Yintoni umahluko phakathi kwe-PECVD kunye ne-LPCVD kwizixhobo ze-semiconductor CVD?

Ukufakwa komphunga weekhemikhali (I-CVD) ibhekisa kwinkqubo yokufaka ifilimu eqinileyo phezu komphezulu wesiliconi-waferngokusebenzisa i-chemical reaction yomxube wegesi. Ngokweemeko ezahlukeneyo ze-reaction (uxinzelelo, i-precursor), inokwahlulwa ibe ziimodeli ezahlukeneyo zezixhobo.

Zeziphi iinkqubo ezisetyenziswa kwezi zixhobo zimbini?

I-PECVDIzixhobo (zePlasma Enhanced) zezona zininzi kwaye zisetyenziswa kakhulu, zisetyenziswa kwi-OX, iNitride, isango lesinyithi, ikhabhoni engenasimo, njl.njl.; i-LPCVD (iLow Power) idla ngokusetyenziswa kwiNitride, ipoly, iTEOS.
Yintoni umgaqo?
I-PECVD-yinkqubo edibanisa ngokugqibeleleyo amandla e-plasma kunye ne-CVD. Itekhnoloji ye-PECVD isebenzisa i-plasma enobushushu obuphantsi ukukhuthaza ukukhutshwa kokukhanya kwi-cathode yegumbi lenkqubo (oko kukuthi, itreyi yesampuli) phantsi koxinzelelo oluphantsi. Olu kukhutshwa kokukhanya okanye esinye isixhobo sokufudumeza sinokunyusa ubushushu besampuli ukuya kwinqanaba elimiselweyo, size emva koko singenise ubungakanani obulawulwayo begesi yenkqubo. Le gesi idlula kuthotho lweempendulo zeekhemikhali kunye ne-plasma, kwaye ekugqibeleni yenza ifilimu eqinileyo kumphezulu wesampuli.

I-LPCVD - Ukufakwa komphunga wekhemikhali ophantsi koxinzelelo (i-LPCVD) kwenzelwe ukunciphisa uxinzelelo lokusebenza kwegesi yokusabela kwi-reactor ukuya malunga ne-133Pa okanye ngaphantsi.

Zithini iimpawu zalo ngalinye?

I-PECVD - Inkqubo edibanisa ngokugqibeleleyo amandla e-plasma kunye ne-CVD: 1) Ukusebenza ngobushushu obuphantsi (ukuthintela ukonakala kobushushu obuphezulu kwizixhobo); 2) Ukukhula kwefilimu ngokukhawuleza; 3) Ukungakhethi cala ngezinto, i-OX, i-Nitride, isango lesinyithi, ikhabhoni engenasimo zonke zinokukhula; 4) Kukho inkqubo yokubeka esweni kwindawo, enokulungisa iresiphi ngokusebenzisa iiparameter ze-ion, izinga lokuhamba kwegesi, ubushushu kunye nobukhulu befilimu.
I-LPCVD - Iifilimu ezincinci ezifakwe yi-LPCVD ziya kuba nokugubungela okungcono kwamanyathelo, ukwakheka okuhle kunye nolawulo lwesakhiwo, izinga eliphezulu lokufakwa kunye nemveliso. Ukongeza, i-LPCVD ayifuni igesi yokuthwala, ngoko ke inciphisa kakhulu umthombo wongcoliseko lwamasuntswana kwaye isetyenziswa kakhulu kumashishini e-semiconductor anexabiso eliphezulu lokufakwa kwefilimu encinci.

 

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