Kukura kweWafer epitaxial kunowanikwa kuburikidza netekinoroji yesimbi organic chemical vapor deposition (MOCVD), umo magasi akachena zvakanyanya anopinzwa mureactor uye anoyerwa zvakanaka, kuitira kuti asanganiswe pakupisa kwakakwira kuti akonzere kusangana kwemakemikari uye anoiswa pamawafer esemiconductor muzvikamu zvitete kwazvo zveatomu kuti agadzire epitaxy yezvinhu uye compound semiconductors.
Mumidziyo yeCVD, substrate haigone kuiswa zvakananga pasimbi kana kungoiswa pachigadziko che epitaxial, nekuti ichakanganiswa nezvinhu zvakawanda. Saka, susceptor kana tireyi inodiwa kuti ibatisise substrate, uye wobva washandisa tekinoroji yeCVD kuita epitaxial deposition pasubstrate. Susceptor iyi iMOCVD graphite susceptor(inonziwotireyi yegrafiti yeMOCVD).
Chimiro chayo chinoratidzwa mumufananidzo uri pazasi:
Sei girafiti susceptor ichida CVD coating?
Girafu inonyungudutsa girafu ndeimwe yezvinhu zvakakosha mumidziyo yeMOCVD. Ndiyo inotakura uye inodziisa substrate. Zviyero zvayo zvekushanda zvakaita sekugadzikana kwekupisa uye kufanana kwekupisa zvinoita basa guru mukukura kwezvinhu zve epitaxial, uye zvinosarudza zvakananga kufanana uye kuchena kwezvinhu zve epitaxial thin film. Nokudaro, hunhu hwayo hunokanganisa zvakananga kugadzirira mawafer epitaxial. Panguva imwe chete, nekuwedzera kwehuwandu hwemashandisirwo uye shanduko mumamiriro ekushanda, zviri nyore kupfeka uye kubvaruka, inodyiwa. Kufambiswa kwakanaka kwekupisa uye kugadzikana kwegirafu kunoipa mukana mukuru sechikamu chekutanga chemidziyo yeMOCVD.
Zvisinei, kana iri graphite chete, pachava nematambudziko. Mukugadzirwa kwayo, pachava nemagasi anoramba achiora uye zvinhu zvesimbi, uye graphite susceptor ichaora yodonha, izvo zvinoderedza zvikuru hupenyu hwebasa re graphite susceptor. Panguva imwe chete, upfu hwe graphite hunodonha huchakonzerawo kusvibiswa kwewafer, saka matambudziko aya anofanira kugadziriswa mukugadzirira kwechigadziko. Tekinoroji yekuputira inogona kupa hupfu hwepamusoro, kuwedzera kupisa, uye kuenzana kwekugoverwa kwekupisa, uye yave tekinoroji huru yekugadzirisa dambudziko iri.
Zvichienderana nemamiriro ekushandiswa uye zvinodiwa zvekushandisa kwechigadziko chegraphite, kufukidza kwepamusoro kunofanirwa kuve nehunhu hunotevera:
1. Kuwanda kwevanhu uye kufukidzwa kwakazara:Chikamu chegirafiti chiri munzvimbo inodziya zvakanyanya uye inoparadza. Pamusoro payo panofanira kunge pakafukidzwa zvakakwana, uye chifukidziro chinofanira kunge chakakora zvakanaka kuti chidzivirire.
2. Kureba kwakanaka kwenzvimbo:Sezvo hwaro hwegirafiti hunoshandiswa pakukura kwekristaro imwe chete huchida kuti pamusoro payo pave pakadzikama zvakanyanya, hurefu hwepakutanga hwehwaro hunofanira kuchengetedzwa mushure mekunge hwaro hwagadzirwa, kureva kuti, pamusoro pehwaro hunofanira kunge hwakafanana.
3. Simba rakanaka rekubatana:Kuderedza mutsauko wekuwedzera kwekushisa pakati pechigadziko chegraphite nezvinhu zvekuputira kunogona kuvandudza simba rekubatana pakati pezviviri. Mushure mekusangana nekupisa kwakanyanya uye kwakaderera, kuputira hakusi nyore kutsemuka.
4. Kupisa kwakanyanya:Kukura kwemachipisi emhando yepamusoro kunoda kuti girafiti ishande zvakanaka kuti ipe kupisa kwakafanana uye nekukurumidza, saka chifukidziro chinofanira kunge chine thermal conductivity yakakwira.
5. Nzvimbo yekunyunguduka yakanyanya, kuramba kupisa kwe oxidation uye kuramba ngura:Kupfeka uku kunofanira kukwanisa kushanda zvakanaka munzvimbo inodziya zvakanyanya uye ine ngura.
Kugadzikana kwekupisa, kufanana kwekupisa uye zvimwe zvikamu zvekushanda kweSiC yakafukidzwa negraphite susceptorine basa guru mukukura kwezvinhu zve epitaxial, saka ndiyo chinhu chikuru cheMOCVD michina.
Chimiro chekristaro cheβ-SiC (3C-SiC) chinosarudzwa sechipfeko. Kana chichienzaniswa nedzimwe mhando dzekristaro, chimiro ichi chekristaro chine zvinhu zvakanaka zvakaita sekugadzikana kwakanaka kwethermodynamic, kuramba oxidation uye kuramba ngura. Panguva imwe chete, chine thermal conductivity inoenderana neya graphite, nokudaro ichipa graphite base zvinhu zvakakosha. Inogona kugadzirisa zvinobudirira kutadza kwe graphite base kunokonzerwa ne high-tembiricha oxidation uye ngura uye kurasikirwa nehupfu panguva yekushanda, uye kuita kuti pamusoro pe graphite base ive dense, isina maburi, inodzivirira kupisa kwakanyanya, inodzivirira ngura, inodzivirira oxidation nezvimwe zvinhu, nokudaro ichivandudza crystal epitaxial quality uye hupenyu hwebasa hwe graphite base (hupenyu hwebasa hweSiC coated graphite base hunoyerwa mumaoven).
Ungasarudza sei MOCVD girafiti tray/susceptor inodzivirira kupisa kwakanyanya uye ngura?
Pakusarudzagraphite tray kana susceptor yeMOCVDiyo inodzivirira ngura pakupisa kwakanyanya, zvinhu zvinotevera zvakakosha zvinofanirwa kutariswa:
1. Kuchena kwezvinhu:Zvinhu zvegrafiti zvine hutsanana hwakanyanya zvinogona kudzivirira ngura nekuoxidation zviri nani pakupisa kwakanyanya uye kuderedza kukanganiswa kwetsvina pakuiswa kwayo.
2. Kuwanda uye kukora:Matreyi eGraphite ane density yakakura uye porosity shoma ane simba riri nani remakanika uye anodzivirira ngura, uye anogona kudzivirira zvinobudirira kupinda kwegasi uye kukurwa kwezvinhu.
3. Kufambisa kwekupisa:Treyi yegrafiti inofambisa kupisa zvakanyanya inobatsira kuparadzira kupisa zvakaenzana, kuderedza kushushikana kwekupisa, uye kuvandudza kugadzikana uye hupenyu hwebasa remuchina.
4. Kurapa pamusoro:Mapallet eGraphite akambogadziriswa pamusoro pevhu, akadai sekuputira kana kuputira, anogona kuwedzera simba rawo rekudzivirira ngura uye kuramba kupfeka.
5. Saizi uye chimiro:Zvichienderana nezvinodiwa zvemuchina weMOCVD, sarudza saizi yakakodzera uye chimiro kuti uve nechokwadi chekuti tireyi inoenderana nemudziyo uye kuti zviri nyore kushandisa.
6. Mukurumbira wemugadziri:Sarudza mugadziri ane mukurumbira wakanaka uye ruzivo rwakakura kuti uve nechokwadi chekuvimbika kwemhando yechigadzirwa uye sevhisi yekutengeswa mushure mekutengesa.
7. Kubudirira kwemutengo:Panyaya yekuzadzisa zvinodiwa zvehunyanzvi, funga nezvekushandisa mari zvakanaka uye sarudza zvigadzirwa zvine mutengo wakakwira.
VET Energy ikambani inopa graphite susceptor yakachena kwazvo, tinopa mhando dzakasiyana-siyana, uye inogona kushandiswa muMOCVD michina yemhando dzakasiyana, mamodheru uye zvirevo.SiC yakafukidzwa negraphite susceptorYakagadzirwa neVET Energy haina nzvimbo dzekuonana dzinofukidza uye haina hukama husina kusimba. Panyaya yehupenyu hwebasa, inogona kusangana nezvinodiwa nevatengi vane zvinodiwa zvakasiyana (kusanganisira kushandisa mhepo ine chlorine), uye vatengi vanogamuchirwa kubvunza nekubvunza.
Nguva yekutumira: Kurume-01-2025