Kev loj hlob ntawm wafer epitaxial yog ua tiav los ntawm cov hlau organic chemical vapor deposition (MOCVD) thev naus laus zis, uas cov pa roj ultra-pure raug txhaj rau hauv lub reactor thiab ntsuas zoo, yog li lawv sib xyaw ua ke ntawm qhov kub siab kom ua rau muaj kev sib cuam tshuam tshuaj lom neeg thiab raug tso rau ntawm cov semiconductor wafers hauv cov txheej nyias nyias heev los tsim epitaxy ntawm cov ntaub ntawv thiab cov khoom sib xyaw semiconductors.
Hauv cov khoom siv CVD, lub substrate tsis tuaj yeem muab tso ncaj qha rau ntawm hlau lossis tsuas yog rau ntawm lub hauv paus rau epitaxial deposition, vim tias nws yuav raug cuam tshuam los ntawm ntau yam. Yog li ntawd, xav tau lub susceptor lossis tais los tuav lub substrate, thiab tom qab ntawd siv CVD thev naus laus zis los ua epitaxial deposition rau ntawm lub substrate. Lub susceptor no yog ib qhoMOCVD graphite susceptor(kuj hu uaMOCVD graphite tais).
Nws cov qauv tau qhia hauv daim duab hauv qab no:
Vim li cas cov graphite susceptor thiaj xav tau CVD txheej?
Lub graphite susceptor yog ib qho ntawm cov khoom tseem ceeb hauv MOCVD cov khoom siv. Nws yog tus nqa khoom thiab cua sov ntawm lub substrate. Nws cov kev ua tau zoo xws li thermal stability thiab thermal uniformity ua lub luag haujlwm txiav txim siab hauv qhov zoo ntawm cov khoom siv epitaxial loj hlob, thiab ncaj qha txiav txim siab qhov sib xws thiab purity ntawm cov ntaub ntawv epitaxial nyias zaj duab xis. Yog li ntawd, nws qhov zoo ncaj qha cuam tshuam rau kev npaj ntawm epitaxial wafers. Tib lub sijhawm, nrog rau kev nce ntxiv ntawm cov lej siv thiab kev hloov pauv hauv cov xwm txheej ua haujlwm, nws yooj yim heev rau hnav thiab rhuav, nws yog ib qho khoom siv tau. Qhov zoo heev thermal conductivity thiab stability ntawm graphite muab nws qhov zoo heev ua lub hauv paus ntawm MOCVD cov khoom siv.
Txawm li cas los xij, yog tias nws tsuas yog graphite ntshiab xwb, yuav muaj qee qhov teeb meem. Hauv cov txheej txheem ntau lawm, yuav muaj cov pa roj corrosive seem thiab cov hlau organic matter, thiab cov graphite susceptor yuav corrode thiab poob tawm, uas ua rau lub neej ua haujlwm ntawm graphite susceptor txo qis heev. Tib lub sijhawm, cov hmoov graphite poob kuj tseem yuav ua rau muaj kuab paug rau lub wafer, yog li cov teeb meem no yuav tsum tau daws hauv cov txheej txheem npaj ntawm lub hauv paus. Cov txheej txheem txheej txheem tuaj yeem muab cov hmoov nto fixation, txhim kho thermal conductivity, thiab sib npaug cua sov faib, thiab tau dhau los ua cov thev naus laus zis tseem ceeb los daws qhov teeb meem no.
Raws li qhov chaw siv thiab kev siv cov kev cai ntawm lub hauv paus graphite, qhov txheej txheem saum npoo yuav tsum muaj cov yam ntxwv hauv qab no:
1. Kev ceev ceev thiab kev pab them tag nrho:Lub hauv paus graphite nyob rau hauv qhov kub thiab txias ua haujlwm ib puag ncig corrosive. Qhov chaw yuav tsum tau npog tag nrho, thiab cov txheej yuav tsum muaj qhov ceev zoo kom ua lub luag haujlwm tiv thaiv zoo.
2. Qhov chaw tiaj tiaj zoo:Vim tias lub hauv paus graphite siv rau kev loj hlob ntawm cov siv lead ua ib leeg xav tau qhov chaw tiaj tiaj heev, qhov tiaj tiaj thawj zaug ntawm lub hauv paus yuav tsum tau tswj hwm tom qab npaj cov txheej txheem, uas yog, qhov chaw txheej txheem yuav tsum sib xws.
3. Lub zog sib txuas zoo:Txo qhov sib txawv ntawm cov coefficient thermal expansion ntawm lub hauv paus graphite thiab cov khoom siv txheej tuaj yeem txhim kho lub zog sib txuas ntawm ob qho tib si. Tom qab muaj kev kub siab thiab qis kub, cov txheej tsis yooj yim tawg.
4. Kev ua tau zoo ntawm cov cua sov:Kev loj hlob ntawm cov chips zoo xav tau lub hauv paus graphite los muab cua sov sai thiab sib xws, yog li cov khoom siv txheej yuav tsum muaj kev ua tau zoo thermal.
5. Lub ntsiab lus yaj siab, kev tiv thaiv oxidation kub siab thiab kev tiv thaiv corrosion:Lub txheej yuav tsum ua haujlwm tau ruaj khov hauv qhov kub thiab txias thiab qhov chaw ua haujlwm corrosive.
Kev ruaj khov ntawm thermal, thermal uniformity thiab lwm yam kev ua tau zoo ntawm cov khoom noSiC coated graphite susceptorua lub luag haujlwm txiav txim siab hauv qhov zoo ntawm kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.
Cov qauv siv lead ua β-SiC (3C-SiC) raug xaiv los ua txheej. Piv nrog rau lwm cov qauv siv lead ua, cov qauv siv lead ua no muaj ntau yam zoo xws li kev ruaj khov thermodynamic zoo, tiv taus oxidation thiab tiv taus corrosion. Tib lub sijhawm, nws muaj cov thermal conductivity uas zoo ib yam li graphite, yog li muab cov yam ntxwv tshwj xeeb rau graphite puag. Nws tuaj yeem daws qhov tsis ua haujlwm ntawm graphite puag los ntawm kev kub siab oxidation thiab corrosion thiab hmoov poob thaum lub sijhawm ua haujlwm, thiab ua rau qhov chaw ntawm graphite puag ntom, tsis muaj qhov, tiv taus kub siab, tiv taus corrosion, tiv taus oxidation thiab lwm yam ntxwv, yog li txhim kho qhov zoo ntawm crystal epitaxial thiab lub neej ua haujlwm ntawm graphite puag (lub neej ua haujlwm ntawm SiC coated graphite puag yog ntsuas hauv qhov cub tawg).
Yuav ua li cas xaiv MOCVD graphite tais / susceptor uas tiv taus kub thiab corrosion?
Thaum xaiv ib qhographite tais lossis susceptor rau MOCVDuas tiv taus kev xeb kub siab, cov yam tseem ceeb hauv qab no yuav tsum tau xav txog:
1. Cov khoom siv huv:Cov ntaub ntawv graphite uas muaj purity siab tuaj yeem tiv taus corrosion thiab oxidation ntawm qhov kub siab thiab txo qhov cuam tshuam ntawm cov khoom tsis huv rau cov txheej txheem deposition.
2. Qhov ceev thiab porosity:Cov tais graphite nrog qhov ceev siab thiab porosity qis muaj lub zog kho tshuab zoo dua thiab tiv taus corrosion, thiab tuaj yeem tiv thaiv cov roj nkag mus thiab cov khoom siv yaig.
3. Kev ua kom sov tau zoo:Lub tais graphite uas muaj cov thermal conductivity siab pab kom faib cov cua sov sib npaug zos, txo cov kev ntxhov siab thermal, thiab txhim kho kev ruaj khov thiab lub neej ua haujlwm ntawm cov khoom siv.
4. Kev kho qhov chaw:Cov pallets graphite uas tau dhau los ua kev kho tshwj xeeb saum npoo, xws li txheej lossis plating, tuaj yeem txhim kho lawv txoj kev tiv thaiv corrosion thiab hnav tsis kam.
5. Qhov loj thiab duab:Raws li cov kev cai tshwj xeeb ntawm cov khoom siv MOCVD, xaiv qhov loj me thiab cov duab kom haum kom ntseeg tau tias lub tais sib xws nrog cov khoom siv thiab yooj yim ntawm kev ua haujlwm.
6. Lub koob npe nrov ntawm cov chaw tsim khoom:Xaiv ib lub chaw tsim khoom uas muaj lub koob npe zoo thiab kev paub nplua nuj los xyuas kom meej tias qhov khoom zoo thiab kev pabcuam tom qab muag zoo.
7. Kev siv nyiaj tsim nyog:Vim yog xav kom ua tau raws li cov kev cai ntawm kev siv tshuab, xav txog kev siv nyiaj tsim nyog thiab xaiv cov khoom uas muaj kev ua tau zoo dua.
VET Zog yog lub chaw muag khoom graphite susceptor siab, peb muab ntau yam pawg, thiab siv tau rau hauv cov khoom siv MOCVD ntawm ntau hom, qauv thiab cov lus qhia. LubSiC coated graphite susceptortsim los ntawm VET Energy tsis muaj cov ntsiab lus sib cuag thiab tsis muaj qhov txuas tsis muaj zog. Hais txog lub neej ua haujlwm, lawv tuaj yeem ua tau raws li qhov xav tau ntawm cov neeg siv khoom uas muaj kev xav tau sib txawv (suav nrog kev siv cov huab cua uas muaj chlorine), thiab cov neeg siv khoom raug txais tos los sab laj thiab nug.
Lub sijhawm tshaj tawm: Lub Peb Hlis-01-2025