Wafer epitaxial girma ana samun ta hanyar karfe Organic sinadaran tururi jijiya (MOCVD) fasaha, a cikin abin da matsananci-tsarkake iskar gas ana allura a cikin reactor da finely metered, sabõda haka, su hadu a high yanayin zafi haifar da sinadaran interactions da aka ajiye a kan semiconductor wafers a cikin bakin ciki atomic yadudduka don samar da fili epitaxy na kayan.
A cikin kayan aiki na CVD, ba za a iya sanya substrate kai tsaye a kan ƙarfe ko kawai a kan tushe don ƙaddamar da epitaxial, saboda abubuwa da yawa za su shafi shi. Sabili da haka, ana buƙatar mai ɗaukar hoto ko tire don riƙe ƙasa, sa'an nan kuma amfani da fasahar CVD don yin jigilar epitaxial a kan ma'auni. Wannan susceptor ne aMOCVD graphite susceptor(kuma ake kiraMOCVD graphite tire).
Ana nuna tsarinsa a cikin hoton da ke ƙasa:
Me yasa graphite susceptor yana buƙatar murfin CVD?
Mai ɗaukar hoto na graphite yana ɗaya daga cikin mahimman abubuwan da ke cikin kayan aikin MOCVD. Shi ne mai ɗauka da dumama kashi na substrate. Siffofin ayyukansa irin su kwanciyar hankali na thermal da daidaiton thermal suna taka muhimmiyar rawa a cikin ingancin ci gaban kayan epitaxial, kuma kai tsaye ƙayyade daidaito da tsabta na kayan fim na bakin ciki na epitaxial. Saboda haka, ingancinsa kai tsaye yana rinjayar shirye-shiryen wafers na epitaxial. A lokaci guda, tare da karuwa a yawan amfani da canje-canje a cikin yanayin aiki, yana da sauƙin sawa da tsagewa, yana da amfani. Kyakkyawan halayen thermal da kwanciyar hankali na graphite suna ba shi babban fa'ida azaman tushen tushen kayan aikin MOCVD.
Duk da haka, idan graphite ne kawai mai tsabta, za a sami wasu matsaloli. A cikin tsarin samarwa, za a sami ragowar iskar gas da ƙwayoyin halitta na ƙarfe, kuma mai ɗaukar hoto zai lalata kuma ya faɗi, wanda ke rage rayuwar sabis na mai ɗaukar hoto. A lokaci guda, fadowar graphite foda kuma zai haifar da gurɓataccen gurɓataccen ruwa ga wafer, don haka waɗannan matsalolin suna buƙatar warwarewa a cikin tsarin shirye-shiryen tushe. Fasaha mai sutura na iya samar da gyaran gyare-gyaren foda, haɓaka haɓakar zafin jiki, da daidaita rarraba zafi, kuma ya zama babban fasaha don magance wannan matsala.
Dangane da yanayin aikace-aikacen da buƙatun amfani da tushe na graphite, rufin saman ya kamata ya sami halaye masu zuwa:
1. Babban yawa da cikakken ɗaukar hoto:Tushen graphite yana cikin matsanancin zafin jiki da yanayin aiki mai lalata. Dole ne a rufe farfajiyar gabaɗaya, kuma suturar dole ne ya kasance yana da ƙima mai kyau don taka rawar kariya mai kyau.
2. Kyakkyawan shimfidar fili:Tun da tushen graphite da aka yi amfani da shi don haɓakar kristal guda ɗaya yana buƙatar haɓakar shimfidar wuri mai tsayi sosai, dole ne a kiyaye ƙayyadaddun ƙayyadaddun tushe bayan an shirya abin rufewa, wato, saman rufin dole ne ya zama iri ɗaya.
3. Kyakkyawar ƙarfin haɗin gwiwa:Rage bambance-bambance a cikin ƙimar haɓakawar haɓakar thermal tsakanin ginshiƙi mai hoto da kayan shafa na iya haɓaka ƙarfin haɗin gwiwa yadda yakamata tsakanin su biyun. Bayan fuskantar hawan hawan zafi da ƙananan zafin jiki, suturar ba ta da sauƙi don fashewa.
4. High thermal conductivity:Girman guntu mai inganci yana buƙatar tushen graphite don samar da zafi mai sauri da daidaituwa, don haka kayan shafa ya kamata ya sami haɓakar thermal mai girma.
5. High narkewa batu, high zafin jiki hadawan abu da iskar shaka juriya da kuma lalata juriya:Rufin ya kamata ya iya yin aiki da ƙarfi a cikin yanayin zafi mai zafi da lalata yanayin aiki.
A thermal kwanciyar hankali, thermal uniformity da sauran ayyuka sigogi naSiC mai rufin graphite susceptortaka muhimmiyar rawa a cikin ingancin ci gaban kayan epitaxial, don haka shine ainihin maɓalli na kayan aikin MOCVD.
β-SiC (3C-SiC) nau'in crystal an zaɓi shi azaman sutura. Idan aka kwatanta da sauran nau'ikan kristal, wannan nau'in crystal yana da jerin kyawawan kaddarorin kamar kyakkyawan kwanciyar hankali na thermodynamic, juriya da iskar shaka da juriya na lalata. A lokaci guda, yana da ɗawainiyar zafi wanda ya dace da na graphite, don haka yana ba da tushe na graphite na musamman. Yana iya yadda ya kamata warware gazawar da graphite tushe lalacewa ta hanyar high-zazzabi hadawan abu da iskar shaka da kuma lalata da foda hasãra a lokacin sabis, da kuma sanya saman da graphite tushe m, ba porous, high-zazzabi resistant, anti-lalata, anti-hadawan abu da iskar shaka da sauran halaye, game da shi inganta crystal epitaxial ingancin da kuma sabis rayuwa na graphite tushe a cikin ma'auni na graphite tushe (da sabis rayuwa na graphite tushe). tanderu).
Yadda za a zabi MOCVD graphite tray/susceptor wanda ke da juriya ga babban zafin jiki da lalata?
Lokacin zabar agraphite tray ko mai ɗaukar hoto don MOCVDwanda ke da juriya ga lalatawar zafin jiki, ya kamata a yi la'akari da waɗannan mahimman abubuwan:
1. Tsaftar kayan abu:Abubuwan graphite masu tsafta na iya mafi kyawun tsayayya da lalata da iskar shaka a yanayin zafi mai yawa kuma rage tasirin ƙazanta akan tsarin jijiya.
2. Yawan yawa da rashin ƙarfi:Fayilolin graphite tare da babban yawa da ƙananan porosity suna da ingantacciyar ƙarfin inji da juriya na lalata, kuma suna iya hana shigar iskar gas yadda ya kamata da yashwar kayan.
3. Thermal conductivity:Babban thermal conductivity graphite tray yana taimakawa wajen rarraba zafi daidai gwargwado, rage damuwa na thermal, da haɓaka kwanciyar hankali da rayuwar sabis na kayan aiki.
4. Maganin saman:Fale-falen fale-falen faifan hoto waɗanda aka yi musu magani na musamman, kamar surufi ko plating, na iya ƙara haɓaka juriyar lalatarsu da juriya.
5. Girma da siffa:Dangane da ƙayyadaddun buƙatun kayan aikin MOCVD, zaɓi girman da ya dace da siffa don tabbatar da dacewa da tire tare da kayan aiki da kuma dacewa da aiki.
6. Sunan masana'anta:Zabi masana'anta tare da kyakkyawan suna da ƙwarewa mai arha don tabbatar da amincin ingancin samfur da sabis na tallace-tallace.
7. Tasirin farashi:A kan yanayin saduwa da buƙatun fasaha, la'akari da ƙimar farashi kuma zaɓi samfurori tare da ƙimar farashi mai girma.
Vet Energy ne babban mai ba da zane mai kyau, muna bayar da nau'ikan da yawa, muna iya amfani da kewayon da yawa na kayan kwalliya daban-daban, model da bayanai. TheSiC mai rufin graphite susceptorwanda VET Energy ke samarwa ba shi da wuraren tuntuɓar shafi kuma babu raunin hanyoyin haɗin gwiwa. Dangane da rayuwar sabis, za su iya biyan bukatun abokan ciniki tare da buƙatu daban-daban (ciki har da amfani da yanayin da ke ɗauke da chlorine), kuma ana maraba da abokan ciniki don tuntuɓar su da bincike.
Lokacin aikawa: Maris-01-2025