Iyini ithreyi ye-MOCVD graphite?

Ukukhula kwe-wafer epitaxial kufinyelelwa ngobuchwepheshe be-metal organic chemical vapor deposition (MOCVD), lapho amagesi ahlanzekile kakhulu ajovwa ku-reactor futhi afakwe amamitha acolekile, ukuze ahlangane emazingeni okushisa aphakeme ukuze abangele ukusebenzisana kwamakhemikhali futhi afakwe kuma-wafer we-semiconductor ezendlalelo ze-athomu ezacile kakhulu ukuze zakhe ama-epitaxyductors wezinto zokwakha.

Emishinini ye-CVD, i-substrate ayikwazi ukubekwa ngokuqondile ensimbi noma nje kusisekelo se-epitaxial deposition, ngoba izothinteka yizici eziningi. Ngakho-ke, i-susceptor noma ithreyi iyadingeka ukuze ubambe i-substrate, bese usebenzisa ubuchwepheshe be-CVD ukwenza i-epitaxial deposition ku-substrate. Lesi sici si-aI-MOCVD graphite susceptor(ebizwa nangokuthiI-MOCVD graphite tray).

Ukwakheka kwayo kuboniswe emfanekisweni ongezansi:

Kungani i-graphite susceptor idinga i-CVD coating?

I-graphite susceptor ingenye yezingxenye eziyinhloko kumishini ye-MOCVD. Yisici esithwalayo nesishisisayo se-substrate. Imingcele yokusebenza kwayo njengokuzinza kwe-thermal nokufana kwe-thermal idlala indima ebalulekile kwikhwalithi yokukhula kwezinto ezibonakalayo ze-epitaxial, futhi inquma ngokuqondile ukufana nobumsulwa bezinto zefilimu ezacile ze-epitaxial. Ngakho-ke, ikhwalithi yayo ithinta ngokuqondile ukulungiswa kwama-wafers epitaxial. Ngesikhathi esifanayo, ngokunyuka kwenani lokusetshenziswa kanye nezinguquko ezimweni zokusebenza, kulula kakhulu ukugqoka nokudiliza, kuyasebenziseka. I-conductivity enhle kakhulu yokushisa kanye nokuzinza kwegraphite kuyinikeza inzuzo enkulu njengengxenye yesisekelo semishini ye-MOCVD.

Nokho, uma kuyi-graphite emsulwa kuphela, kuzoba nezinkinga ezithile. Enqubweni yokukhiqiza, kuzoba khona amagesi okugqwala asele kanye nezinto eziphilayo zensimbi, futhi i-graphite susceptor izogqwala futhi siwe, okunciphisa kakhulu impilo yesevisi ye-graphite susceptor. Ngesikhathi esifanayo, i-graphite powder ewayo izophinde ibangele ukungcola ku-wafer, ngakho-ke lezi zinkinga zidinga ukuxazululwa ekulungiseleleni isisekelo. Ubuchwepheshe be-coating bungahlinzeka ngokulungiswa kwe-powder ebusweni, kuthuthukise ukuqhutshwa kwe-thermal, nokusabalalisa ukushisa okulinganiselwe, futhi sekuyitheknoloji eyinhloko yokuxazulula le nkinga.

Ngokwendawo yohlelo lokusebenza kanye nezidingo zokusebenzisa isisekelo segraphite, ukumbozwa kwendawo kufanele kube nalezi zimpawu ezilandelayo:

1. Ukuminyana okuphezulu nokuhlanganisa okugcwele:Isisekelo se-graphite sisezingeni lokushisa eliphezulu kanye nendawo yokusebenza egqwalayo. Ingaphezulu kufanele limbozwe ngokugcwele, futhi ukunamathela kufanele kube nokuminyana okuhle ukuze kudlale indima enhle yokuvikela.

2. Ukucaba kwendawo enhle:Njengoba isisekelo se-graphite esisetshenziselwa ukukhula kwe-crystal eyodwa sidinga ukuphakama okuphezulu kakhulu, i-flatness yasekuqaleni yesisekelo kufanele igcinwe ngemuva kokulungiswa kokugqoka, okungukuthi, indawo yokugqoka kufanele ibe iyunifomu.

3. Amandla amahle okuxhumana:Ukunciphisa umehluko ku-coefficient yokwandisa okushisayo phakathi kwesisekelo se-graphite nezinto zokumboza kungathuthukisa ngempumelelo amandla okubopha phakathi kokubili. Ngemuva kokubhekana nemijikelezo yokushisa ephezulu nephansi, ukugqoka akulula ukuqhekeka.

4. High conductivity ezishisayo:Ukukhula kwekhwalithi ephezulu kwe-chip kudinga isisekelo se-graphite ukuze sinikeze ukushisa okusheshayo nokufanayo, ngakho-ke izinto zokumboza kufanele zibe nokuhamba okuphezulu kwe-thermal.

5. Indawo ephezulu yokuncibilika, ukumelana ne-oxidation lokushisa eliphezulu nokumelana nokugqwala:I-coating kufanele ikwazi ukusebenza ngokuzinzile endaweni yokushisa ephezulu kanye nendawo yokusebenza egqwalayo.

Ukuzinza kwe-thermal, ukufana kwe-thermal kanye neminye imingcele yokusebenza kwe-I-SiC camera graphite susceptoridlala indima ewujuqu kukhwalithi yokukhula kwezinto ezibonakalayo ze-epitaxial, ngakho-ke iyingxenye eyinhloko yemishini ye-MOCVD.

Ifomu lekristalu le-β-SiC (3C-SiC) likhethwa njenge-coating. Uma kuqhathaniswa namanye amafomu ekristalu, leli fomu lekristalu linochungechunge lwezakhiwo ezinhle kakhulu njengokuzinza okuhle kwe-thermodynamic, ukumelana ne-oxidation kanye nokumelana nokugqwala. Ngesikhathi esifanayo, ine-conductivity eshisayo ehambisana ngokuyisisekelo ne-graphite, ngaleyo ndlela inikeze isisekelo se-graphite izici ezikhethekile. Ingakwazi ukuxazulula ngokuphumelelayo ukwehluleka kwesisekelo se-graphite okubangelwa ukushisa okuphezulu kwe-oxidation kanye nokugqwala kanye nokulahlekelwa kwempushana ngesikhathi sesevisi, futhi yenze ubuso besisekelo segraphite buminyene, bungabi namabhobhothi, bukwazi ukumelana nokushisa okuphezulu, ukulwa nokubola, i-anti-oxidation nezinye izici, ngaleyo ndlela kuthuthukiswe izinga le-crystal epitaxial likalwe kanye nempilo yesevisi ye-baseite yesevisi ye-graphite isisekelo sempilo yegrafu. amaziko).

Ungayikhetha kanjani ithreyi ye-MOCVD ye-graphite/susceptor ekwazi ukumelana nezinga lokushisa eliphezulu nokugqwala?

Lapho ukhetha aithreyi ye-graphite noma i-susceptor ye-MOCVDukumelana nokugqwala kwezinga lokushisa eliphezulu, izici ezilandelayo ezibalulekile kufanele zibhekwe:

1. Ubumsulwa bezinto ezibonakalayo:Izinto ze-graphite ezihlanzekile zingamelana kangcono nokugqwala kanye ne-oxidation emazingeni okushisa aphezulu futhi zinciphise umthelela wokungcola enqubweni yokubeka.

2. Ukuminyana kanye ne-porosity:Amathreyi e-graphite anokuminyana okuphezulu kanye ne-porosity ephansi anamandla angcono wemishini nokumelana nokugqwala, futhi angavimbela ngokuphumelelayo ukungena kwegesi nokuguguleka kwempahla.

3. I-Thermal conductivity:Ithreyi ye-graphite ye-thermal conductivity ephezulu isiza ukusabalalisa ukushisa ngokulinganayo, ukunciphisa ukucindezeleka okushisayo, nokuthuthukisa ukuzinza nempilo yesevisi yemishini.

4. Ukwelashwa kwendawo:Amaphalethi e-graphite athole ukwelashwa okukhethekile okungaphezulu, okufana nokunamathiswa noma ukucwenga, angathuthukisa ukumelana nokugqwala kwawo kanye nokungagugi.

5. Usayizi nokuma:Ngokwezidingo ezithile zemishini ye-MOCVD, khetha usayizi ofanele kanye nokuma ukuze uqinisekise ukuhambisana kwethreyi nemishini kanye nokusebenza kalula.

6. Isithunzi somkhiqizi:Khetha umkhiqizi onegama elihle nolwazi olucebile ukuze uqinisekise ukwethembeka kwekhwalithi yomkhiqizo kanye nesevisi yangemuva kokuthengisa.

7. Ukusebenza kahle kwezindleko:Ngokwesisekelo sokuhlangabezana nezidingo zobuchwepheshe, cabanga ukonga izindleko bese ukhetha imikhiqizo enezindleko eziphezulu zokusebenza.

I-VET Energy ingumphakeli we-graphite susceptor we-high-purity, sinikeza izinhlobonhlobo zezigaba, futhi ingasetshenziswa kumishini ye-MOCVD yemikhiqizo ehlukene, amamodeli kanye nokucaciswa. II-SiC camera graphite susceptorekhiqizwe i-VET Energy ayinawo amaphuzu okuxhumana okunamathelayo futhi azikho izixhumanisi ezibuthakathaka. Mayelana nempilo yesevisi, angakwazi ukuhlangabezana nezidingo zamakhasimende anezidingo ezahlukene (okuhlanganisa ukusetshenziswa kwe-atmospheres ene-chlorine), futhi amakhasimende amukelekile ukuthi axhumane futhi abuze.