He aha ka MOCVD graphite tray?

Loaʻa ka ulu ʻana o ka wafer epitaxial ma o ka ʻenehana metala organic chemical vapor deposition (MOCVD), kahi e hoʻokomo ʻia ai nā kinoea ultra-maʻemaʻe i loko o ka reactor a hoʻopaʻa maikaʻi ʻia, no laila e hui pū lākou i nā wela kiʻekiʻe e hoʻoulu ai i nā pilina kemika a waiho ʻia i nā wafers semiconductor i nā ʻāpana atomika lahilahi e hana i ka epitaxy o nā mea a me nā semiconductor.

I nā lako CVD, ʻaʻole hiki ke kau pololei ʻia ka substrate ma luna o ka metala a i ʻole ma kahi kumu no ka epitaxial deposition, no ka mea, e hoʻopilikia ʻia e nā kumu he nui. No laila, pono ka susceptor a i ʻole ka pā e paʻa i ka substrate, a laila e hoʻohana i ka ʻenehana CVD e hana i ka epitaxial deposition ma ka substrate. ʻO kēia susceptor heMOCVD graphite susceptor(kapa ʻia hoʻiʻO ka pā graphite MOCVD).

Hōʻike ʻia kona ʻano ma ke kiʻi ma lalo nei.

No ke aha e pono ai ka graphite susceptor i ka uhi CVD?

ʻO ka graphite susceptor kekahi o nā mea nui i nā lako MOCVD. ʻO ia ka mea lawe a me ka mea wela o ka substrate. ʻO kāna mau ʻāpana hana e like me ka thermal stability a me ka thermal uniformity e pāʻani i kahi kūlana koʻikoʻi i ka maikaʻi o ka ulu ʻana o nā mea epitaxial, a hoʻoholo pololei i ka kūlike a me ka maʻemaʻe o nā mea kiʻiʻoniʻoni lahilahi epitaxial. No laila, pili pono kona maikaʻi i ka hoʻomākaukau ʻana i nā wafers epitaxial. I ka manawa like, me ka hoʻonui ʻana i ka nui o nā mea hoʻohana a me nā hoʻololi i nā kūlana hana, maʻalahi loa ke ʻaʻahu a me ka waimaka, he mea hoʻopau. ʻO ka conductivity thermal maikaʻi loa a me ka paʻa o ka graphite e hāʻawi iā ia i mea maikaʻi loa ma ke ʻano he kumu kumu o nā lako MOCVD.

Eia naʻe, inā he graphite maʻemaʻe wale nō, aia kekahi mau pilikia. Ma ke kaʻina hana, e loaʻa nā kinoea corrosive koena a me nā mea metala organik, a ʻo ka graphite susceptor e corrode a hāʻule, kahi e hōʻemi nui ai i ke ola lawelawe o ka susceptor graphite. I ka manawa like, ʻo ka hāʻule ʻana o ka pauka graphite e hoʻohaumia i ka wafer, no laila pono e hoʻoponopono ʻia kēia mau pilikia i ka hoʻomākaukau ʻana o ke kumu. Hiki i ka ʻenehana uhi ke hāʻawi i ka hoʻoponopono ʻana i ka pauka ili, hoʻomaikaʻi i ka conductivity thermal, a me ka hāʻawi ʻana i ka wela, a ua lilo i ʻenehana nui e hoʻoponopono i kēia pilikia.

E like me ke kaiapuni noi a me ka hoʻohana ʻana i nā koi o ka waihona graphite, pono e loaʻa i ka uhi ʻili i nā ʻano penei:

1. Kiʻekiʻe kiʻekiʻe a me ka uhi piha:Aia ke kumu graphite i kahi wela kiʻekiʻe a me ka hana corrosive. Pono e uhi pono ʻia ka ʻili, a pono e loaʻa i ka uhi ʻana i ka paʻa maikaʻi e pāʻani i kahi kuleana pale maikaʻi.

2. Palahalaha ili maikai:No ka mea, ʻo ke kumu graphite i hoʻohana ʻia no ka ulu ʻana o ka kristal hoʻokahi e pono ai i kahi pālahalaha kiʻekiʻe loa, pono e mālama ʻia ka palahalaha mua o ke kumu ma hope o ka hoʻomākaukau ʻana o ka uhi ʻana, ʻo ia hoʻi, pono ke ʻano like ʻole o ka ʻili.

3. Ka ikaika pili maikaʻi:ʻO ka hoʻemi ʻana i ka ʻokoʻa o ka hoʻonui wela wela ma waena o ke kumu graphite a me ka mea uhi hiki ke hoʻomaikaʻi maikaʻi i ka ikaika paʻa ma waena o nā mea ʻelua. Ma hope o ka ʻike ʻana i nā pōʻai wela wela kiʻekiʻe a haʻahaʻa, ʻaʻole maʻalahi ka uhi ʻana.

4. Kiʻekiʻe thermal conductivity:Pono ka ulu ʻana o ka puʻupuʻu kiʻekiʻe i ke kumu graphite e hāʻawi i ka wela wikiwiki a me ka wela, no laila e loaʻa i ka mea uhi ke loaʻa ka wela wela kiʻekiʻe.

5. Kiekie hehee ai, kiʻekiʻe wela oxidation kū'ē a me ka corrosion kū'ē.Hiki i ka uhi ke hana paʻa i kahi kiʻekiʻe kiʻekiʻe a me ka hana corrosive.

ʻO ke kūpaʻa wela, ka like ʻana o ka wela a me nā ʻāpana hana ʻē aʻe o kaSusceptor graphite i uhi ʻia ʻo SiCpāʻani i kahi hana koʻikoʻi i ka maikaʻi o ka ulu ʻana o nā mea epitaxial, no laila ʻo ia ka mea koʻikoʻi o nā lako MOCVD.

β-SiC (3C-SiC) puka aniani koho ʻia e like me ka uhi. Ke hoʻohālikelike ʻia me nā ʻano aniani ʻē aʻe, loaʻa kēia ʻano kristal i kahi ʻano o nā waiwai maikaʻi loa e like me ke kūpaʻa thermodynamic maikaʻi, ke kūpaʻa ʻana a me ka pale ʻana i ka corrosion. I ka manawa like, loaʻa iā ia kahi conductivity thermal i kūlike me ka graphite, no laila e hāʻawi ana i nā waiwai kūikawā. Hiki iā ia ke hoʻoponopono maikaʻi i ka hemahema o ka kumu graphite i hoʻokumu ʻia e ka wela wela a me ka corrosion a me ka pauka pauka i ka wā lawelawe, a hoʻolilo i ka ʻili o ka base graphite paʻa, non-porous, kiʻekiʻe ka wela, anti-corrosion, anti-oxidation a me nā ʻano ʻē aʻe, e hoʻomaikaʻi ai i ka maikaʻi o ka epitaxial kristal a me ke ola lawelawe o ka base graphite base. nā kapuahi).

Pehea e koho ai i ka pā graphite MOCVD / susceptor i kū i ka wela kiʻekiʻe a me ka corrosion?

Ke koho ʻana i kahigraphite pā a i ʻole susceptor no MOCVDʻAʻole i kū i ka corrosion wela, pono e noʻonoʻo ʻia nā kumu nui:

1. Maemae mea:Hiki i nā mea graphite maʻemaʻe kiʻekiʻe ke pale aku i ka corrosion a me ka oxidation i nā wela kiʻekiʻe a hoʻemi i ka hopena o nā haumia ma ke kaʻina deposition.

2. Ka nui a me ka porosity:ʻO nā pā graphite me ke kiʻekiʻe kiʻekiʻe a me ka porosity haʻahaʻa i ʻoi aku ka maikaʻi o ka ikaika mechanical a me ka pale ʻana i ka corrosion, a hiki ke pale maikaʻi i ke komo ʻana o ke kinoea a me ka erosion waiwai.

3. Thermal conductivity:ʻO ke kiʻekiʻe thermal conductivity graphite tray e kōkua i ka puʻunaue like ʻana i ka wela, e hōʻemi i ke kaumaha wela, a hoʻomaikaʻi i ka paʻa a me ke ola lawelawe o nā mea hana.

4. Lapaʻau ʻili:Hiki i nā pallets graphite i hoʻomaʻamaʻa kūikawā, e like me ka uhi ʻana a i ʻole ka plating, hiki ke hoʻonui i ko lākou pale ʻana i ka corrosion a me ke kūpaʻa ʻana.

5. Ka nui a me ke ʻano:E like me nā koi kūikawā o nā mea hana MOCVD, koho i ka nui kūpono a me ke ʻano e hōʻoia i ka hoʻohālikelike ʻana o ka pā me nā mea hana a me ka maʻalahi o ka hana.

6. Ka inoa o ka mea hana:E koho i kahi mea hana me ka inoa maikaʻi a me ka ʻike waiwai e hōʻoia i ka hilinaʻi o ka maikaʻi o ka huahana a me ka lawelawe ma hope o ke kūʻai aku.

7. Ke kumu kūʻai pono:Ma ke kumu o ka hoʻokō ʻana i nā koi ʻenehana, e noʻonoʻo i ke kumukūʻai kūpono a koho i nā huahana me ka hana kiʻekiʻe.

ʻO VET Energy kahi mea hoʻolako susceptor graphite maʻemaʻe kiʻekiʻe, hāʻawi mākou i kahi ākea o nā ʻāpana, a hiki ke hoʻohana ʻia i nā lako MOCVD o nā hōʻailona like ʻole, nā hiʻohiʻona a me nā kikoʻī. ʻO kaSusceptor graphite i uhi ʻia ʻo SiChana ʻia e VET Energy ʻaʻohe wahi hoʻopili uhi a ʻaʻohe loulou nāwaliwali. Ma ke ʻano o ke ola lawelawe, hiki iā lākou ke hoʻokō i nā koi o nā mea kūʻai aku me nā pono like ʻole (me ka hoʻohana ʻana i nā lewa chlorine), a ʻoluʻolu nā mea kūʻai aku e nīnau a nīnau.