Agasanduku ka grafiti ka MOCVD ni iki?

Iterambere rya Wafer epitaxial rigerwaho binyuze mu ikoranabuhanga rya metal organic chemical vapor deposition (MOCVD), aho imyuka idafite isuku cyane ishyirwa muri reactor hanyuma igapimwa neza, ku buryo ihurira ku bushyuhe bwinshi kugira ngo itere imikoranire ya chemical kandi igashyirwa kuri wafer za semiconductor mu bice bito cyane bya atome kugira ngo habeho epitaxy y'ibikoresho na semiconductors.

Mu bikoresho bya CVD, substrate ntishobora gushyirwa ku cyuma cyangwa ku gice cyo hasi cyo gushyiramo epitaxial, kuko izagirwaho ingaruka n'ibintu byinshi. Kubwibyo, hakenewe susceptor cyangwa isahani kugira ngo ifate substrate, hanyuma hagakoreshwa ikoranabuhanga rya CVD kugira ngo hakoreshwe epitaxial kuri substrate. Iyi susceptor niMOCVD graphite susceptor(byitwa kandiAgasanduku ka grafiti ya MOCVD).

Imiterere yayo igaragara ku ishusho iri hepfo:

Kuki icyuma gikingira girafu gikenera irangi rya CVD?

Igikoresho cya grafiti ni kimwe mu bice by'ingenzi mu bikoresho bya MOCVD. Ni cyo gitwara n'igishyushya cy'ubutaka. Ibipimo by'imikorere yacyo nko kudahindagurika kw'ubushyuhe no guhuza ubushyuhe bigira uruhare runini mu mikurire y'ibikoresho bya epitaxial, kandi bigena mu buryo butaziguye uburinganire n'ubuziranenge bw'ibikoresho bya epitaxial thin film. Kubwibyo, ubwiza bwacyo bugira ingaruka zitaziguye ku itegurwa rya wafers za epitaxial. Muri icyo gihe, hamwe n'ubwiyongere bw'ikoreshwa n'impinduka mu mikorere, biroroshye cyane kwangirika no kwangirika, ni ikintu gishobora gukoreshwa. Uburyo bwiza bwo gutwara ubushyuhe n'ubudahindagurika bwa grafiti biyiha inyungu ikomeye nk'igice cy'ibanze cy'ibikoresho bya MOCVD.

Ariko, niba ari grafiti gusa, hazabaho ibibazo bimwe na bimwe. Mu ikorwa, hazabaho imyuka ihumanya isigara n'ibintu by'icyuma, kandi susceptor ya grafiti izangirika ikagwa, ibyo bigabanya cyane igihe cy'imikorere ya susceptor ya grafiti. Muri icyo gihe, ifu ya grafiti igwa izatera umwanda kuri wafer, bityo ibi bibazo bigomba gukemurwa mu itegurwa ry'ishingiro. Ikoranabuhanga ryo gusiga rishobora gutanga ifu yo hejuru, kongera imikorere y'ubushyuhe, no kuringaniza ikwirakwizwa ry'ubushyuhe, kandi ryabaye ikoranabuhanga nyamukuru ryo gukemura iki kibazo.

Dukurikije imiterere y'aho icyuma gikoreshwa n'ibisabwa ku ishingiro rya grafiti, igipfundikizo cyo hejuru kigomba kugira ibi bikurikira:

1. Ubucucike bwinshi n'uburyo bwose bwo gukwirakwira:Igishishwa cya grafiti kiri ahantu hakorerwa ubushyuhe bwinshi kandi hashobora kwangiza. Ubuso bugomba kuba butwikiriwe neza, kandi igishishwa kigomba kuba gifite ubucucike bwiza kugira ngo kigire uruhare rwiza mu kurinda.

2. Ubuso bwiza bworoshye:Kubera ko ishingiro rya grafiti rikoreshwa mu gukura kwa kristu imwe risaba ubuso bunini cyane, ubugari bw'ibanze bw'ishingiro bugomba kugumana ubugari nyuma yo gutegurwa, ni ukuvuga ko ubuso bugomba kuba bumwe.

3. Ingufu nziza zo guhuza:Kugabanya itandukaniro mu kwaguka k'ubushyuhe hagati y'ishingiro rya grafiti n'ibikoresho byo gusiga bishobora kunoza neza imbaraga zo guhuza hagati y'ibyo byombi. Nyuma yo kugira ibihe by'ubushyuhe buri hejuru n'ubushyuhe buke, gusiga ntibiba byoroshye gucika.

4. Ubushyuhe bwinshi butuma ibintu bihinduka:Kugira ngo chip nziza ikure bisaba ko icyuma gikoresha grafiti gitanga ubushyuhe bwihuse kandi bungana, bityo ibikoresho byo gusiga bigomba kugira ubushyuhe bwinshi.

5. Ahantu hashongesha cyane, kurwanya ubushyuhe bwinshi no kurwanya ingese:Irangi rigomba kuba rishobora gukora neza mu gihe hari ubushyuhe bwinshi n'ahantu hakorerwa hangirika.

Ubudahangarwa bw'ubushyuhe, uburinganire bw'ubushyuhe n'ibindi bipimo by'imikorere byaIgikoresho cya grafiti gitwikiriwe na SiCbigira uruhare runini mu mikurire y’ibikoresho bya epitaxial, bityo ni cyo gice cy’ingenzi cy’ibikoresho bya MOCVD.

Ishusho ya kristu ya β-SiC (3C-SiC) ni yo itoranywa nk'igitambaro. Ugereranyije n'izindi shusho za kristu, iyi shusho ya kristu ifite imiterere myiza nko kudahindagurika neza kwa thermodynamic, kudahangana na oxidation no kudahangana na corruption. Muri icyo gihe, ifite ubushobozi bwo gutwara ubushyuhe bujyanye n'ubwa graphite, bityo igaha imiterere yihariye ya graphite. Ishobora gukemura neza ikibazo cy'ishingiro rya graphite giterwa no kudahangana na oxidation y'ubushyuhe bwinshi no kwangirika no gutakaza ifu mu gihe cyo kuyikoresha, kandi igatuma ubuso bw'ishingiro rya graphite buba bwinshi, budafata imyenge, budafata ubushyuhe bwinshi, budafata ingese, budafata ingese n'ibindi biranga, bityo ikanoza ubwiza bwa kristu epitaxial n'ubuzima bw'ishingiro rya graphite (ubuzima bw'ishingiro rya graphite ritwikiriwe na SiC bupimirwa mu itanura).

Nigute wahitamo agasanduku ka MOCVD ka grafiti/agasanduku gakingira ubushyuhe bwinshi n'ingese?

Mu gihe uhisemoigishushanyo mbonera cyangwa susceptor ya MOCVDirwanya ingese y'ubushyuhe bwinshi, ibintu by'ingenzi bikurikira bigomba kwitabwaho:

1. Ubuziranenge bw'ibintu:Ibikoresho bya grafiti bifite isuku nyinshi bishobora kurwanya ingese no gushonga mu gihe cy'ubushyuhe bwinshi no kugabanya ingaruka z'imyanda ku gikorwa cyo kuyishyira mu mwanya wayo.

2. Ubucucike n'ubuso bw'imyenge:Udusanduku twa grafiti dufite ubucucike bwinshi n'umuyoboro muke dufite imbaraga nziza za mekanike kandi turwanya ingese, kandi dushobora gukumira neza kwinjira kwa gaze no kwangirika kw'ibintu.

3. Uburyo bwo gutwara ubushyuhe:Agasanduku ka grafiti gafite ubushyuhe bwinshi gafasha gukwirakwiza ubushyuhe ku buryo bungana, kagabanya ubushyuhe, kandi kakongera ubuziranenge n'igihe cyo gukoresha ibikoresho.

4. Gutunganya ubuso:Pallet za grafiti zakorewe isuku yihariye ku buso, nko gusiga cyangwa gutwikira, zishobora kongera ubushobozi bwazo bwo kudakira no kwangirika.

5. Ingano n'imiterere:Dukurikije ibisabwa byihariye by'ibikoresho bya MOCVD, hitamo ingano n'imiterere bikwiye kugira ngo urebe ko isahani ihuye n'ibikoresho kandi koroshya imikorere.

6. Izina ry'uruganda:Hitamo uruganda rufite izina ryiza n'uburambe buhanitse kugira ngo rumenye neza ko ireme ry'ibicuruzwa na serivisi nyuma yo kugurisha ari ingenzi.

7. Uburyo bwo kugabanya ikiguzi:Ukurikije ibisabwa mu rwego rwa tekiniki, tekereza ku bijyanye no gukoresha neza ibiciro kandi uhitemo ibicuruzwa bifite umusaruro uhenze cyane.

VET Energy ni ikigo gitanga ibikoresho bya grafiti bifite isuku nyinshi, dutanga ubwoko butandukanye bw'ibikoresho, kandi bishobora gukoreshwa mu bikoresho bya MOCVD by'ibirango bitandukanye, imiterere n'ibipimo.Igikoresho cya grafiti gitwikiriwe na SiCByakozwe na VET Energy nta hantu ho gutwikira kandi nta n'aho bihurira hadakomeye. Ku bijyanye n'igihe cyo gukora, bishobora guhaza ibyo abakiriya bakeneye bitandukanye (harimo no gukoresha ikirere kirimo chlorine), kandi abakiriya barakirwa kugisha inama no kubaza ibibazo.