Ndeupi musiyano uripo pakati pePECVD neLPCVD mumidziyo yeCVD yesemiconductor?

Kuiswa kwemhepo yemakemikari (CVD) zvinoreva maitiro ekuisa firimu rakasimba pamusoro pesiliconchifukidzirokuburikidza nekuita kwemakemikari kwemusanganiswa wegasi. Zvichienderana nemamiriro akasiyana ekuita (kumanikidzwa, precursor), inogona kukamurwa kuita mhando dzakasiyana dzemidziyo.

Midziyo iyi miviri inoshandiswa pakuita mabasa api?

PECVDMidziyo (Plasma Enhanced) ndiyo inonyanya kushandiswa uye inoshandiswa zvakanyanya, inoshandiswa muOX, Nitride, metal gate, amorphous carbon, nezvimwewo; LPCVD (Low Power) inowanzo shandiswa muNitride, poly, TEOS.
Chii chiri musimboti wacho?
PECVD - maitiro anobatanidza simba replasma neCVD zvakakwana. Tekinoroji yePECVD inoshandisa plasma inodziya zvishoma kuti ibudise chiedza pa cathode yekamuri re process (kureva, sample tray) pasi pekumanikidzwa kwakaderera. Kubuda kwechiedza uku kana chimwe chinhu chinodziya kunogona kukwidza tembiricha yemuenzaniso kusvika padanho rakatarwa, uye wobva waunza huwandu hwakarongwa hwe process gasi. Gasi iri rinopinda muzviitiko zvakasiyana-siyana zvemakemikari neplasma, uye pakupedzisira rinoumba firimu rakasimba pamusoro pemuenzaniso.

LPCVD - Kuiswa kwemhepo ine simba shoma (LPCVD) kwakagadzirirwa kuderedza kumanikidzwa kwegasi rinoita basa mureactor kusvika pa133Pa kana pasi.

Ndezvipi hunhu hwechimwe nechimwe?

PECVD - Maitiro anobatanidza zvakakwana simba replasma neCVD: 1) Kushanda kwekupisa kwakaderera (kudzivirira kukuvara kwekupisa kwakanyanya kumidziyo); 2) Kukura nekukurumidza kwefirimu; 3) Kusasarudza zvinhu, OX, Nitride, gate resimbi, kabhoni isina morphous zvese zvinogona kukura; 4) Kune sisitimu yekutarisa iri mukati, iyo inogona kugadzirisa resipi kuburikidza ne ion parameters, gas flow rate, tembiricha uye ukobvu hwefirimu.
LPCVD - Mafirimu matete anoiswa neLPCVD achava nematanho ari nani ekuvhara, kuumbwa kwakanaka uye kudzora chimiro, mwero wepamusoro wekuisa uye kubuda. Pamusoro pezvo, LPCVD haidi gasi rinotakura, saka inoderedza zvakanyanya kusvibiswa kwezvikamu uye inoshandiswa zvakanyanya mumaindasitiri e semiconductor ane kukosha kwakanyanya kwekuisa firimu diki.

 

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