Menene tiren graphite na MOCVD?

Ana samun ci gaban wafer epitaxial ta hanyar fasahar adana tururin sinadarai na ƙarfe (MOCVD), inda ake saka iskar gas mai tsarki a cikin reactor kuma a auna ta sosai, ta yadda za su haɗu a yanayin zafi mai yawa don haifar da hulɗar sinadarai kuma a saka su a kan wafers na semiconductor a cikin ƙananan yadudduka na atomic don samar da epitaxy na kayan aiki da semiconductors masu haɗaka.

A cikin kayan aikin CVD, ba za a iya sanya substrate kai tsaye a kan ƙarfe ko kuma kawai a kan tushe don adana epitaxial ba, saboda abubuwa da yawa za su shafe shi. Saboda haka, ana buƙatar susceptor ko tire don riƙe substrate, sannan a yi amfani da fasahar CVD don yin zubar epitaxial akan substrate. Wannan susceptor ɗinMai hana graphite na MOCVD(wanda kuma ake kiraTire mai launin MOCVD).

Tsarinsa an nuna shi a cikin hoton da ke ƙasa:

Me yasa mai hana graphite yake buƙatar murfin CVD?

Mai hana graphite yana ɗaya daga cikin muhimman abubuwan da ke cikin kayan aikin MOCVD. Shi ne abin ɗaukar hoto da dumama na substrate. Sigogin aikinsa kamar kwanciyar hankali na zafi da daidaiton zafi suna taka muhimmiyar rawa a cikin ingancin haɓakar kayan epitaxial, kuma suna tantance daidaito da tsarkin kayan fim na siririn epitaxial kai tsaye. Saboda haka, ingancinsa yana shafar shirye-shiryen wafers na epitaxial kai tsaye. A lokaci guda, tare da ƙaruwar yawan amfani da canje-canje a cikin yanayin aiki, yana da sauƙin lalacewa da tsagewa, abin amfani ne. Kyakkyawan watsa wutar lantarki da kwanciyar hankali na graphite suna ba shi babban fa'ida a matsayin tushen kayan aikin MOCVD.

Duk da haka, idan graphite ne kawai, za a sami wasu matsaloli. A cikin tsarin samarwa, za a sami ragowar iskar gas mai lalata da kuma ƙarfe na halitta, kuma graphite susceptor zai lalace ya faɗi, wanda hakan ke rage tsawon rayuwar graphite susceptor sosai. A lokaci guda, faɗuwar graphite foda shi ma zai haifar da gurɓatawa ga wafer ɗin, don haka ana buƙatar magance waɗannan matsalolin a cikin tsarin shirya tushen. Fasahar rufewa na iya samar da gyara foda a saman, haɓaka watsa zafi, da daidaita rarraba zafi, kuma ta zama babbar fasahar magance wannan matsalar.

Dangane da yanayin aikace-aikacen da buƙatun amfani na tushen graphite, rufin saman yakamata ya sami halaye masu zuwa:

1. Babban yawa da cikakken ɗaukar hoto:Tushen graphite yana cikin yanayi mai zafi da kuma gurɓataccen yanayi. Dole ne a rufe saman sosai, kuma murfin dole ne ya kasance yana da kyakkyawan yawa don yin kyakkyawan aikin kariya.

2. Kyakkyawan lanƙwasa a saman:Tunda tushen graphite da ake amfani da shi don girma ɗaya na lu'ulu'u yana buƙatar madaidaicin saman sosai, dole ne a kiyaye madaidaicin tushe na asali bayan an shirya murfin, wato, saman murfin dole ne ya zama iri ɗaya.

3. Ƙarfin haɗin kai mai kyau:Rage bambancin da ke tsakanin tushen graphite da kayan shafa zai iya inganta ƙarfin haɗin kai tsakanin su biyun yadda ya kamata. Bayan fuskantar zagayen zafi mai zafi da ƙasa, murfin ba shi da sauƙin fashewa.

4. Babban ƙarfin lantarki mai zafi:Girman guntu mai inganci yana buƙatar tushen graphite don samar da zafi mai sauri da daidaito, don haka kayan shafa ya kamata su sami babban ƙarfin zafi.

5. Babban wurin narkewa, juriya ga iskar shaka mai zafi da juriya ga tsatsa:Ya kamata murfin ya yi aiki daidai a yanayin zafi mai yawa da kuma yanayin aiki mai lalata.

Daidaiton yanayin zafi, daidaiton zafi da sauran sigogin aiki na na'urarMai hana graphite mai rufi na SiCyana taka muhimmiyar rawa wajen ingancin haɓakar kayan epitaxial, don haka shine babban ɓangaren kayan aikin MOCVD.

An zaɓi siffar lu'ulu'u ta β-SiC (3C-SiC) a matsayin murfin. Idan aka kwatanta da sauran nau'ikan lu'ulu'u, wannan siffar lu'ulu'u tana da jerin kyawawan halaye kamar kyakkyawan kwanciyar hankali na thermodynamic, juriya ga iskar shaka da juriya ga tsatsa. A lokaci guda, tana da yanayin zafi wanda ya yi daidai da na graphite, don haka tana ba tushen graphite halaye na musamman. Zai iya magance gazawar tushen graphite da iskar shaka mai zafi da asarar tsatsa da foda yayin aiki, kuma ya sa saman tushen graphite ya yi kauri, mara ramuka, mai jure zafi mai yawa, mai hana tsatsa, mai hana tsatsa, mai hana tsatsa da sauran halaye, ta haka ne ke inganta ingancin epitaxial na lu'ulu'u da rayuwar sabis na tushen graphite (an auna tsawon lokacin sabis na tushen graphite mai rufi na SiC a cikin tanderu).

Yadda ake zaɓar tire/maganin shafawa na MOCVD wanda ke jure wa zafin jiki mai yawa da tsatsa?

Lokacin zabar wanigraphite tray ko mai ɗaukar hoto don MOCVDwanda ke da juriya ga tsatsa mai zafi, ya kamata a yi la'akari da waɗannan muhimman abubuwan:

1. Tsarkakakken abu:Kayan graphite masu tsabta za su iya jure wa tsatsa da iskar shaka a yanayin zafi mai yawa da kuma rage tasirin datti akan tsarin ajiya.

2. Yawan yawa da kuma ramuka:Tire-tiren graphite masu yawan yawa da ƙarancin ramuka suna da ƙarfin injina da juriya ga tsatsa, kuma suna iya hana shigar iskar gas da zaizayar kayan aiki yadda ya kamata.

3. Tsarin wutar lantarki:Tiren graphite mai yawan amfani da zafi yana taimakawa wajen rarraba zafi daidai gwargwado, rage damuwa ta zafi, da kuma inganta kwanciyar hankali da tsawon lokacin aiki na kayan aiki.

4. Maganin saman jiki:Fale-falen graphite waɗanda aka yi musu gyaran fuska na musamman, kamar su shafa ko shafa su, na iya ƙara ƙarfafa juriyarsu ta tsatsa da kuma juriyarsu ta lalacewa.

5. Girma da siffar:Dangane da takamaiman buƙatun kayan aikin MOCVD, zaɓi girman da siffar da ta dace don tabbatar da dacewa da tiren da kayan aiki da kuma sauƙin aiki.

6. Sunan masana'anta:Zaɓi masana'anta mai suna mai kyau da ƙwarewa mai kyau don tabbatar da ingancin samfura da sabis bayan tallace-tallace.

7. Inganci a Farashi:Dangane da biyan buƙatun fasaha, yi la'akari da ingancin farashi kuma zaɓi samfuran da ke da inganci mai girma.

VET Energy kamfani ne mai samar da sinadarin graphite mai tsafta, muna bayar da nau'ikan nau'ikan sinadarai daban-daban, kuma ana iya amfani da shi a cikin kayan aikin MOCVD na nau'ikan samfura, samfura da ƙayyadaddun bayanai daban-daban.Mai hana graphite mai rufi na SiCKamfanin VET Energy ne ya samar da shi, ba shi da wuraren hulɗa da juna kuma ba shi da hanyoyin haɗi masu rauni. Dangane da tsawon lokacin aiki, yana iya biyan buƙatun abokan ciniki masu buƙatu daban-daban (gami da amfani da yanayin da ke ɗauke da chlorine), kuma ana maraba da abokan ciniki su yi shawara da kuma yin tambayoyi.