He aha ka uhi sic? – VET ENERGY

Silicon CarbideHe hui paʻakikī ia e loaʻa ana ka silicon a me ke kalapona, a loaʻa i ke kūlohelohe ma ke ʻano he mineral moissanite kakaikahi loa. Hiki ke hoʻopaʻa ʻia nā ʻāpana Silicon carbide ma o ka sintering e hana i nā keramika paʻakikī loa, kahi i hoʻohana nui ʻia i nā noi e koi ana i ke kūpaʻa kiʻekiʻe, ʻoi aku hoʻi i ke kaʻina semiconductor.

ʻAno kino o SiC

He aha ka uhi ʻana o SiC?

ʻO ka uhi SiC kahi uhi silicon carbide mānoanoa a kūpaʻa i ke komo ʻana me ke kūpaʻa kiʻekiʻe i ka palaho a me ka wela a me ka conductivity thermal maikaʻi loa. Hoʻohana nui ʻia kēia uhi SiC maʻemaʻe i nā ʻoihana semiconductor a me nā mea uila e pale i nā mea lawe wafer, nā kumu a me nā mea hoʻomehana mai nā wahi corrosive a me reactive. He kūpono hoʻi ka uhi SiC no nā umu vacuum a me ka hoʻomehana laʻana i nā wahi vacuum kiʻekiʻe, reactive a me oxygen.

ʻIli uhi SiC maʻemaʻe kiʻekiʻe

He aha ke kaʻina hana uhi SiC?

Ua waiho ʻia kahi papa lahilahi o ka silicon carbide ma luna o ka ʻili o ka substrate me ka hoʻohana ʻanaCVD (Hoʻokahe ʻana o ka mahu kemika)Hoʻokō pinepine ʻia ka waiho ʻana ma nā mahana o 1200-1300°C a pono e kūlike ke ʻano hoʻonui wela o ka mea substrate me ka uhi SiC e hōʻemi i ke kaumaha wela.

ʻO ke ʻano o ka aniani kiʻiʻoniʻoni CVD SIC

ʻO ke ʻano o ka ʻili aniani CVD SIC

ʻO nā waiwai kino o ka uhi SiC e hōʻike nui ʻia i kona kūpaʻa wela kiʻekiʻe, paʻakikī, kūpaʻa i ka corrosion a me ka conductivity thermal.

ʻO nā ʻano kino maʻamau penei:

PaʻakikīʻO ka maʻamau, loaʻa i ka uhi ʻana o SiC kahi paʻakikī Vickers ma ka pae o 2000-2500 HV, ka mea e hāʻawi iā lākou i ke kūpaʻa kiʻekiʻe loa i ka ʻaʻahu a me ka hopena i nā noi ʻoihana.

Ka nui o ka paʻaʻO ka maʻamau, ʻo ka nui o nā uhi SiC he 3.1-3.2 g/cm³. ʻO ke kiʻekiʻe o ka nui e kōkua i ka ikaika mechanical a me ke kūpaʻa o ka uhi.

Ka hoʻokele wela: Loaʻa i nā uhi SiC kahi conductivity thermal kiʻekiʻe, maʻamau ma ka pae o 120-200 W/mK (ma 20°C). Hāʻawi kēia iā ia i ka conductivity thermal maikaʻi i nā wahi mahana kiʻekiʻe a kūpono loa ia no nā lako hana wela i ka ʻoihana semiconductor.

Kiko heheʻeʻO ka silicon carbide kahi kiko heheʻe ma kahi o 2730°C a he kūpaʻa wela maikaʻi loa ia ma nā mahana wela loa.

Ka helu o ka hoʻonui welaHe haʻahaʻa ka coefficient linear o ka hoʻonui wela (CTE) o nā uhi SiC, maʻamau ma ka pae o 4.0-4.5 µm/mK (ma ka 25-1000 ℃). ʻO ke ʻano kēia he maikaʻi loa kona kūpaʻa dimensional ma luna o nā ʻokoʻa mahana nui.

Ke kū'ē ʻana i ka palahoHe kūpaʻa loa nā uhi SiC i ka pala i nā wahi waikawa ikaika, alkali a me nā wahi oxidizing, ʻoiai ke hoʻohana ʻana i nā waikawa ikaika (e like me HF a i ʻole HCl), ʻoi aku ka nui o ko lākou kūpaʻa i ka pala ma mua o nā mea metala maʻamau.

ʻO ka substrate noi uhi SiC

Hoʻohana pinepine ʻia ka uhi ʻana o SiC e hoʻomaikaʻi i ke kūpaʻa ʻana i ka pala, ke kūpaʻa wela kiʻekiʻe, a me ke kūpaʻa ʻana i ka pale ʻana o ka plasma o ka substrate. ʻO nā substrates noi maʻamau e komo pū me kēia:

ʻAno substrate	Kumu noi	Hoʻohana maʻamau
Graphite	- Hoʻolālā māmā, conductivity wela maikaʻi - Akā hiki ke hoʻopōʻino maʻalahi ʻia e ka plasma, pono ka pale ʻana o ka uhi SiC	Nā ʻāpana keʻena hakahaka, nā waʻa graphite, nā pā etching plasma, a pēlā aku.
Quartz (Quartz/SiO₂)	- Maʻemaʻe kiʻekiʻe akā maʻalahi ka palaho - Hoʻonui ka uhi ʻana i ke kūpaʻa o ka erosion plasma	Nā ʻāpana keʻena CVD/PECVD
Nā keramika (e like me ka alumina Al₂O₃)	- Ikaika kiʻekiʻe a me ke kūkulu paʻa - Hoʻomaikaʻi ka uhi ʻana i ke kūpaʻa ʻana o ka ʻili i ka pala	Ka uhi ʻana o ke keʻena, nā mea paʻa, a pēlā aku.
nā metala (e like me ka titanium, molybdenum, a me nā mea ʻē aʻe)	- Maikaʻi ka hoʻokele wela akā maikaʻi ʻole ke kūpaʻa ʻana i ka palaho - Hoʻomaikaʻi ka uhi ʻana i ke kūpaʻa o ka ʻili	Nā ʻāpana hana hana kūikawā
Kino sintered silikona carbide (SiC nui)	- No nā wahi me nā koi kiʻekiʻe no nā kūlana hana paʻakikī - Hoʻomaikaʻi hou ka uhi ʻana i ka maʻemaʻe a me ke kūpaʻa i ka palaho	Nā ʻāpana keʻena CVD/ALD kiʻekiʻe

Hoʻohana pinepine ʻia nā huahana i uhi ʻia ʻo SiC ma nā wahi semiconductor ma lalo nei

Hoʻohana nui ʻia nā huahana uhi SiC i ka hana semiconductor, ʻoi aku hoʻi i ka mahana kiʻekiʻe, ka palaho kiʻekiʻe a me nā wahi plasma ikaika. Eia kekahi mau kaʻina hana noi nui a i ʻole nā kahua a me nā wehewehe pōkole:

Kaʻina hana noi/kahua	Wehewehe pōkole	Hana uhi ʻana o Silicon Carbide
Ke kālai ʻana i ka plasma (Kī ʻana)	E hoʻohana i nā kinoea fluorine a i ʻole chlorine no ka hoʻoili ʻana i ke ʻano	E kū'ē i ka erosion plasma a pale i ka haumia o nā ʻāpana a me nā metala
Ka waiho ʻana o ka mahu kemika (CVD/PECVD)	Ka waiho ʻana o ka oxide, nitride a me nā kiʻiʻoniʻoni lahilahi ʻē aʻe	E kū'ē i nā kinoea mua corrosive a hoʻonui i ke ola o nā ʻāpana
Keʻena hoʻokaʻawale mahu kino (PVD)	Ka hoʻopōʻino ʻana o nā ʻāpana ikehu kiʻekiʻe i ka wā o ke kaʻina hana uhi	E hoʻomaikaʻi i ke kūpaʻa ʻana o ka erosion a me ke kūpaʻa wela o ke keʻena hopena
Ke kaʻina hana MOCVD (e like me ka ulu ʻana o ka epitaxial SiC)	Ka hopena lōʻihi ma lalo o ke ana wela kiʻekiʻe a me ka lewa hydrogen corrosive kiʻekiʻe	E mālama i ke kūpaʻa o nā lako a pale i ka haumia o nā kristal e ulu ana
Ke kaʻina hana mālama wela (LPCVD, diffusion, annealing, etc.)	Hana pinepine ʻia ma ke kiʻekiʻe o ka mahana a me ka vacuum/ea	E pale i nā waʻa graphite a me nā pā mai ka oxidation a i ʻole ka pala
Mea lawe wafer/chuck (lawelawe wafer)	Kumu graphite no ka hoʻoili wafer a i ʻole ke kākoʻo	E hōʻemi i ka hoʻokahe ʻana o nā ʻāpana a pale i ka haumia pili
Nā ʻāpana keʻena ALD	E kāohi pinepine a pololei i ka waiho ʻana o ka papa atomika	Mālama ka uhi ʻana i ke keʻena i ka maʻemaʻe a loaʻa iā ia ke kūpaʻa kiʻekiʻe i ka pala i nā precursors

No ke aha e koho ai iā VET Energy?

ʻO VET Energy kahi mea hana alakaʻi, mea hana hou a me ke alakaʻi o nā huahana uhi SiC ma Kina, ʻo nā huahana uhi SiC nui e komo pū anamea lawe wafer me ka uhi SiC, ʻuhi ʻia ʻo SiCmea hoʻopaʻa epitaxial, Apo graphite i uhi ʻia me SiC, Nā ʻāpana mahina hapa me ka uhi ʻana o SiC, ʻO ka hui kalapona-kalapona i uhi ʻia me SiC, Waʻa wafer i uhi ʻia me SiC, Mea hoʻomehana i uhi ʻia ʻo SiC, a pēlā aku. Ua kūpaʻa ʻo VET Energy i ka hāʻawi ʻana i ka ʻoihana semiconductor me ka ʻenehana hope loa a me nā hopena huahana, a kākoʻo i nā lawelawe hoʻopilikino. Ke kakali nui nei mākou i ka lilo ʻana i hoa lōʻihi nou ma Kina.