Wafer epitaxial txoj kev loj hlob yog tiav los ntawm cov hlau organic chemical vapor deposition (MOCVD) technology, nyob rau hauv uas ultra-ntshiab gases yog txhaj rau hauv lub reactor thiab finely metered, thiaj li hais tias lawv ua ke nyob rau hauv siab kub los ua tshuaj sib cuam tshuam thiab muab tso rau hauv semiconductor wafers nyob rau hauv heev nyias atomic khaubncaws sab nraud povtseg los tsim epitaxy ntawm cov ntaub ntawv.
Hauv CVD cov cuab yeej, lub substrate tsis tuaj yeem tso ncaj qha rau ntawm cov hlau lossis tsuas yog ntawm lub hauv paus rau epitaxial deposition, vim nws yuav cuam tshuam los ntawm ntau yam. Yog li ntawd, ib tug susceptor los yog tais yog xav tau los tuav lub substrate, thiab ces siv CVD technology los ua epitaxial deposition ntawm lub substrate. Qhov no susceptor yog ibMOCVD graphite susceptor(tseem hu uaMOCVD graphite tais).
Nws cov qauv yog qhia hauv daim duab hauv qab no:
Vim li cas graphite susceptor xav tau CVD txheej?
Lub graphite susceptor yog ib qho tseem ceeb ntawm cov khoom siv hauv MOCVD. Nws yog cov khoom thauj thiab cua sov ntawm lub substrate. Nws cov kev ua haujlwm tsis zoo xws li thermal stability thiab thermal uniformity ua lub luag haujlwm txiav txim siab hauv qhov zoo ntawm cov khoom siv epitaxial, thiab ncaj qha txiav txim siab qhov sib xws thiab purity ntawm epitaxial nyias zaj duab xis cov ntaub ntawv. Yog li ntawd, nws qhov zoo cuam tshuam ncaj qha rau kev npaj ntawm epitaxial wafers. Nyob rau tib lub sijhawm, nrog rau kev siv ntau ntxiv thiab kev hloov pauv hauv kev ua haujlwm, nws yooj yim heev rau hnav thiab tsim kua muag, nws yog ib qho khoom siv. Qhov zoo tshaj plaws thermal conductivity thiab ruaj khov ntawm graphite muab nws qhov txiaj ntsig zoo raws li lub hauv paus ntawm cov khoom siv MOCVD.
Txawm li cas los xij, yog tias nws tsuas yog ntshiab graphite, yuav muaj qee qhov teeb meem. Nyob rau hauv cov txheej txheem ntau lawm, yuav muaj cov seem corrosive gases thiab hlau organic teeb meem, thiab graphite susceptor yuav corrode thiab poob tawm, uas zoo heev txo lub neej kev pab cuam ntawm lub graphite susceptor. Nyob rau tib lub sijhawm, cov hmoov graphite poob tseem yuav ua rau muaj kuab paug rau lub wafer, yog li cov teeb meem no yuav tsum tau daws nyob rau hauv cov txheej txheem kev npaj ntawm lub hauv paus. Txheej txheej tshuab tuaj yeem muab cov hmoov av fixation, txhim kho thermal conductivity, thiab sib npaug ntawm cov cua sov, thiab tau dhau los ua cov thev naus laus zis tseem ceeb los daws qhov teeb meem no.
Raws li daim ntawv thov ib puag ncig thiab siv cov kev cai ntawm graphite puag, txheej txheej yuav tsum muaj cov yam ntxwv hauv qab no:
1. High ceev thiab tag nrho cov kev pab cuam:Lub hauv paus graphite yog nyob rau hauv qhov kub thiab txias thiab ua haujlwm corrosive. Qhov saum npoo yuav tsum tau npog tag nrho, thiab txheej txheej yuav tsum muaj qhov ntom ntom kom ua lub luag haujlwm tiv thaiv zoo.
2. Zoo nto flatness:Txij li thaum lub hauv paus graphite siv rau ib qho kev loj hlob siv lead ua yuav tsum muaj qhov sib luag ntawm qhov chaw siab heev, qhov qub flatness ntawm lub hauv paus yuav tsum tau tswj xyuas tom qab txheej txheej tau npaj, uas yog, txheej txheej yuav tsum zoo ib yam.
3. Kev sib raug zoo zog:Txo qhov sib txawv ntawm thermal expansion coefficient ntawm graphite puag thiab cov khoom siv txheej tuaj yeem txhim kho lub zog sib txuas ntawm ob. Tom qab muaj kev kub siab thiab qis thermal voj voog, txheej txheej tsis yooj yim rau tawg.
4. High thermal conductivity:Kev loj hlob ntawm cov nti zoo yuav tsum muaj graphite puag los muab cov cua sov ceev thiab zoo ib yam, yog li cov khoom siv txheej yuav tsum muaj cov thermal conductivity siab.
5. High melting point, kub oxidation kuj thiab corrosion kuj:Cov txheej txheej yuav tsum muaj peev xwm ua haujlwm ruaj khov hauv qhov kub thiab txias thiab ua haujlwm corrosive.
Lub thermal stability, thermal uniformity thiab lwm yam kev ua tau zoo ntawm cov khoomSiC coated graphite susceptorua lub luag haujlwm txiav txim siab hauv qhov zoo ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.
β-SiC (3C-SiC) siv lead ua daim ntawv yog xaiv raws li txheej. Piv nrog rau lwm cov ntaub ntawv siv lead ua, daim ntawv siv lead ua no muaj cov khoom zoo heev xws li zoo thermodynamic stability, oxidation kuj thiab corrosion kuj. Nyob rau tib lub sijhawm, nws muaj cov thermal conductivity uas yog qhov ua tau raws li cov graphite, yog li muab cov graphite puag tshwj xeeb. Nws tuaj yeem daws qhov tsis ua haujlwm ntawm graphite puag los ntawm qhov kub-kub oxidation thiab corrosion thiab hmoov poob thaum lub sij hawm kev pab cuam, thiab ua rau saum npoo ntawm graphite puag ntom, tsis ntxeem tau, kub-resistant, anti-corrosion, anti-oxidation thiab lwm yam ntxwv, yog li txhim kho cov siv lead ua epitaxial zoo thiab kev pab cuam lub neej ntawm lub graphite lub hauv paus kev pab cuam ntawm lub hauv paus graphite (SiC) rauv).
Yuav ua li cas xaiv MOCVD graphite tais / susceptor uas tiv taus kub thiab corrosion?
Thaum xaiv ibgraphite tais lossis susceptor rau MOCVDuas tiv taus kub corrosion, cov hauv qab no tseem ceeb yuav tsum tau xav txog:
1. Khoom siv purity:High-purity graphite cov ntaub ntawv tuaj yeem tiv taus corrosion thiab oxidation ntawm qhov kub thiab txias thiab txo qhov cuam tshuam ntawm impurities ntawm cov txheej txheem deposition.
2. Ceev thiab porosity:Graphite cov hnub ci nrog siab ceev thiab khav theeb muaj cov tshuab muaj zog zoo dua thiab corrosionively tiv thaiv cov roj nkag mus thiab cov khoom yaig.
3. Thermal conductivity:Lub siab thermal conductivity graphite tais pab kom sib npaug ntawm cov cua sov, txo cov thermal stress, thiab txhim kho kev ruaj ntseg thiab kev pab lub neej ntawm cov khoom siv.
4. Kev kho deg:Graphite pallets uas tau dhau los kho qhov chaw tshwj xeeb, xws li txheej lossis plating, tuaj yeem txhim kho lawv cov kev tiv thaiv corrosion thiab hnav tsis kam.
5. Loj thiab zoo li:Raws li cov kev cai tshwj xeeb ntawm cov cuab yeej MOCVD, xaiv qhov loj thiab cov duab tsim nyog los xyuas kom meej qhov sib xws ntawm lub tais nrog cov khoom siv thiab kev ua haujlwm yooj yim.
6. Chaw tsim tshuaj paus lub koob npe nrov:Xaiv cov chaw tsim khoom nrog lub koob npe zoo thiab kev nplua nuj los ua kom muaj kev ntseeg siab ntawm cov khoom zoo thiab kev pab cuam tom qab muag.
7. Tus nqi-zoo:Ntawm qhov chaw ua tau raws li qhov yuav tsum tau ua, xav txog kev siv nyiaj zoo thiab xaiv cov khoom siv nrog cov nqi siab dua.
VET Energy yog cov khoom lag luam siab-purity graphite susceptor, peb muaj ntau pawg, thiab tuaj yeem siv rau hauv MOCVD cov cuab yeej ntawm ntau hom, qauv thiab specifications. CovSiC coated graphite susceptoruas tsim los ntawm VET Energy tsis muaj txheej tiv thaiv cov ntsiab lus thiab tsis muaj kev sib txuas tsis muaj zog. Hais txog kev pabcuam lub neej, lawv tuaj yeem ua tau raws li cov kev xav tau ntawm cov neeg siv khoom nrog cov kev xav tau sib txawv (nrog rau kev siv cov tshuaj chlorine uas muaj cua sov), thiab cov neeg siv khoom zoo siab tos txais los tham thiab nug.
Post lub sij hawm: Mar-01-2025