Ni irihe tandukaniro riri hagati ya PECVD na LPCVD mu bikoresho bya semiconductor CVD?

Gushyira umwuka w'ibinyabutabire mu kirere (CVD) bivuga inzira yo gushyira firime ikomeye ku buso bwa siliconagace gatobinyuze mu buryo bw'imiti buvangwa n'umwuka. Dukurikije imiterere itandukanye y'uburyo ibintu bigenda (umuvuduko, icyabanjirije), ishobora kugabanywamo ibikoresho bitandukanye.

Ni izihe nzira ibi bikoresho byombi bikoreshwa?

PECVDIbikoresho (Plasma Enhanced) ni byo byinshi kandi bikunze gukoreshwa, bikoreshwa muri OX, Nitride, metal gate, amorphous carbon, nibindi; LPCVD (Ingufu nke) ikoreshwa muri Nitride, poly, TEOS.
Ihame ni irihe?
PECVD- ni inzira ihuza neza ingufu za plasma na CVD. Ikoranabuhanga rya PECVD rikoresha plasma y'ubushyuhe buke kugira ngo ritume urumuri rusohoka kuri cathode y'icyumba cy'imikorere (ni ukuvuga agasanduku k'icyitegererezo) munsi y'umuvuduko muke. Iyi mashini isohora urumuri cyangwa ikindi gikoresho gishyushya ishobora kuzamura ubushyuhe bw'icyitegererezo kugeza ku rwego rwagenwe, hanyuma igashyiramo ingano ya gazi igenzurwa. Iyi gazi inyura mu buryo butandukanye bwa shimi na plasma, hanyuma igakora filime ikomeye ku buso bw'icyitegererezo.

LPCVD - Gushyira umwuka mu kirere mu buryo buciriritse (LPCVD) byagenewe kugabanya umuvuduko w'umwuka ukoreshwa mu cyuma kiwutera umwuka kugeza kuri 133Pa cyangwa munsi yacyo.

Ni ibihe biranga buri kimwe muri ibyo?

PECVD - Uburyo buhuza neza ingufu za plasma na CVD: 1) Gukora mu bushyuhe buke (kwirinda kwangirika kw'ubushyuhe bwinshi ku bikoresho); 2) Gukura vuba kwa firime; 3) Kudahitamo ibikoresho, OX, Nitride, icyuma, karuboni idafite imvange byose bishobora gukura; 4) Hariho uburyo bwo kugenzura ibintu mu buryo busanzwe, bushobora guhindura uburyo bwo kubikoresha binyuze mu bipimo bya iyoni, umuvuduko w'amazi asohoka, ubushyuhe n'ubugari bwa firime.
LPCVD - Filimi ntoya zibikwa na LPCVD zizaba zifite uburyo bwo gutwikira intambwe neza, kugenzura imiterere n'imiterere, umuvuduko wo gushyiramo umwuka n'umusaruro mwinshi. Byongeye kandi, LPCVD ntikenera umwuka utwara ibintu, bityo igabanya cyane inkomoko y'uduce duto tw'imyuka kandi ikoreshwa cyane mu nganda za semiconductor zifite agaciro kanini mu gushyiramo filime ntoya.

 

Murakaza neza abakiriya bose baturutse impande zose z'isi baza kudusura kugira ngo tuganireho byinshi!

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