Waa maxay dahaarka sic?

Silicon Carbidewaa iskudhis adag oo ka kooban silikoon iyo kaarboon, waxaana laga helaa dabeecadda sida moissanite macdanta aadka u naadir ah. Qaybaha silikoon carbide waxaa lagu wada xidhi karaa by sintering si ay u sameeyaan dhoobada aadka u adag, kuwaas oo si ballaaran loo isticmaalo codsiyada u baahan adkeysi sare, gaar ahaan habka semiconductor.

Qaab dhismeedka jirka ee SiC

Waa maxay SiC Coating?

Daahan SiC waa dahaar cufan oo silikoon carbide ah oo xidha u adkaysta oo leh daxal sare iyo iska caabin kulayl iyo kororka kulaylka aad u fiican. Daahan SiC ee nadiifka ah ayaa ugu horrayn loo adeegsadaa semiconductor-ka iyo warshadaha elektiroonigga ah si looga ilaaliyo sidayaasha waferrada, saldhigyada iyo walxaha kuleyliyaha ah ee ka imanaya bay'ada wasakhaysan iyo kuwa firfircoon. Daahan SiC sidoo kale wuxuu ku habboon yahay foornooyinka faakuumka iyo muunada kulaylinta ee vacuum sare, falcelinta iyo jawiga ogsijiinta.

Nadiifinta sare ee dusha dahaarka SiC

Waa maxay habka daahan SiC?

Lakab khafiif ah oo silikoon carbide ah ayaa lagu shubaa dusha sare ee substrate-ka iyadoo la isticmaalayoCVD (Qaadista Uumiga Kiimikada). Dhigista waxaa badanaa lagu fuliyaa heerkul ah 1200-1300 ° C iyo dabeecadda fidinta kulaylka ee walxaha substrate waa in ay la jaanqaadaan daahan SiC si loo yareeyo diiqada kulaylka.

CVD SIC FILIM DHISMAHA CRYSTAL

CVD SIC Dahaarka Filim dhismeedka CRYSTAL

Tilmaamaha jireed ee daahan SiC ayaa inta badan ka muuqda caabbinta heerkulka sare, adkaanta, caabbinta daxalka iyo kulaylka kuleylka.

Qiyaasaha jireed ee caadiga ah waa sida soo socota:

AdagDahaarka SiC caadi ahaan waxay leeyihiin Vickers Hardness inta u dhaxaysa 2000-2500 HV, taas oo siinaya xirmo aad u sarreeya iyo iska caabin saameyn ku leh codsiyada warshadaha.

CufnaantaDahaarka SiC caadi ahaan waxay leeyihiin cufnaanta 3.1-3.2 g/cm³. Cufnaanta sare waxay gacan ka geysataa xoogga farsamada iyo cimri dhererka dahaarka.

Dhaqdhaqaaqa kulaylkaDahaarka SiC waxay leeyihiin kororka kulaylka sare, sida caadiga ah inta u dhaxaysa 120-200 W/mK (20 ° C). Tani waxay siinaysaa kulaylka wanaagsan ee jawiga heerkulka sare waxayna ka dhigaysaa mid si gaar ah ugu habboon qalabka daaweynta kulaylka ee warshadaha semiconductor.

barta dhalaalaysa: Silicon carbide waxay leedahay meel dhalaalaysa qiyaastii 2730 ° C waxayna leedahay xasillooni kulayleed heerkul aad u sarreeya.

Isku-dhafka Balaadhinta kulaylkaDahaarka SiC waxay leeyihiin iskudar hoose oo toosan oo balaadhinta kulaylka (CTE), sida caadiga ah inta u dhaxaysa 4.0-4.5 µm/mK (ku jira 25-1000 ℃). Tani waxay ka dhigan tahay in xasilloonida cabbirkeedu aad uga fiican yahay kala duwanaanshaha heerkulka ballaaran.

Iska caabbinta daxalkaDahaarka SiC waxay aad ugu adkaysanayaan daxalka aashitada xooggan, alkali iyo oxidizing bay'ada, gaar ahaan marka la isticmaalayo asiidh adag (sida HF ama HCl), iska caabintooda daxalka ayaa aad uga badan kuwa birta caadiga ah.

Substrate codsiga daahan SiC

Daahan SiC waxaa inta badan loo isticmaalaa si loo hagaajiyo iska caabinta daxalka, caabbinta heerkulka sare, iyo caabbinta nabaad guurka balaasmaha ee substrate. Substrate-yada caadiga ah waxaa ka mid ah kuwan soo socda:

Nooca substrate	Sababta codsiga	Isticmaalka caadiga ah
Garaafka	- Qaab dhismeedka iftiinka, kuleylka kuleylka wanaagsan - Laakiin si fudud u daxaleeyay balasmaha, waxay u baahan tahay ilaalinta daahan SiC	Qaybaha qolka faaruqinta, doomaha garaafka, saxaarada balaasmaha etching, iwm.
Quartz (Quartz/SiO₂)	- Nadiifin sare laakiin si fudud u daxalaystay - Dahaarka waxay kor u qaadaan caabbinta nabaad guurka balaasmaha	CVD/PECVD qaybaha qolka
Ceramics (sida alumina Al₂O₃)	- Xoog sare iyo qaab dhismeed deggan - Dahaarka waxay hagaajiyaan caabbinta daxalka dusha sare	Dahaarka qolka, qalabyada, iwm.
Biraha (sida molybdenum, titanium, iwm.)	- conductivity kaamerada wanaagsan laakiin iska caabin daxalka liidata - Dahaarka waxay hagaajiyaan xasilloonida dusha sare	Qaybaha falcelinta habka gaarka ah
Jidhka isku dhafan ee Silicon carbide (SiC bulk)	- Deegaannada leh shuruudaha sare ee xaaladaha adag ee shaqada - Dahaarka waxay sii wanaajisaa nadiifinta iyo caabbinta daxalka	Qaybta sare ee CVD/ALD qaybaha qolka

Alaabooyinka dahaarka leh ee loo yaqaan 'SiC' ayaa inta badan lagu isticmaalaa aagagga semiconductor ee soo socda

Alaabooyinka daahan SiC waxaa si weyn loogu isticmaalaa habaynta semiconductor, badiyaa heerkulka sare, daxalka sare iyo bey'ada balaasmaha xooggan. Kuwa soo socda ayaa ah dhowr habraac oo codsi oo waaweyn ama goobo iyo tilmaamo kooban:

Habka codsiga/goobta	Sharaxaad kooban	Shaqada Dahaarka Silicon Carbide
Plasma etching (Etching)	U isticmaal gaasas fluorine ah ama koloriin ku salaysan wareejinta qaabka	U adkeyso nabaad guurka balaasmaha oo ka hortag wasakhowga walxaha iyo birta
Dhigista uumiga kiimikada (CVD/PECVD)	Dhigista oxide, nitride iyo filimada kale ee khafiifka ah	Iska caabbinta gaaska daxalka ah oo kordhiya nolosha ka kooban
Jidhka dhigaalka uumiga (PVD) qolka	Duminta walxaha tamarta-sare leh inta lagu jiro habka daahan	Hagaajinta caabbinta nabaadguurka iyo iska caabinta kulaylka qolka falcelinta
Habka MOCVD (sida SiC epitaxial koritaanka)	Dareen-celinta muddada-dheer ee heerkulka sare iyo jawiga daxalka sareeyo	Ilaali xasiloonida qalabka kana ilaali faddaraynta kiristaalo soo koraya
Habka daawaynta kulaylka (LPCVD, fidinta, soo-jiidashada, iwm.)	Badanaa waxaa lagu fuliyaa heerkul sare iyo faakuum/jawi	Ka ilaali doomaha garaafka iyo saxaaradda oksaydhka ama daxalka
Gaadhi qaade/wafer (wax ka qabashada wafer)	Saldhig garaafyada wareejinta ama taageerada wafer	Iska yaree daadinta walxaha iskana ilaali wasakheynta xiriirka
Qaybaha qolka ALD	Si isdaba joog ah oo sax ah u xakameey kaydinta lakabka atomiga	Dahaarku wuxuu ilaaliyaa qolka nadiifka ah wuxuuna leeyahay caabbinta daxalka sare ee hor-yaasha

Waa maxay sababta VET Energy u doorato?

VET Energy waa soo saaraha hormuudka ah, hal-abuure iyo hogaamiyaha alaabada daahan SiC ee Shiinaha, alaabada ugu weyn ee SiC waxaa ka mid ahqaade wafer oo leh daahan SiC, SiC dahaarka lehsusceptor epitaxial, SiC dahaarka garaafyada, Qaybaha badh-moon oo leh daahan SiC, Isku darka kaarboon-kaarboon ee dahaarka leh ee SiC, Doonta wafer ee dahaarka leh ee SiC, Kuleyliyaha dahaarka leh ee SiCVET Tamarta waxaa ka go'an in ay siiso warshadaha semiconductor-ka tignoolajiyada ugu dambeeya iyo xalalka badeecada, waxayna taageertaa adeegyada habaynta. Waxaan si daacad ah u rajeyneynaa inaan noqono lammaanahaaga muddada-dheer ee Shiinaha.