Iyini ithreyi ye-graphite ye-MOCVD?

Ukukhula kwe-epitaxial ye-Wafer kutholakala ngobuchwepheshe be-metal organic chemical vapor deposition (MOCVD), lapho amagesi amsulwa kakhulu efakwa khona ku-reactor futhi alinganiswe kahle, ukuze ahlangane emazingeni okushisa aphezulu ukuze abangele ukusebenzisana kwamakhemikhali futhi afakwe kuma-wafer e-semiconductor ezingqimbeni ezincane kakhulu ze-athomu ukuze kwakheke i-epitaxy yezinto zokwakha kanye nama-semiconductor ahlanganisiwe.

Emishinini ye-CVD, i-substrate ayikwazi ukufakwa ngqo ensimbini noma nje esisekelweni sokufakwa kwe-epitaxial, ngoba izothinteka yizici eziningi. Ngakho-ke, kudingeka i-susceptor noma ithreyi ukuze ibambe i-substrate, bese kusetshenziswa ubuchwepheshe be-CVD ukwenza ukufakwa kwe-epitaxial ku-substrate. Le susceptor iyi-Isivikelo se-graphite se-MOCVD(okubizwa nangokuthiIthreyi ye-graphite ye-MOCVD).

Isakhiwo sayo siboniswe esithombeni esingezansi:

Kungani i-graphite susceptor idinga i-CVD coating?

I-graphite susceptor ingenye yezingxenye eziyinhloko emishinini ye-MOCVD. Iyinto ethwalayo kanye neyokushisa ye-substrate. Amapharamitha ayo okusebenza njengokuqina kokushisa kanye nokufana kokushisa adlala indima ebalulekile ekhwalithini yokukhula kwezinto ze-epitaxial, futhi anquma ngqo ukufana kanye nobumsulwa bezinto zefilimu encane ye-epitaxial. Ngakho-ke, ikhwalithi yayo ithinta ngqo ukulungiswa kwama-wafer e-epitaxial. Ngesikhathi esifanayo, ngokwanda kwenani lokusetshenziswa kanye nezinguquko ezimweni zokusebenza, kulula kakhulu ukuyigqoka nokuyidabula, iyinto edliwayo. Ukuqhuba kahle kokushisa kanye nokuzinza kwe-graphite kuyinika inzuzo enkulu njengengxenye eyisisekelo yemishini ye-MOCVD.

Kodwa-ke, uma kuyi-graphite emsulwa kuphela, kuzoba nezinkinga ezithile. Enqubweni yokukhiqiza, kuzoba namagesi aqothulayo asele kanye nezinto eziphilayo zensimbi, kanti i-graphite susceptor izogqwala futhi iwe, okunciphisa kakhulu impilo yenkonzo ye-graphite susceptor. Ngesikhathi esifanayo, i-graphite powder ewayo izophinde ibangele ukungcola ku-wafer, ngakho-ke lezi zinkinga zidinga ukuxazululwa enqubweni yokulungiselela isisekelo. Ubuchwepheshe bokumboza bunganikeza ukulungiswa kwe-powder surface, kuthuthukise ukuhanjiswa kokushisa, futhi kulinganise ukusatshalaliswa kokushisa, futhi sekube ubuchwepheshe obuyinhloko bokuxazulula le nkinga.

Ngokwesimo sendawo yokusetshenziswa kanye nezidingo zokusetshenziswa kwesisekelo se-graphite, ungqimba olungaphezulu kufanele lube nezici ezilandelayo:

1. Ukuminyana okuphezulu kanye nokumbozwa okugcwele:Isisekelo se-graphite sisezindaweni zokusebenza ezinokushisa okuphezulu kanye nendawo egqwalisayo. Umphezulu kumele umbozwe ngokuphelele, futhi isembozo kumele sibe nobukhulu obuhle ukuze sidlale indima enhle yokuvikela.

2. Ubuso obuhle obuthambile:Njengoba isisekelo se-graphite esisetshenziselwa ukukhula kwekristalu eyodwa sidinga ukuba yisicaba esiphezulu kakhulu, ukuba yisicaba kokuqala kwesisekelo kumele kugcinwe ngemva kokulungiswa kokufakwa, okungukuthi, indawo yokumboza kumele ifane.

3. Amandla amahle okubopha:Ukunciphisa umehluko ku-coefficient yokwanda kokushisa phakathi kwesisekelo se-graphite nezinto zokumboza kungathuthukisa ngempumelelo amandla okubopha phakathi kwalokhu okubili. Ngemva kokubhekana nemijikelezo yokushisa ephezulu nephansi, ukumboza akulula ukukuqhekeza.

4. Ukushisa okuphezulu:Ukukhula kwe-chip esezingeni eliphezulu kudinga isisekelo se-graphite ukuze sinikeze ukushisa okusheshayo nokulinganayo, ngakho-ke izinto zokumboza kufanele zibe nokushisa okuphezulu.

5. Indawo yokuncibilika ephezulu, ukumelana nokushiswa kwe-oxidation okushisa okuphezulu kanye nokumelana nokugqwala:Isembozo kufanele sikwazi ukusebenza kahle endaweni yokusebenza enokushisa okuphezulu kanye nendawo ebolile.

Ukuqina kokushisa, ukufana kokushisa kanye nezinye izilinganiso zokusebenza kweIsivikelo se-graphite esimbozwe yi-SiCzidlala indima ebalulekile ekhwalithini yokukhula kwezinto ze-epitaxial, ngakho-ke ziyingxenye eyinhloko yemishini ye-MOCVD.

Ifomu lekristalu le-β-SiC (3C-SiC) likhethwa njengengubo. Uma liqhathaniswa nezinye izinhlobo zekristalu, leli fomu lekristalu linezimpawu ezinhle kakhulu ezifana nokuzinza okuhle kwe-thermodynamic, ukumelana ne-oxidation kanye nokumelana nokugqwala. Ngesikhathi esifanayo, linomoya wokushisa ohambisana kahle nowe-graphite, ngaleyo ndlela linikeza isisekelo se-graphite izakhiwo ezikhethekile. Lingaxazulula ngempumelelo ukwehluleka kwesisekelo se-graphite okubangelwa ukugqwala nokushisa okuphezulu kanye nokulahleka kwempuphu ngesikhathi senkonzo, futhi lenze ubuso besisekelo se-graphite bube bukhulu, bungabi nama-porous, bumelana nokushisa okuphezulu, bumelana nokugqwala, bumelana ne-oxidation kanye nezinye izici, ngaleyo ndlela lithuthukise ikhwalithi ye-crystal epitaxial kanye nokuphila kwenkonzo kwesisekelo se-graphite (impilo yenkonzo yesisekelo se-graphite esimbozwe yi-SiC ilinganiswa ezithandweni).

Ungayikhetha kanjani ithreyi/i-susceptor ye-MOCVD graphite ekwazi ukumelana nokushisa okuphezulu kanye nokugqwala?

Uma ukhethaithreyi ye-graphite noma i-susceptor ye-MOCVDokumelana nokugqwala kokushisa okuphezulu, izici ezilandelayo ezibalulekile kufanele zicatshangelwe:

1. Ubumsulwa bezinto ezibonakalayo:Izinto ze-graphite ezihlanzekile kakhulu zingamelana kangcono nokugqwala kanye nokushiswa emazingeni okushisa aphezulu futhi zinciphise umthelela wokungcola enqubweni yokufakwa.

2. Ubuningi kanye nokuvuleka kwe-porosity:Amathreyi e-graphite anobukhulu obuphezulu kanye ne-porosity ephansi anamandla angcono okusebenza kanye nokumelana nokugqwala, futhi angavimbela ngempumelelo ukungena kwegesi kanye nokuguguleka kwezinto.

3. Ukuqhuba kwe-thermal:Ithreyi yegrafiti eqhuba ukushisa okuphezulu isiza ukusabalalisa ukushisa ngokulinganayo, ukunciphisa ukucindezeleka kokushisa, nokuthuthukisa ukuzinza nokuphila kwenkonzo yemishini.

4. Ukwelashwa kwendawo:Ama-pallet e-graphite asebethole ukwelashwa okukhethekile kobuso, njengokumbozwa noma ukugqunywa, angathuthukisa kakhulu ukumelana kwawo nokugqwala kanye nokumelana nokuguguleka.

5. Usayizi nesimo:Ngokwezidingo ezithile zemishini ye-MOCVD, khetha usayizi nesimo esifanele ukuqinisekisa ukuthi ithileyi iyahambisana nemishini kanye nokulula kokusebenza.

6. Idumela lomkhiqizi:Khetha umenzi onedumela elihle kanye nesipiliyoni esicebile ukuqinisekisa ukuthembeka kwekhwalithi yomkhiqizo kanye nensizakalo yangemva kokuthengisa.

7. Ukusebenza kahle kwezindleko:Ngenxa yokuhlangabezana nezidingo zobuchwepheshe, cabanga ngokusebenzisa kahle izindleko bese ukhetha imikhiqizo esebenza kahle kakhulu.

I-VET Energy ingumhlinzeki we-graphite susceptor ohlanzekile kakhulu, sinikeza izigaba eziningi, futhi ingasetshenziswa emishinini ye-MOCVD yemikhiqizo ehlukene, amamodeli kanye nemininingwane.Isivikelo se-graphite esimbozwe yi-SiCezikhiqizwe yi-VET Energy azinazo izindawo zokuxhumana ezimboza futhi azinazo izixhumanisi ezibuthakathaka. Ngokuphathelene nokuphila kwenkonzo, zingahlangabezana nezidingo zamakhasimende anezidingo ezahlukene (kufaka phakathi ukusetshenziswa kwemimoya equkethe i-chlorine), futhi amakhasimende amukelekile ukubonisana nokubuza.