauv qab no yog ob peb yam kev thov loj lossis cov teb thiab cov lus piav qhia luv luv:
| Daim ntawv thov txheej txheem / teb | Cov lus piav qhia luv luv | Silicon Carbide Txheej muaj nuj nqi |
| Plasma etching (txhim kho) | Siv fluorine lossis chlorine-based gases rau kev hloov pauv | Tiv thaiv plasma yaig thiab tiv thaiv particle thiab hlau paug |
| Chemical vapor deposition (CVD/PECVD) | Deposition ntawm oxide, nitride thiab lwm yam nyias zaj duab xis | Tiv thaiv corrosive precursor gases thiab ua kom lub neej tivthaiv |
| Lub cev vapor deposition (PVD) chamber | High-energy particle bombardment thaum lub sij hawm txheej txheej | Txhim kho qhov erosion kuj thiab kub tsis kam ntawm cov tshuaj tiv thaiv chamber |
| MOCVD txheej txheem (xws li SiC epitaxial kev loj hlob) | Cov tshuaj tiv thaiv ntev nyob rau hauv qhov kub thiab txias thiab siab hydrogen corrosive cua | Tswj cov cuab yeej ruaj khov thiab tiv thaiv kev kis kab mob ntawm cov pob zeb loj hlob |
| Kev kho cua sov (LPCVD, diffusion, annealing, thiab lwm yam) | Feem ntau nqa tawm ntawm qhov kub thiab txias thiab lub tshuab nqus tsev / atmosphere | Tiv thaiv cov nkoj graphite thiab cov tais los ntawm oxidation lossis corrosion |
| Wafer carrier / chuck (Wafer tuav) | Graphite puag rau wafer hloov lossis kev txhawb nqa | Txo cov particle shedding thiab zam kev sib cuag |
| ALD Chamber Cheebtsam | Rov ua dua thiab raug tswj xyuas atomic txheej deposition | Cov txheej ua kom lub chamber huv si thiab muaj kev tiv thaiv corrosion siab rau precursors |
Vim li cas thiaj xaiv VET Energy?
VET Energy yog cov chaw tsim khoom lag luam, tsim kho tshiab thiab tus thawj coj ntawm SiC txheej khoom hauv Suav teb, cov khoom tseem ceeb ntawm SiC txheej muaj xws liwafer cab kuj nrog SiC txheej, SiC coatedepitaxial tiv thaiv, SiC coated graphite nplhaib, Ib nrab hli ntu nrog SiC txheej, SiC coated carbon-carbon composite, SiC coated wafer nkoj, SiC coated rhaub, thiab lwm yam. VET Energy tau cog lus los muab kev lag luam semiconductor nrog cov thev naus laus zis zoo tshaj plaws thiab cov khoom lag luam daws teeb meem, thiab txhawb cov kev pabcuam customization. Peb ua siab dawb tos ntsoov ua koj tus khub mus sij hawm ntev hauv Suav teb.
Yog tias koj muaj lus nug lossis xav tau cov ntsiab lus ntxiv, thov tsis txhob yig tiv tauj peb.
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Email: steven@china-vet.com
Post lub sij hawm: Oct-18-2024