Wafer epitaxial kukula zimatheka kudzera zitsulo organic mankhwala vapor deposition (MOCVD) luso, amene kopitilira muyeso-woyera mpweya jekeseni mu riyakitala ndi finely metered, kotero kuti kuphatikiza pa kutentha okwera kuchititsa kuyanjana kwa mankhwala ndi waikamo pa zopyapyala semiconductor mu zigawo woonda kwambiri atomiki pawiri kupanga epitaxy ya zipangizo ndi semiconductors.
Mu zida za CVD, gawo lapansi silingayikidwe mwachindunji pazitsulo kapena kungokhala pamaziko a epitaxial deposition, chifukwa lidzakhudzidwa ndi zinthu zambiri. Choncho, susceptor kapena thireyi chofunika kugwira gawo lapansi, ndiyeno ntchito CVD luso kupanga epitaxial deposition pa gawo lapansi. susceptor uyu ndiChothandizira cha graphite cha MOCVD(amatchedwansothireyi ya graphite ya MOCVD).
Mapangidwe ake akuwonetsedwa pachithunzi pansipa:
Chifukwa chiyani cholumikizira cha graphite chimafunikira zokutira za CVD?
Ma graphite susceptor ndi chimodzi mwazinthu zofunika kwambiri pazida za MOCVD. Ndilo chonyamulira ndi chotenthetsera gawo lapansi. Zochita zake monga kukhazikika kwamafuta ndi kufanana kwamafuta zimathandizira kwambiri pakukula kwa zinthu za epitaxial, ndikudziwikiratu kugwirizana ndi chiyero cha zida zamakanema zopyapyala za epitaxial. Choncho, khalidwe lake limakhudza mwachindunji kukonzekera kwa epitaxial wafers. Pa nthawi yomweyi, ndi kuwonjezeka kwa chiwerengero cha ntchito ndi kusintha kwa ntchito, zimakhala zosavuta kuvala ndi kung'amba, ndizowonongeka. Zabwino kwambiri matenthedwe madutsidwe ndi kukhazikika kwa graphite kumapatsa mwayi waukulu ngati gawo loyambira la zida za MOCVD.
Komabe, ngati ili graphite yoyera yokha, padzakhala mavuto. Popanga, padzakhala mpweya wotsalira wowononga ndi zitsulo zachitsulo, ndipo graphite susceptor idzawononga ndikugwa, zomwe zimachepetsa kwambiri moyo wautumiki wa graphite susceptor. Panthawi imodzimodziyo, kugwa kwa graphite ufa kumayambitsanso kuipitsidwa kwa mtanda, choncho mavutowa ayenera kuthetsedwa pokonzekera maziko. Ukadaulo wokutira ungapereke pamwamba ufa fixation, kumapangitsanso matenthedwe madutsidwe, ndi moyenera kutentha kugawa, ndipo wakhala teknoloji yaikulu kuthetsa vutoli.
Malingana ndi malo ogwiritsira ntchito komanso zofunikira zogwiritsira ntchito maziko a graphite, zokutira pamwamba ziyenera kukhala ndi izi:
1. Kuchulukana kwakukulu komanso kufalikira kwathunthu:Pansi pa graphite pali kutentha kwakukulu komanso malo ogwirira ntchito owononga. Pamwamba payenera kuphimbidwa bwino, ndipo zokutira ziyenera kukhala zolimba kuti ziteteze bwino.
2. Kusalala bwino kwa pamwamba:Popeza maziko a graphite omwe amagwiritsidwa ntchito pa kukula kwa kristalo imodzi amafuna kutsika kwapamwamba kwambiri, kutsetsereka koyambirira kwa mazikowo kumayenera kusungidwa pambuyo pokonzekera, ndiko kuti, chophimba pamwamba chiyenera kukhala chofanana.
3. Mphamvu yabwino yolumikizana:Kuchepetsa kusiyana kwa kuchuluka kwa matenthedwe kokwanira pakati pa maziko a graphite ndi zinthu zokutira kumatha kupititsa patsogolo mphamvu yolumikizana pakati paziwirizi. Pambuyo pokumana ndi kutentha kwapamwamba ndi kutsika kwa kutentha, kupaka sikophweka kusweka.
4. High matenthedwe madutsidwe:Kukula kwapamwamba kwa chip kumafuna maziko a graphite kuti apereke kutentha kwachangu komanso kofanana, kotero kuti zinthu zokutira ziyenera kukhala ndi matenthedwe apamwamba.
5. Malo osungunuka kwambiri, kukana kutentha kwa okosijeni komanso kukana dzimbiri:Chophimbacho chiyenera kugwira ntchito mokhazikika pa kutentha kwakukulu komanso malo ogwirira ntchito owononga.
The matenthedwe bata, matenthedwe kufanana ndi zina ntchito magawo aSiC yokutidwa ndi graphite susceptorimathandizira kwambiri pakukula kwa zinthu za epitaxial, chifukwa chake ndiye gawo lalikulu la zida za MOCVD.
β-SiC (3C-SiC) mawonekedwe a kristalo amasankhidwa ngati zokutira. Poyerekeza ndi mitundu ina ya kristalo, mawonekedwe a kristalowa ali ndi mndandanda wazinthu zabwino kwambiri monga kukhazikika kwa thermodynamic, kukana kwa okosijeni ndi kukana kwa dzimbiri. Panthawi imodzimodziyo, imakhala ndi matenthedwe opangira matenthedwe omwe amafanana ndi a graphite, motero amapereka maziko a graphite apadera. Ikhoza kuthetsa kulephera kwa maziko a graphite chifukwa cha kutentha kwakukulu kwa makutidwe ndi okosijeni ndi dzimbiri ndi imfa ya ufa pa nthawi ya utumiki, ndi kupanga pamwamba pa graphite m'munsi wandiweyani, osati porous, kutentha kwambiri kugonjetsedwa, anti-corrosion, odana ndi makutidwe ndi okosijeni ndi makhalidwe ena, potero kuwongolera khalidwe la crystal epitaxial ndi moyo wautumiki wa moyo wautumiki wa graphite m'munsi mwa graphite ng'anjo).
Kodi kusankha MOCVD graphite thireyi/susceptor kuti ndi kugonjetsedwa ndi kutentha ndi dzimbiri?
Posankha athireyi ya graphite kapena susceptor ya MOCVDzomwe zimagonjetsedwa ndi dzimbiri kutentha kwambiri, zinthu zotsatirazi ziyenera kuganiziridwa:
1. Chiyero chakuthupi:Zida za graphite zoyera kwambiri zimatha kukana dzimbiri ndi okosijeni pa kutentha kwambiri komanso kuchepetsa kukhudzidwa kwa zonyansa pamapangidwewo.
2. Kachulukidwe ndi porosity:Ma tray a graphite okhala ndi kachulukidwe kakang'ono komanso kutsika kotsika amakhala ndi mphamvu zamakina komanso kukana dzimbiri, ndipo amatha kupewa kulowerera kwa mpweya komanso kukokoloka kwa zinthu.
3. Thermal conductivity:Thermal conductivity graphite tray imathandizira kugawa kutentha, kuchepetsa kupsinjika kwamafuta, ndikuwongolera kukhazikika ndi moyo wautumiki wa zida.
4. Chithandizo chapamwamba:Ma pallets a graphite omwe adachitidwapo chithandizo chapadera, monga zokutira kapena plating, amatha kupititsa patsogolo kukana kwawo kwa dzimbiri komanso kukana kuvala.
5. Kukula ndi mawonekedwe:Malinga ndi zofunikira zenizeni za zida za MOCVD, sankhani kukula koyenera ndi mawonekedwe kuti muwonetsetse kuti thireyi ikugwirizana ndi zipangizo komanso ntchito yabwino.
6. Mbiri ya wopanga:Sankhani wopanga yemwe ali ndi mbiri yabwino komanso chidziwitso cholemera kuti mutsimikizire kudalirika kwamtundu wazinthu komanso ntchito zogulitsa pambuyo pake.
7. Kutsika mtengo:Pankhani yokwaniritsa zofunikira zaukadaulo, lingalirani zotsika mtengo ndikusankha zinthu zotsika mtengo.
VET Energy ndi apamwamba chiyero graphite susceptor katundu, timapereka osiyanasiyana magulu, ndipo angagwiritsidwe ntchito MOCVD zida za zopangidwa zosiyanasiyana, zitsanzo ndi specifications. TheSiC yokutidwa ndi graphite susceptoropangidwa ndi VET Energy alibe malo olumikizirana ndi zokutira komanso maulalo ofooka. Pankhani ya moyo wautumiki, amatha kukwaniritsa zofunikira za makasitomala omwe ali ndi zosowa zosiyanasiyana (kuphatikizapo kugwiritsa ntchito mpweya wokhala ndi chlorine), ndipo makasitomala ndi olandiridwa kuti akambirane ndi kufunsa.
Nthawi yotumiza: Mar-01-2025