Te whakatakotoranga o te kohu matū (CVD) e pā ana ki te tukanga o te whakatakoto i tētahi kiriata totoka ki runga i te mata o te siliconpapamā te tauhohenga matū o te ranunga hau. E ai ki ngā āhuatanga tauhohenga rerekē (pēhanga, mua), ka taea te wehewehe ki ngā tauira taputapu rerekē.
He aha ngā tukanga e whakamahia ai ēnei taputapu e rua?
PECVDKo ngā taputapu (Plasma Enhanced) te mea tino maha, ā, ko te mea tino whakamahia, e whakamahia ana i roto i te OX, te Nitride, te keti whakarewa, te waro koretake, me ētahi atu; ko te LPCVD (Low Power) te mea e whakamahia ana i roto i te Nitride, te poly, me te TEOS.
He aha te kaupapa?
PECVD - he tukanga e whakakotahi pai ana i te pūngao plasma me te CVD. Ka whakamahia e te hangarau PECVD te plasma pāmahana-iti hei whakaputa i te tukunga kanapa i te cathode o te rūma tukanga (arā, te paepae tauira) i raro i te pēhanga iti. Ka taea e tēnei tukunga kanapa, e tētahi atu taputapu whakamahana rānei te whakaara ake i te pāmahana o te tauira ki tētahi taumata kua whakaritea, kātahi ka whakauru i tētahi nui o te hau tukanga kua whakahaeretia. Ka pāngia tēnei hau e tētahi raupapa o ngā tauhohenga matū me te plasma, ā, ka mutu, ka hangaia he kiriata totoka ki runga i te mata o te tauira.
LPCVD - Ko te whakatakoto kohu matū pēhanga-iti (LPCVD) he mea hanga hei whakaiti i te pēhanga whakahaere o te hau tauhohenga i roto i te tauhohenga ki te 133Pa, iti iho rānei.
He aha ngā āhuatanga o ia mea?
PECVD - He tukanga e whakakotahi pai ana i te pūngao plasma me te CVD: 1) Te mahi pāmahana-iti (te karo i te kino o te pāmahana teitei ki ngā taputapu); 2) Te tipu tere o te kiriata; 3) Kāore e whiriwhiri i ngā rauemi, ka taea te tipu OX, Nitride, keti whakarewa, waro kore-ahua; 4) He pūnaha aroturuki kei roto, ka taea te whakarite i te tohutao mā roto i ngā tawhā katote, te tere rere o te hau, te pāmahana me te matotoru o te kiriata.
LPCVD - Ka pai ake te hipoki o ngā takahanga o ngā kiriata angiangi i whakatakotoria e te LPCVD, ka pai ake te whakahaere i te hanganga me te hanganga, ka tere te whakatakotoranga me te putanga. Hei tāpiri, kāore e hiahiatia e te LPCVD te hau kawe, nō reira ka tino whakaitihia te pūtake o te parahanga matūriki, ā, ka whakamahia whānuitia i roto i ngā ahumahi haurua-ā-ira nui te uara tāpiri mō te whakatakotoranga kiriata angiangi.
Nau mai haere mai ki te toro mai ki a mātou mō ētahi atu kōrerorero, mai i ngā kiritaki katoa o te ao!
https://www.vet-china.com/
https://www.vet-china.com/cvd-coating/
https://www.vet-china.com/silicon-carbide-sic-ceramic/
Te wā tuku: Hurae-24-2024