Kodi kusiyana pakati pa PECVD ndi LPCVD pazida za CVD za semiconductor ndi kotani?

Kuyika kwa nthunzi ya mankhwala (Matenda a mtima (CVD)) amatanthauza njira yoyika filimu yolimba pamwamba pa siliconchikwama cha mkatekudzera mu reaction ya mankhwala ya mpweya wosakaniza. Malinga ndi mikhalidwe yosiyanasiyana ya reaction (kupanikizika, precursor), ikhoza kugawidwa m'mitundu yosiyanasiyana ya zida.

Kodi zipangizo ziwirizi zimagwiritsidwa ntchito pa njira ziti?

PECVDZipangizo za (Plasma Enhanced) ndizo zambiri komanso zomwe zimagwiritsidwa ntchito kwambiri, zomwe zimagwiritsidwa ntchito mu OX, Nitride, metal gate, amorphous carbon, ndi zina zotero; LPCVD (Low Power) nthawi zambiri imagwiritsidwa ntchito mu Nitride, poly, TEOS.
Kodi mfundo yake ndi iti?
PECVD - njira yomwe imaphatikiza bwino mphamvu ya plasma ndi CVD. Ukadaulo wa PECVD umagwiritsa ntchito plasma yotsika kutentha kuti ipangitse kutuluka kwa kuwala pa cathode ya chipinda chogwirira ntchito (monga, thireyi ya chitsanzo) pansi pa kupanikizika kochepa. Kutuluka kwa kuwala kumeneku kapena chipangizo china chotenthetsera kumatha kukweza kutentha kwa chitsanzocho kufika pamlingo wokonzedweratu, kenako ndikuyambitsa kuchuluka kwa mpweya wogwirira ntchito. Mpweya uwu umadutsa muzochitika zingapo zamakemikolo ndi plasma, ndipo pamapeto pake umapanga filimu yolimba pamwamba pa chitsanzocho.

LPCVD - Kuyika mpweya wochepa (LPCVD) kumapangidwira kuchepetsa kuthamanga kwa mpweya wochitapo kanthu mu reactor kufika pa 133Pa kapena kuchepera.

Kodi khalidwe lililonse ndi lotani?

PECVD - Njira yomwe imaphatikiza bwino mphamvu ya plasma ndi CVD: 1) Kugwira ntchito kutentha kochepa (kupewa kuwonongeka kwa kutentha kwambiri kwa zida); 2) Kukula mwachangu kwa filimu; 3) Osasankha zinthu, OX, Nitride, chipata chachitsulo, kaboni wosasinthika zonse zimatha kukula; 4) Pali njira yowunikira mkati, yomwe ingasinthe njira yogwiritsira ntchito kudzera mu magawo a ion, kuchuluka kwa mpweya, kutentha ndi makulidwe a filimu.
LPCVD - Makanema owonda omwe amaikidwa ndi LPCVD adzakhala ndi njira yabwino yophimbira masitepe, kapangidwe kake ndi kuwongolera kapangidwe kake, kuchuluka kwa mafuta ofunikira komanso kutulutsa kwake. Kuphatikiza apo, LPCVD sikufuna mpweya wonyamula, motero imachepetsa kwambiri gwero la kuipitsidwa kwa tinthu tating'onoting'ono ndipo imagwiritsidwa ntchito kwambiri m'mafakitale opanga ma semiconductor omwe ali ndi phindu lalikulu poyika mafilimu owonda.

 

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