Gịnị bụ mkpuchi sic?

Silicon Carbidebụ ihe siri ike nke nwere silicon na carbon, a na-ahụkwa ya n'okike dị ka moissanite mineral dị oke ụkọ. Enwere ike ijikọ ihe ndị dị na silicon carbide ọnụ site na ịpịpụta ihe iji mepụta seramiiki siri ike, nke a na-ejikarị eme ihe n'ọtụtụ ebe n'ọrụ ndị chọrọ ogologo oge, ọkachasị na usoro semiconductor.

Nhazi anụ ahụ nke SiC

Gịnị bụ mkpuchi SiC?

Mkpuchi SiC bụ mkpuchi siri ike, nke na-eguzogide iyi, nke nwere oke nchara na iguzogide okpomọkụ, yana ezigbo njikwa okpomọkụ. A na-ejikarị mkpuchi SiC dị ọcha a eme ihe na ụlọ ọrụ semiconductor na eletrọniki iji chebe ndị na-ebu wafer, ntọala na ihe ndị na-ekpo ọkụ site na gburugburu na-emebi emebi na nke na-emeghachi omume. Mkpuchi SiC dịkwa mma maka ite ọkụ na ikpo ọkụ sample na gburugburu vacuum dị elu, reactive na oxygen.

Elu ịdị ọcha SiC mkpuchi elu

Kedu usoro mkpuchi SiC?

A na-etinye obere oyi akwa silicon carbide n'elu ihe mkpuchi ahụ site na ijiCVD (Ntinye Uzuoku Kemịkalụ)A na-emekarị itinye ihe n'ọnọdụ okpomọkụ nke 1200-1300°C, omume nke mgbasawanye okpomọkụ nke ihe substrate kwesịrị ịdị ka mkpuchi SiC iji belata nrụgide okpomọkụ.

Ọdịdị kristal CVD SIC

Ihe nkiri mkpuchi CVD SIC nke kristal nhazi

Njirimara anụ ahụ nke mkpuchi SiC na-egosipụtakarị na oke okpomọkụ ya, ike ya siri ike, nguzogide nchara na ike okpomọkụ ya.

Ihe ndị a na-ahụkarị bụ paramita anụ ahụ:

Ike siri ike: Mkpuchi SiC na-enwekarị ike Vickers Hardness n'etiti 2000-2500 HV, nke na-enye ha oke ike iyi na ike iguzogide mmetụta na ngwa ụlọ ọrụ.

Njupụta: Mkpuchi SiC na-enwekarị njupụta nke 3.1-3.2 g/cm³. Njupụta dị elu na-eme ka ike igwe na ịdịte aka nke mkpuchi ahụ sie ike.

Ọkwa okpomọkụ: Mkpuchi SiC nwere nnukwu ike okpomọkụ, nke na-adịkarị n'etiti 120-200 W/mK (na 20°C). Nke a na-enye ya ezigbo ike okpomọkụ n'ebe okpomọkụ dị elu ma na-eme ka ọ dabara adaba karịsịa maka ngwa ọgwụgwọ okpomọkụ na ụlọ ọrụ semiconductor.

Ebe agbaze: silicon carbide nwere ebe agbaze ihe dị ka 2730°C ma nwee ezigbo nkwụsi ike okpomọkụ na oke okpomọkụ.

Ọnụọgụ nke Mgbasawanye Okpomọkụ: Mkpuchi SiC nwere obere ọnụọgụgụ nke mgbasawanye okpomọkụ (CTE), nke na-adịkarị n'etiti 4.0-4.5 µm/mK (na 25-1000℃). Nke a pụtara na nkwụsi ike ya dị mma karịa nnukwu ọdịiche okpomọkụ.

Mgbochi nrụrụ aka: Mkpuchi SiC na-eguzogide oke mbibi na gburugburu acid siri ike, alkali na oxidizing, ọkachasị mgbe a na-eji acid siri ike (dịka HF ma ọ bụ HCl), iguzogide nchara ha karịrị nke ihe eji eme ihe ochie.

Ihe mkpuchi ngwa SiC

A na-ejikarị mkpuchi SiC eme ka iguzogide nchara, iguzogide okpomọkụ dị elu, na iguzogide mbuze plasma nke ihe mkpuchi ahụ ka mma. Ihe mkpuchi ndị a na-ejikarị eme ihe gụnyere ihe ndị a:

Ụdị ihe e ji mee ihe	Ihe kpatara ngwa	Ojiji nkịtị
Grafit	- Ọdịdị ìhè, ezigbo njikwa okpomọkụ - Mana ọ dị mfe imebi site na plasma, ọ chọrọ nchedo mkpuchi SiC	Akụkụ ụlọ vacuum, ụgbọ mmiri graphite, tray etching plasma, wdg.
Quartz (Quartz/SiO₂)	- Ịdị ọcha dị elu mana ọ dị mfe ire ere - Mkpuchi na-eme ka iguzogide mbuze plasma dịkwuo mma	Akụkụ ụlọ CVD/PECVD
Seramiki (dịka alumina Al₂O₃)	- Ike dị elu na nhazi kwụsiri ike - Mkpuchi na-eme ka iguzogide nchara elu dịkwuo mma	Ihe mkpuchi ime ụlọ, ihe eji achọ mma, wdg.
Ígwè (dịka ọmụmaatụ, titanium, molybdenum).	- Ezigbo ike okpomọkụ mana enweghị ike iguzogide nchara - Mkpuchi ahụ na-eme ka elu kwụsie ike	Ihe mmeghachi omume usoro pụrụ iche
Ahụ sintered silicon carbide (SiC buru ibu)	- Maka gburugburu ebe obibi nwere ihe achọrọ dị elu maka ọnọdụ ọrụ dị mgbagwoju anya - Mkpuchi ahụ na-eme ka ịdị ọcha na iguzogide nchara dịkwuo mma	Akụkụ ụlọ CVD/ALD dị elu

A na-ejikarị ngwaahịa mkpuchi SiC eme ihe na mpaghara semiconductor ndị a

A na-eji ngwaahịa mkpuchi SiC eme ihe nke ọma na nhazi semiconductor, ọkachasị na oke okpomọkụ, oke nchara na gburugburu plasma siri ike. Ndị a bụ ọtụtụ usoro ma ọ bụ ubi ngwa dị mkpa na nkọwa dị mkpirikpi:

Usoro/ubi ngwa	Nkọwa dị mkpirikpi	Ọrụ mkpuchi Silicon Carbide
Ịcha ihe e ji ewepụ ihe n'ime plasma (Ịcha ihe e ji ewepụ ihe n'ime plasma)	Jiri gas ndị dabere na fluorine ma ọ bụ chlorine maka mbufe ụkpụrụ	Zụta mbuze plasma ma gbochie mmetọ ihe na ígwè
Ndobe anwụrụ kemịkalụ (CVD/PECVD)	Mwepụ nke oxide, nitride na ihe nkiri ndị ọzọ dị gịrịgịrị	Guzogide gas ndị na-emebi emebi ma mee ka ndụ ihe mejupụtara ya dịkwuo mma
Ụlọ nkesa anwụrụ ọkụ anụ ahụ (PVD)	Mwakpo ihe dị elu nke na-eme ka ihe dị n'ime ya sie ike n'oge usoro mkpuchi ahụ	Meziwanye iguzogide mbuze na iguzogide okpomọkụ nke ụlọ mmeghachi omume
Usoro MOCVD (dịka uto epitaxial SiC)	Mmeghachi omume ogologo oge n'okpuru oke okpomọkụ na ikuku hydrogen dị elu	Debe akụrụngwa kwụsiri ike ma gbochie mmetọ nke kristal na-eto eto
Usoro ọgwụgwọ okpomọkụ (LPCVD, mgbasa ozi, annealing, wdg)	A na-emekarị ya n'oge okpomọkụ dị elu na ikuku ikuku/ikuku	Chebe ụgbọ mmiri graphite na trays site na oxidation ma ọ bụ ire ere
Onye na-ebu Wafer/chuck (njikwa Wafer)	Isi graphite maka nnyefe ma ọ bụ nkwado wafer	Belata mwụfu ihe dị n'ime ma zere mmetọ kọntaktị
Ihe mejupụtara ụlọ ALD	Na-achịkwa ntinye oyi akwa atọm ugboro ugboro na nke ziri ezi	Mkpuchi ahụ na-eme ka ụlọ ahụ dị ọcha ma nwee oke nguzogide nchara megide ihe ndị na-ebute ụzọ

Gịnị kpatara ị ga-eji họrọ VET Energy?

VET Energy bụ onye nrụpụta, onye nrụpụta ihe ọhụrụ na onye ndu ngwaahịa mkpuchi SiC na China, ngwaahịa mkpuchi SiC bụ isi gụnyereonye na-ebu wafer nwere mkpuchi SiC, SiC kpuchiriihe na-egbochi epitaxial, Mgbaaka graphite nke SiC kpuchie, Akụkụ ọkara ọnwa nwere mkpuchi SiC, Ngwakọta carbon-carbon nke SiC kpuchie, Ụgbọ mmiri wafer a kpụchara SiC, Ihe na-ekpo ọkụ SiC kpuchiri, wdg. VET Energy na-agba mbọ inye ụlọ ọrụ semiconductor teknụzụ na ngwọta ngwaahịa kachasị mma, ma na-akwado ọrụ nhazi. Anyị ji obi anyị niile na-atụ anya ịbụ onye mmekọ ogologo oge gị na China.