Kedu ihe dị iche n'etiti PECVD na LPCVD na akụrụngwa CVD semiconductor?

Ndobe anwụrụ kemịkalụ (CVD) na-ezo aka na usoro nke itinye ihe nkiri siri ike n'elu siliconwafersite na mmeghachi omume kemịkalụ nke ngwakọta gas. Dịka ọnọdụ mmeghachi omume dị iche iche si dị (nrụgide, ihe mmalite), enwere ike kewaa ya n'ụdị ngwaọrụ dị iche iche.

Kedu usoro eji ngwaọrụ abụọ a eme?

PECVDNgwa (Plasma Enhanced) bụ nke kachasị dị ọtụtụ ma a na-ejikarị eme ihe, a na-eji ya na OX, Nitride, ọnụ ụzọ ígwè, amorphous carbon, wdg; a na-ejikarị LPCVD (Low Power) eme ihe na Nitride, poly, na TEOS.
Gịnị bụ ụkpụrụ ahụ?
PECVD - usoro nke na-ejikọta ike plasma na CVD nke ọma. Teknụzụ PECVD na-eji plasma dị ala iji mee ka mwepụta ìhè na cathode nke ụlọ ọrụ ahụ (ya bụ, tray sample) n'okpuru obere nrụgide. Mwepụ ọkụ a ma ọ bụ ngwaọrụ ọzọ na-ekpo ọkụ nwere ike ibuli okpomọkụ nke ihe nlele ahụ ruo n'ọkwa edobere, wee webata oke gas usoro a na-achịkwa. Gas a na-enweta usoro mmeghachi omume kemịkalụ na plasma, ma mechaa mepụta ihe nkiri siri ike n'elu ihe nlele ahụ.

LPCVD - Emebere itinye ihe nchekwa kemịkalụ dị ala (LPCVD) iji belata nrụgide ọrụ nke gas mmeghachi omume dị na reactor ruo ihe dị ka 133Pa ma ọ bụ ihe na-erughị ya.

Kedu ihe bụ njirimara nke ọ bụla?

PECVD - Usoro nke jikọtara ike plasma na CVD nke ọma: 1) Ọrụ okpomọkụ dị ala (zere mmebi okpomọkụ dị elu na akụrụngwa); 2) Mmụba ngwa ngwa nke ihe nkiri; 3) Anaghị ahọrọ ihe, OX, Nitride, ọnụ ụzọ ígwè, carbon amorphous niile nwere ike itolite; 4) E nwere sistemụ nlekota n'ime ebe, nke nwere ike ịgbanwe uzommeputa site na paramita ion, ọnụego mmiri gas, okpomọkụ na ọkpụrụkpụ ihe nkiri.
LPCVD - Ihe nkiri dị gịrịgịrị nke LPCVD na-etinye ga-enwe mkpuchi nzọụkwụ ka mma, njikwa nhazi na nhazi dị mma, ọnụego nkwụnye na mmepụta dị elu. Na mgbakwunye, LPCVD anaghị achọ gas ebu, yabụ ọ na-ebelata isi iyi nke mmetọ ihe dị iche iche ma a na-ejikarị ya eme ihe n'ụlọ ọrụ semiconductor agbakwunyere uru dị ukwuu maka itinye ihe nkiri dị gịrịgịrị.

 

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