Gare ya MOCVD ni iki?

Iterambere rya epitaxial rya Wafer rigerwaho hifashishijwe ikoranabuhanga ry’imyuka mvaruganda (MOCVD), aho imyuka ya ultra-yera yinjizwa muri reakteri kandi igapimwa neza, ku buryo ihurira ku bushyuhe bwo hejuru kugira ngo itere imikoranire y’imiti kandi igashyirwa kuri wafer ya semiconductor mu bice bito cyane bya atome kugira ngo ikore epitaxy yibikoresho hamwe na semiconductor.

Mubikoresho bya CVD, substrate ntishobora gushyirwa mubyuma cyangwa muburyo bwo gushira epitaxial, kuko bizaterwa nibintu byinshi. Kubwibyo, susceptor cyangwa tray birakenewe kugirango ufate substrate, hanyuma ukoreshe tekinoroji ya CVD kugirango ukore epitaxial deposition kuri substrate. Iyi suseptor ni aMOCVD igishushanyo mbonera(nanone yitwaMOCVD igishushanyo mbonera).

Imiterere yacyo igaragara ku gishushanyo gikurikira:

Kuki susiteptor ya grafite ikenera CVD?

Graphite susceptor nimwe mubice byingenzi mubikoresho bya MOCVD. Nibintu bitwara no gushyushya ibintu bya substrate. Imikorere yimikorere nkubushyuhe bwumuriro hamwe nubushyuhe bwumuriro bigira uruhare runini mubwiza bwikura ryibintu bya epitaxial, kandi bikagaragaza neza uburinganire nubuziranenge bwibikoresho bya firime epitaxial. Kubwibyo, ubuziranenge bwayo bugira ingaruka ku itegurwa rya epitaxial wafers. Mugihe kimwe, hamwe no kwiyongera kwimibare ikoreshwa nimpinduka mubikorwa byakazi, biroroshye cyane kwambara no kurira, birakoreshwa. Ubushuhe buhebuje bwumuriro hamwe na stabilite ya grafite biha inyungu nini nkibice fatizo byibikoresho bya MOCVD.

Ariko, niba ari grafite gusa, hazabaho ibibazo. Mubikorwa byo kubyaza umusaruro, hazaba imyuka isigaye yangiza nibintu byumubiri kama, hamwe na susiteptor ya grafite irashobora kwangirika no kugwa, ibyo bikagabanya cyane ubuzima bwumurimo wa susite ya grafite. Muri icyo gihe, ifu ya grafite igwa nayo izatera umwanda wafer, bityo ibyo bibazo bigomba gukemurwa mugutegura shingiro. Tekinoroji yo gutwikira irashobora gutanga ifu yubutaka, kongera ubushyuhe bwumuriro, no kuringaniza ubushyuhe, kandi yabaye tekinoroji nyamukuru yo gukemura iki kibazo.

Ukurikije ibidukikije bisabwa kandi ukoreshe ibisabwa shusho ya grafite, igifuniko cyo hejuru kigomba kugira ibintu bikurikira:

1. Ubucucike bukabije kandi bwuzuye:Igishushanyo mbonera kiri mubushyuhe bwo hejuru kandi bukora nabi. Ubuso bugomba kuba butwikiriwe neza, kandi igipfundikizo kigomba kugira ubucucike bwiza kugirango bugire uruhare runini rwo kurinda.

2. Ubuso bwiza:Kubera ko igishushanyo mbonera gikoreshwa mugukura kwa kristu imwe bisaba uburebure buringaniye cyane, uburinganire bwumwimerere bwibanze bugomba kubungabungwa nyuma yo gutwikirwa, ni ukuvuga hejuru yubuso bugomba kuba bumwe.

3. Imbaraga nziza zo guhuza:Kugabanya itandukaniro rya coefficente yo kwagura amashyuza hagati ya grafite base nibikoresho byo gutwikira birashobora kunoza neza imbaraga zihuza byombi. Nyuma yo guhura nubushyuhe bwo hejuru nubushyuhe buke, ubushyuhe ntibworoshye gucika.

4. Umuyoboro mwinshi w'amashanyarazi:Iterambere ryiza rya chip risaba igishushanyo mbonera kugirango gitange ubushyuhe bwihuse kandi bumwe, bityo ibikoresho byo gutwikira bigomba kugira ubushyuhe bwinshi.

5. Ahantu ho gushonga cyane, ubushyuhe bwo hejuru bwa okiside irwanya ruswa:Igifuniko kigomba kuba gishobora gukora neza mubushyuhe bwo hejuru kandi bukora neza.

Ubushyuhe bwumuriro, uburinganire bwubushyuhe nibindi bipimo byaSiC yatwikiriye grafite susceptorGira uruhare rukomeye mubwiza bwikura ryibintu bya epitaxial, nuko rero nibyingenzi byingenzi bigize ibikoresho bya MOCVD.

form-SiC (3C-SiC) ifishi ya kristu yatoranijwe nkigifuniko. Ugereranije nubundi buryo bwa kirisiti, ubu buryo bwa kristu bufite urukurikirane rwibintu byiza nkibintu byiza bya termodinamike, kurwanya okiside no kurwanya ruswa. Mugihe kimwe, ifite ubushyuhe bwumuriro bujyanye ahanini nubushushanyo, bityo butanga igishushanyo cyihariye kidasanzwe. Irashobora gukemura neza kunanirwa kwishusho ya grafite iterwa nubushyuhe bwo hejuru bwa okiside hamwe na ruswa hamwe no gutakaza ifu mugihe cya serivisi, kandi bigatuma ubuso bwibanze bwa grafite bwimbitse, butabangamiwe nubushyuhe bwo hejuru, burwanya ruswa, anti-okiside nibindi biranga, bityo bikazamura ubwiza bwa epitaxial hamwe nubuzima bwa serivise ya base ya grafite (ubuzima bwa serivisi ya SiC).

Nigute ushobora guhitamo MOCVD grafite tray / susceptor irwanya ubushyuhe bwinshi no kwangirika?

Iyo uhisemo aigishushanyo mbonera cyangwa susceptor ya MOCVDibyo birwanya ubushyuhe bwo hejuru, ibintu by'ingenzi bigomba kwitabwaho:

1. Ubuziranenge bwibintu:Ibikoresho bya grafite bifite isuku nyinshi birashobora kurwanya neza ruswa na okiside ku bushyuhe bwinshi kandi bikagabanya ingaruka z’imyanda ku buryo bwo kubitsa.

2. Ubucucike nubwitonzi:Imashini ya Graphite ifite ubucucike bukabije hamwe nububasha buke bifite imbaraga zumukanishi hamwe no kurwanya ruswa, kandi birashobora gukumira neza kwinjiza gaze no gutwarwa nisuri.

3. Ubushyuhe bwumuriro:Inzira ndende yubushyuhe bwa grafite tray ifasha gukwirakwiza ubushyuhe, kugabanya imihangayiko yumuriro, no kuzamura ubuzima nubuzima bwibikoresho.

4. Kuvura hejuru:Graphite pallets yakorewe ubuvuzi bwihariye, nko gutwikira cyangwa gufata isahani, birashobora kongera imbaraga zo kurwanya ruswa no kwambara.

5. Ingano n'imiterere:Ukurikije ibisabwa byihariye byibikoresho bya MOCVD, hitamo ingano nuburyo bukwiye kugirango umenye guhuza inzira hamwe nibikoresho kandi byoroshye gukora.

6. Izina ryabakora:Hitamo uruganda rufite izina ryiza nuburambe bukomeye kugirango wemeze ubwiza bwibicuruzwa na serivisi nyuma yo kugurisha.

7. Ikiguzi-cyiza:Mugihe cyo kuzuza ibisabwa bya tekiniki, tekereza neza kandi uhitemo ibicuruzwa bifite imikorere ihanitse.

Ingufu za VET nisoko ryiza cyane rya grafite susceptor itanga, dutanga ibyiciro byinshi, kandi birashobora gukoreshwa mubikoresho bya MOCVD byibirango bitandukanye, imiterere nibisobanuro. UwitekaSiC yatwikiriye grafite susceptorbyakozwe na VET Ingufu zidafite aho zihurira kandi ntaho zihurira. Kubijyanye nubuzima bwa serivisi, barashobora kuzuza ibyifuzo byabakiriya bafite ibyo bakeneye bitandukanye (harimo no gukoresha ikirere kirimo chlorine), kandi abakiriya barahawe ikaze kubaza no kubaza.