Mkpuchi SiC/Mkpuchi Graphite/Tray maka Semiconductor

Ihe mkpuchi SiC/Graphite e ji kpuchie/Tray maka Semiconductor Foto a na-egosipụta

Nkọwa Dị Mkpirikpi:

VET Energy SiC Coated Graphite Suscepter maka Epitaxial Growth bụ ngwaahịa arụmọrụ dị elu nke e mere iji nye arụmọrụ na-adịgide adịgide na nke a pụrụ ịtụkwasị obi ruo ogologo oge. Ọ nwere ezigbo iguzogide okpomọkụ na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, iguzogide mbuze, na-eme ka ọ bụrụ ihe ngwọta zuru oke maka ngwa nhazi wafer.

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Nkọwa Ngwaahịa

Akara Ngwaahịa

Mkpuchi SiC/mkpuchi nke ihe na-egbochi graphite maka semiconductor

IheIhe mejupụtara graphite a kpụchara SiCbụ ngwọta siri ike ma dị irè nke e mere iji mezuo ihe siri ike nke ụlọ ọrụ nhazi semiconductor. Nwere akwa dị ọcha dị elumkpuchi silicon carbide (SiC), ihe a na-enye nkwụsi ike okpomọkụ pụrụ iche, iguzogide oxidation, na ndụ ọrụ ogologo oge, na-eme ka ọ dị mma maka ojiji na usoro MOCVD, ndị na-ebu wafer graphite, na gburugburu okpomọkụ ndị ọzọ dị elu.

Atụmatụ:
· Ezigbo Nguzogide Mgbu Ọkụ
· Ezigbo Nguzogide Mgbu Ahụ
· Nguzogide Kemịkalụ Dị Mma
· Ọcha Dị Elu nke Ukwuu
· Ọdịdị dị n'ụdị dị mgbagwoju anya
· A na-eji ya n'okpuru ikuku Oxidizing

Ngwa:

Atụmatụ na Uru Ngwaahịa:

1. Nguzogide Okpomọkụ Kachasị Elu:Na ịdị ọcha dị eluMkpuchi SiC, ihe mejupụtara ahụ na-eguzogide oke okpomọkụ, na-ahụ na arụmọrụ na-aga n'ihu n'ebe siri ike dịka mmepụta epitaxy na semiconductor.

2. Ogologo Oge Kachasị Elu:E mere ihe ndị e ji graphite kpuchie SiC ka ha ghara imebi kemịkalụ na oxidation, na-eme ka ndụ substrate dịkwuo mma ma e jiri ya tụnyere ihe ndị e ji graphite mee.

3. Graphite e ji Vitreous kpuchie:Ọdịdị pụrụ iche nke vitreous nkeMkpuchi SiCna-enye ezigbo ike elu, na-ebelata iyi na ndọda n'oge nhazi okpomọkụ dị elu.

4. Mkpuchi SiC Dị Ọcha Dị Elu:Ihe anyị na-eme ka mmetọ dị obere na usoro semiconductor dị nro, na-enye ntụkwasị obi maka ụlọ ọrụ ndị chọrọ ịdị ọcha siri ike.

5. Ngwa Ahịa N'ogbe:IheIhe na-egbochi graphite nke SiCAhịa na-aga n'ihu na-eto ka ọchịchọ maka ngwaahịa mkpuchi SiC dị elu na mmepụta semiconductor na-abawanye, na-etinye ihe a dị ka ihe dị mkpa na ahịa ebufe graphite wafer na ahịa tray graphite mkpuchi silicon carbide.

Àgwà ndị a na-ahụkarị nke ihe e ji graphite mee:

Njupụta Dị Anya:	1.85 g/cm3
Nguzogide eletriki:	11 μΩm
Ike nke Flexural:	49 MPa (500kgf/cm2)
Ike nke Oké Osimiri:	58
Ash:	<5ppm
Ọgbakọ okpomọkụ:	116 W/mK (100 kcal/mhr-℃)

CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
性质 / Ngwongwo	典型数值 / Bara uru
晶体结构 / Crystal Structure	FCC β phase 多晶，主要为（111）取向
密度 / Njupụta	3.21 g/cm³
Isi ike	2500 维氏硬度： (ibu 500g)
晶粒大小 / ọka SiZe	2 ~ 10μm
纯度 / Chemical Purity	99.99995%
热容 / Ike ọkụ	640 J·kg^-1·K^-1
升华温度 / Okpomọkụ Sublimation	2700℃
抗弯强度 / Ike Flexural	415 MPa RT isi ihe anọ
杨氏模量 / Modul nke Young's	430 GPA 4pt gbagọrọ agbagọ, 1300℃
导热系数 / Thermal Conductivity	300W·m^-1·K^-1
热膨胀系数 / Mgbasa ọkụ (CTE)	4.5 × 10^-6K^-1

VET Energy bụ ezigbo onye na-emepụta ngwaahịa graphite na silicon carbide ahaziri ahazi nke nwere mkpuchi dị iche iche dịka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon iko, mkpuchi carbon pyrolytic, wdg, nwere ike inye akụkụ dị iche iche ahaziri ahazi maka ụlọ ọrụ semiconductor na photovoltaic.

Ndị otu teknụzụ anyị sitere na ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye gị azịza ihe ọkachamara karịa.

Anyị na-emepụta usoro dị elu mgbe niile iji nye ihe ndị ka mma, anyị arụpụtakwala teknụzụ pụrụ iche nke nwere ikike pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi ahụ na ihe mkpuchi ahụ sie ike ma ghara ịdị mfe iwepụ ya.

Nabata gị nke ọma ka ị bịa leta ụlọ ọrụ mmepụta ihe anyị, ka anyị nwee mkparịta ụka ọzọ!