Ka tutuki te tipu epitaxial o te angaanga mā te hangarau whakapūmau matū matū waro whakarewa (MOCVD), e werohia ai ngā hau tino parakore ki roto i te tauhohenga, ā, ka inehia kia tino pai, kia whakakotahi ai i ngā pāmahana teitei hei whakaputa taunekeneke matū, ā, ka whakatakotoria ki runga i ngā angaanga haurua-ira i roto i ngā paparanga ngota tino angiangi hei hanga epitaxy o ngā rauemi me ngā haurua-ira matū.
I roto i ngā taputapu CVD, kāore e taea te whakatakoto tika i te papa ki runga i te konganuku, ki runga rānei i te turanga mō te whakatakoto epitaxial, nā te mea ka pāngia e ngā āhuatanga maha. Nō reira, me whai i tētahi ārai, i tētahi paepae rānei hei pupuri i te papa, kātahi ka whakamahi i te hangarau CVD hei mahi i te whakatakoto epitaxial ki runga i te papa. HePūwero karāhe MOCVD(e kiia ana hoki koPaepae karāhe MOCVD).
Kei te whakaatuhia tōna hanganga i te pikitia i raro nei:
He aha i hiahia ai te paninga CVD ki te pūwero graphite?
Ko te kaitahuri karāpiti tētahi o ngā wāhanga matua o ngā taputapu MOCVD. Koinei te kaikawe me te wāhanga whakamahana o te papa. Ko ōna tawhā mahi pēnei i te pumau o te wera me te ōritetanga o te wera he mea nui ki te kounga o te tipu o te rauemi epitaxial, ā, ka whakatau tika i te ōritetanga me te parakore o ngā rauemi kiriata angiangi epitaxial. Nō reira, ka pā tika tōna kounga ki te whakarite i ngā papa epitaxial. I taua wā anō, me te pikinga ake o te maha o ngā whakamahinga me ngā huringa o ngā tikanga mahi, he tino ngāwari ki te pakaru, ā, he mea pau. Ko te kawe wera pai me te pumau o te karāpiti ka hoatu he painga nui hei wāhanga turanga o ngā taputapu MOCVD.
Heoi, ki te mea he karāpiti parakore noa iho, ka puta ētahi raruraru. I roto i te tukanga whakaputa, ka toe ngā hau waikura me ngā mea matū whakarewa, ā, ka waikura te kaiāwhina karāpiti, ka taka, ka tino whakaiti i te roa o te mahi a te kaiāwhina karāpiti. I taua wā anō, ka pāngia hoki te papa e te paura karāpiti e taka ana, nō reira me whakatau ēnei raruraru i roto i te tukanga whakarite o te turanga. Ka taea e te hangarau paninga te whakarato i te pumau o te paura mata, te whakarei ake i te kawe wera, me te taurite i te tohatoha wera, ā, kua noho hei hangarau matua hei whakatau i tēnei raruraru.
E ai ki te taiao tono me ngā whakaritenga whakamahinga o te turanga graphite, me whai i te paninga mata ngā āhuatanga e whai ake nei:
1. Te matotoru me te kapi katoa:Kei roto te turanga karāpeti i te taiao mahi pāmahana teitei me te waikura. Me kapi katoa te mata, me te matotoru hoki o te paninga kia pai ai te tiaki.
2. Papatahi pai o te mata:I te mea he tino papatahi te mata o te turanga karāhe e whakamahia ana mō te tipu tioata kotahi, me pupuri tonu te papatahi taketake o te turanga i muri i te whakarite o te paninga, arā, me ōrite te mata paninga.
3. He kaha pai te here:Mā te whakaiti i te rerekētanga o te tauwehenga whānui wera i waenga i te turanga karāpeti me te rauemi paninga ka taea te whakapai ake i te kaha here i waenga i ngā mea e rua. Whai muri i te wheako i ngā huringa wera pāmahana teitei me te pāmahana iti, kāore e ngawari te pakaru o te paninga.
4. Te kawe wera teitei:Ko te pūtake karāpiti kia tere, kia ōrite hoki te wera e hiahiatia ana kia tupu ai te maramara kounga teitei, nō reira me teitei te kawe wera o te rauemi paninga.
5. Teitei o te ira rewa, te ātete ki te waikura i te pāmahana teitei, me te ātete ki te waikura:Me kaha te paninga ki te mahi pumau i roto i te taiao mahi pāmahana teitei me te taiao mahi waikura.
Ko te pumau o te wera, te ōritetanga o te wera me ētahi atu tawhā mahi o tePūwero whakapūmau kua pania ki te SiCHe mea nui tēnei ki te kounga o te tipu o ngā rauemi epitaxial, nō reira koinei te wāhanga matua o ngā taputapu MOCVD.
Ko te āhua tioata β-SiC (3C-SiC) te mea i whiriwhiria hei paninga. Ki te whakatauritea ki ētahi atu āhua tioata, he maha ngā āhuatanga pai o tēnei āhua tioata pērā i te pumau thermodynamic pai, te ātete ki te waikura me te ātete ki te waikura. I taua wā anō, he rite tonu te kawe wera ki te karāpeti, ā, ka hoatu he āhuatanga motuhake ki te turanga karāpeti. Ka taea e ia te whakaoti pai i te pakaru o te turanga karāpeti i puta mai i te waikura pāmahana teitei me te waikura me te ngaronga paura i te wā e whakamahia ana, ā, ka hanga i te mata o te turanga karāpeti kia mātotoru, kāore e pore, ātete ki te pāmahana teitei, ātete ki te waikura, ātete ki te waikura me ētahi atu āhuatanga, ā, ka whakapai ake i te kounga epitaxial tioata me te roa o te oranga o te turanga karāpeti (ka inehia te roa o te oranga o te turanga karāpeti kua pania ki te SiC i roto i ngā oumu).
Me pēhea te whiriwhiri i te paepae/ārai karāhe MOCVD e ātete ana ki te pāmahana tiketike me te waikura?
I te wā e whiriwhiri ana i tētahipaepae graphite ranei susceptor mo MOCVDhe ātete ki te waikura pāmahana teitei, me whai whakaaro ki ngā āhuatanga matua e whai ake nei:
1. Te parakore o ngā rauemi:Ka taea e ngā rauemi karāwhata tino parakore te ātete ake i te waikura me te waikura i ngā pāmahana tiketike, ā, ka whakaiti i te pānga o ngā poke ki te tukanga whakatakotoranga.
2. Te mātotoru me te porosity:He kaha ake te miihini me te ātete ki te waikura o ngā paepae graphite he nui te kiato me te iti o te porosity, ā, ka taea te ārai i te urunga hau me te horo o ngā rauemi.
3. Te kawe wera:Mā te paepae karāhe kawe wera teitei ka āwhina i te tohatoha ōrite i te wera, te whakaiti i te ahotea wera, me te whakapai ake i te pumau me te roa o te ora o ngā taputapu.
4. Te maimoatanga mata:Ka taea e ngā papa graphite kua oti te tukatuka mata motuhake, pērā i te paninga, te whakakikorua rānei, te whakapakari ake i tō rātou ātete ki te waikura me te ātete ki te kakahu.
5. Rahi me te āhua:E ai ki ngā whakaritenga motuhake o ngā taputapu MOCVD, tīpakohia te rahi me te āhua e tika ana kia hototahi ai te paepae ki ngā taputapu, kia ngāwari ai hoki te whakahaere.
6. Te ingoa rongonui o te kaihanga:Kōwhiria he kaihanga me te ingoa pai me te wheako nui hei whakarite i te pono o te kounga hua me te ratonga i muri i te hoko.
7. Te whai hua o te utu:I runga i te kaupapa o te whakatutuki i ngā whakaritenga hangarau, whakaarohia te whai huatanga o te utu, me te whiriwhiri i ngā hua he nui ake te utu mahi.
He kaiwhakarato pūwero graphite parakore a VET Energy, he whānuitanga o ngā kāwai e tukuna ana e mātou, ā, ka taea te whakamahi i roto i ngā taputapu MOCVD o ngā waitohu, tauira me ngā whakatakotoranga rerekē. Ko tePūwero whakapūmau kua pania ki te SiCKāore he pūwāhi whakapā paninga, kāore hoki he hononga ngoikore o ngā mea i hangaia e VET Energy. Mō te roa o te wā mahi, ka taea e rātou te whakatutuki i ngā hiahia o ngā kiritaki me ngā hiahia rerekē (tae atu ki te whakamahi i ngā hau kei roto he chlorine), ā, nau mai haere mai ki te kōrero me te uiui.
Wā tuku: Maehe-01-2025