Menene bambanci tsakanin PECVD da LPCVD a cikin kayan aikin CVD na semiconductor?

Tacewar tururin sinadarai (CVD) yana nufin tsarin sanya wani fim mai ƙarfi a saman siliconwafer ɗin waferta hanyar sinadaran da ke cikin cakuda iskar gas. Dangane da yanayin amsawa daban-daban (matsi, abin da ke haifar da shi), ana iya raba shi zuwa nau'ikan kayan aiki daban-daban.

Waɗanne matakai ake amfani da waɗannan na'urori guda biyu?

PECVDKayan aiki (Plasma Enhanced) sune mafi yawa kuma ana amfani da su sosai, ana amfani da su a cikin OX, Nitride, ƙofar ƙarfe, amorphous carbon, da sauransu; yawanci ana amfani da LPCVD (Ƙarancin Wuta) a cikin Nitride, poly, da TEOS.
Menene ƙa'idar?
PECVD- wani tsari ne da ya haɗu da makamashin plasma da CVD daidai. Fasahar PECVD tana amfani da ƙaramin plasma don haifar da fitar haske a cathode na ɗakin aiwatarwa (watau, tiren samfurin) a ƙarƙashin ƙaramin matsin lamba. Wannan fitar haske ko wani na'urar dumama zai iya ɗaga zafin samfurin zuwa matakin da aka riga aka tsara, sannan ya gabatar da adadin iskar gas mai sarrafawa. Wannan iskar gas ɗin yana fuskantar jerin halayen sinadarai da plasma, kuma a ƙarshe ya samar da wani fim mai ƙarfi a saman samfurin.

LPCVD - An tsara ajiyar tururin sinadarai mai ƙarancin matsin lamba (LPCVD) don rage matsin lamba na iskar gas mai amsawa a cikin reactor zuwa kimanin 133Pa ko ƙasa da haka.

Menene halayen kowannensu?

PECVD - Tsarin da ya haɗu da makamashin plasma da CVD daidai: 1) Aikin ƙarancin zafin jiki (guje wa lalacewar yanayin zafi mai yawa ga kayan aiki); 2) Girman fim cikin sauri; 3) Ba a son kayan aiki, OX, Nitride, ƙofar ƙarfe, carbon mara tsari duk suna iya girma; 4) Akwai tsarin sa ido a ciki, wanda zai iya daidaita girke-girke ta hanyar sigogin ion, ƙimar kwararar iskar gas, zafin jiki da kauri fim.
LPCVD - Fina-finan siriri da LPCVD ta ajiye za su sami ingantaccen ɗaukar matakai, ingantaccen tsarin tsari da kuma sarrafa su, yawan ajiyar kaya da fitarwa. Bugu da ƙari, LPCVD ba ya buƙatar iskar gas mai ɗaukar kaya, don haka yana rage tushen gurɓataccen barbashi sosai kuma ana amfani da shi sosai a masana'antar semiconductor mai ƙima don adana fim ɗin siriri.

 

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