Chii chinonzi MOCVD graphite tray?

Wafer epitaxial growth inowanikwa kuburikidza ne metal organic chemical vapor deposition (MOCVD) tekinoroji, umo magasi ekupedzisira-akachena anobayiwa mu reactor uye akakwenenzverwa metered, kuitira kuti asanganise pakudziya kwakakwirira kukonzera kusangana kwemakemikari uye anoiswa pane semiconductor wafers mune yakaonda kwazvo atomic layers kuti iite epitaxy yemidziyo yemidziyo.

Mumidziyo yeCVD, iyo substrate haigone kuiswa zvakananga pasimbi kana kungoita pachigadziko che epitaxial deposition, nekuti ichabatwa nezvakawanda zvinhu. Naizvozvo, susceptor kana tireyi inodiwa kubata iyo substrate, uye ipapo shandisa CVD tekinoroji kuita epitaxial deposition pane substrate. Iyi susceptor is aMOCVD graphite susceptor(inonziwoMOCVD graphite tray).

Chimiro chayo chinoratidzwa mumufananidzo uri pasi apa:

Sei iyo graphite susceptor ichida CVD coating?

Iyo graphite susceptor ndechimwe chezvinhu zvakakosha muMOCVD michina. Ndiyo inotakura uye inopisa chinhu che substrate. Maitiro ayo ekuita senge kugadzikana kwekupisa uye kufanana kwekupisa kunoita basa rakasimba mumhando yekukura kwezvinhu epitaxial, uye inotarisisa zvakanangana uye kuchena kwe epitaxial yakaonda firimu zvinhu. Nokudaro, hutano hwayo hunokanganisa zvakananga kugadzirira kwe epitaxial wafers. Panguva imwecheteyo, nekuwedzera kwenhamba yekushandiswa uye kuchinja mumamiriro ekushanda, zviri nyore kwazvo kupfeka uye kubvarura, inodyiwa. Iyo yakanakisa yekupisa conductivity uye kugadzikana kwegraphite kunopa mukana wakakura sechikamu chechikamu cheMOCVD michina.

Zvisinei, kana iri graphite yakachena chete, pachava nemamwe matambudziko. Muchigadzirwa chekugadzira, pachave nemagasi anoodza akasara uye simbi organic matter, uye girafu susceptor inokora uye inodonha, izvo zvinoderedza zvakanyanya hupenyu hwesevhisi yegraphite susceptor. Panguva imwecheteyo, iyo inodonha graphite poda ichakonzerawo kusvibiswa kune yakapfava, saka matambudziko aya anoda kugadziriswa mugadziriro yegadziriro yechigadziko. Coating tekinoroji inogona kupa pamusoro pehupfu kugadzirisa, kuwedzera kupisa conductivity, uye kuenzanisa kupisa kugovera, uye yave iyo huru tekinoroji yekugadzirisa dambudziko iri.

Zvinoenderana nemamiriro ekushandisa uye kushandiswa kwezvinodiwa zveiyo graphite base, iyo yekumusoro coating inofanirwa kuve neanotevera maitiro:

1. High density uye yakazara yakazara:Iyo graphite base iri mukupisa kwakanyanya uye corrosive work environment. Iyo yepamusoro inofanira kunge yakafukidzwa zvakakwana, uye kupfekedza kunofanira kuva nehukuru hwakanaka kuti uite basa rakanaka rekudzivirira.

2. Kupfava kwakanaka kwepamusoro:Sezvo chigadziko che graphite chinoshandiswa pakukura kwekrisiti imwe chete chinoda kutaridzika kwepamusoro kwepamusoro, iyo yepakutanga flatness yenheyo inofanira kuchengetedzwa mushure mokunge jira rakagadzirirwa, kureva kuti, iyo yekuputira inofanira kunge yakafanana.

3. Simba rakanaka rekubatanidza:Kuderedza mutsauko mukupisa kwekuwedzera kwekofi pakati pechigadziko chegraphite uye chifukidzo chemukati chinogona kunyatso kuvandudza simba rekubatanidza pakati pezviviri. Mushure mekusangana nepamusoro uye yakaderera tembiricha yekushisa cycles, iyo yekuputira haisi nyore kuputika.

4. High thermal conductivity:Kukura kwemhando yepamusoro chip kunoda iyo graphite base kuti ipe nekukurumidza uye yunifomu kupisa, saka iyo yekupfekedza zvinhu inofanira kunge ine yakakwirira yekupisa conductivity.

5. Yakanyanya kunyungudika, yakanyanya tembiricha oxidation kuramba uye kushomeka kwekuora:Iyo yekupfekedza inofanirwa kukwanisa kushanda zvakatsiga mukupisa kwakanyanya uye inoora yekushanda nzvimbo.

Kugadzikana kwekushisa, kufanana kwekushisa uye mamwe maitiro ekuita kweSiC yakavharwa graphite susceptortamba basa rakasimba mumhando ye epitaxial zvinhu kukura, saka ndiyo yakakosha chikamu cheMOCVD michina.

β-SiC (3C-SiC) fomu yekristaro inosarudzwa sevhavha. Kana ichienzaniswa nemamwe mafomu ekristaro, iyi fomu yekristaro ine nhevedzano yezvivakwa zvakanakisa seyakanaka thermodynamic kugadzikana, oxidation kuramba uye kushomeka kwekudzivirira. Panguva imwecheteyo, ine inodziya conductivity iyo inonyanya kuenderana neye graphite, nekudaro ichipa iyo graphite base yakakosha zvivakwa. Inogona kugadzirisa zvinobudirira kutadza kweiyo graphite base inokonzerwa ne-high-temperature oxidation uye corrosion uye kurasikirwa kwehupfu panguva yebasa, uye kuita pamusoro peiyo graphite base dense, isina-porous, yakakwirira-tembiricha inodzivirira, anti-corrosion, anti-oxidation uye humwe hunhu, nekudaro kuvandudza kristaro epitaxial kunaka uye hupenyu hwesevhisi yehupenyu hwesevhisi yegirafu yebasa. vira).

Nzira yekusarudza MOCVD graphite tray / susceptor inopesana nekushisa kwepamusoro uye kuora?

Pakusarudza agraphite tray kana susceptor yeMOCVDiyo inopesana nekupisa kwekushisa kwepamusoro, zvinotevera zvakakosha zvinofanirwa kutariswa:

1. Kuchena kwezvinhu:Yakakwirira-kuchena graphite zvinhu zvinogona kuramba corrosion uye oxidation pakupisa kwakanyanya uye kuderedza kukanganiswa kwetsvina pane deposition process.

2. Density uye porosity:Graphite matireyi ane high density uye yakaderera porosity ane nani mechanicha simba uye ngura kuramba, uye anogona zvinobudirira kudzivirira gasi kupinda uye kukukurwa kwezvinhu.

3. Thermal conductivity:Iyo yakakwira yekupisa conductivity graphite tray inobatsira kugovera kupisa zvakaenzana, kuderedza kushushikana kwekupisa, nekuvandudza kugadzikana uye hupenyu hwebasa remidziyo.

4. Kurapwa kwepamusoro:Graphite pallets dzakaitwa yakakosha kurapwa kwepamusoro, senge kupfekedza kana plating, inogona kuwedzera kukwidziridza kwavo kusaora uye kusapfeka.

5. Saizi uye chimiro:Zvinoenderana nezvinodiwa chaizvo zveMOCVD midziyo, sarudza saizi yakakodzera uye chimiro kuti uve nechokwadi chekuenderana kwetireyi nemidziyo uye nyore kushanda.

6. Mukurumbira wemugadziri:Sarudza mugadziri ane mukurumbira wakanaka uye akapfuma ruzivo kuti ave nechokwadi chekuvimbika kwemhando yechigadzirwa uye mushure mekutengesa-basa.

7. Mutengo-kubudirira:Pachikonzero chekusangana nezvinodiwa zvetekinoroji, funga nezvekudhura-kushanda uye sarudza zvigadzirwa zvine mutengo wepamusoro.

VET Energy ndeyepamusoro-kuchena graphite susceptor mutengesi, tinopa huwandu hwakawanda hwezvikamu, uye inogona kushandiswa muMOCVD michina yemhando dzakasiyana, mhando uye zvakatemwa. TheSiC yakavharwa graphite susceptorinogadzirwa neVET Energy haina mapoinzi ekusangana uye hapana asina kusimba malink. Panyaya yehupenyu hwebasa, vanogona kusangana nezvinodiwa nevatengi vane zvinodiwa zvakasiyana (kusanganisira kushandiswa kweklorini-ine mamiriro ekunze), uye vatengi vanogamuchirwa kubvunza uye kubvunza.