Uyini umehluko phakathi kwe-PECVD ne-LPCVD emishinini ye-semiconductor CVD?

Ukufakwa komphunga wamakhemikhali (I-CVD) kubhekisela enkambisweni yokufaka ifilimu eqinile ebusweni be-siliconi-waferngokusebenzisa ukusabela kwamakhemikhali kwengxube yegesi. Ngokwezimo ezahlukene zokusabela (ingcindezi, isandulela), ingahlukaniswa ngamamodeli emishini ahlukahlukene.

Yiziphi izinqubo ezisetshenziswa la madivayisi amabili?

I-PECVDImishini (Plasma Enhanced) iyona eminingi kakhulu futhi esetshenziswa kakhulu, esetshenziswa ku-OX, Nitride, metal gate, amorphous carbon, njll.; i-LPCVD (Low Power) ivame ukusetshenziswa ku-Nitride, poly, TEOS.
Iyini isimiso?
I-PECVD - inqubo ehlanganisa kahle amandla e-plasma kanye ne-CVD. Ubuchwepheshe be-PECVD busebenzisa i-plasma ephansi yokushisa ukuze kukhishwe ukukhanya ku-cathode yegumbi lenqubo (okungukuthi, ithreyi yesampula) ngaphansi kwengcindezi ephansi. Lokhu kukhishwa kokukhanya noma enye idivayisi yokushisa kungakhuphula izinga lokushisa lesampula liye ezingeni elinqunyiwe, bese kwethula inani elilawulwayo legesi yenqubo. Le gesi idlula ochungechungeni lwezimpendulo zamakhemikhali kanye ne-plasma, futhi ekugcineni yakha ifilimu eqinile ebusweni besampula.

I-LPCVD - Ukufakwa komphunga wamakhemikhali okucindezela okuphansi (i-LPCVD) kuklanyelwe ukunciphisa ingcindezi yokusebenza kwegesi yokusabela ku-reactor ibe cishe yi-133Pa noma ngaphansi.

Yiziphi izici zalo ngalinye?

I-PECVD - Inqubo ehlanganisa kahle amandla e-plasma kanye ne-CVD: 1) Ukusebenza kwezinga lokushisa eliphansi (ukugwema umonakalo wokushisa okuphezulu emishinini); 2) Ukukhula okusheshayo kwefilimu; 3) Ukungakhethi ngezinto zokwakha, i-OX, i-Nitride, isango lensimbi, ikhabhoni engenasimo konke kungakhula; 4) Kukhona uhlelo lokuqapha olungaphakathi, olungalungisa iresiphi ngamapharamitha e-ion, izinga lokugeleza kwegesi, izinga lokushisa kanye nobukhulu befilimu.
I-LPCVD - Amafilimu amancane afakwe yi-LPCVD azoba nokumbozwa okungcono kwezinyathelo, ukwakheka okuhle kanye nokulawulwa kwesakhiwo, izinga eliphezulu lokufakwa kanye nokukhishwa. Ngaphezu kwalokho, i-LPCVD ayidingi igesi yokuthwala, ngakho-ke inciphisa kakhulu umthombo wokungcola kwezinhlayiya futhi isetshenziswa kabanzi ezimbonini ze-semiconductor ezinenani eliphezulu lokufakwa kwefilimu encane.

 

Yamukela noma yimaphi amakhasimende avela emhlabeni wonke ukuthi asivakashele ukuze sixoxe kabanzi!

https://www.vet-china.com/

https://www.vet-china.com/cvd-coating/

https://www.vet-china.com/silicon-carbide-sic-ceramic/